CA2545566A1 - Multi-stage friction vacuum pump - Google Patents

Multi-stage friction vacuum pump Download PDF

Info

Publication number
CA2545566A1
CA2545566A1 CA002545566A CA2545566A CA2545566A1 CA 2545566 A1 CA2545566 A1 CA 2545566A1 CA 002545566 A CA002545566 A CA 002545566A CA 2545566 A CA2545566 A CA 2545566A CA 2545566 A1 CA2545566 A1 CA 2545566A1
Authority
CA
Canada
Prior art keywords
compressor stage
turbo
rotor
compressor
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002545566A
Other languages
English (en)
French (fr)
Inventor
Heinrich Englaender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2545566A1 publication Critical patent/CA2545566A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CA002545566A 2003-11-13 2004-10-28 Multi-stage friction vacuum pump Abandoned CA2545566A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10353034A DE10353034A1 (de) 2003-11-13 2003-11-13 Mehrstufige Reibungsvakuumpumpe
DE10353034.7 2003-11-13
PCT/EP2004/012196 WO2005047707A1 (de) 2003-11-13 2004-10-28 Mehrstufige reibungsvakuumpumpe

Publications (1)

Publication Number Publication Date
CA2545566A1 true CA2545566A1 (en) 2005-05-26

Family

ID=34559626

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002545566A Abandoned CA2545566A1 (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump

Country Status (7)

Country Link
US (1) US20070081889A1 (zh)
EP (1) EP1706645B1 (zh)
JP (1) JP2007510853A (zh)
CN (1) CN100453817C (zh)
CA (1) CA2545566A1 (zh)
DE (2) DE10353034A1 (zh)
WO (1) WO2005047707A1 (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
CN101392749B (zh) * 2008-10-31 2012-05-23 东北大学 旋涡式真空泵
GB0901872D0 (en) 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
DE102009011082A1 (de) * 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
EP2589814B3 (en) * 2010-07-02 2024-01-24 Edwards Japan Limited Vacuum pump
EP2620649B1 (en) 2012-01-27 2019-03-13 Edwards Limited Gas transfer vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
NL2013493A (en) 2013-10-16 2015-04-20 Asml Netherlands Bv Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method.
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
CN108105121B (zh) * 2017-12-29 2020-03-24 东北大学 一种多级复合高真空干泵
CA3159329A1 (en) * 2019-11-28 2021-06-03 Laminar Lift Systems Inc. Tesla turbine pump and associated methods
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (zh) * 1973-03-30 1974-10-25 Cit Alcatel
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Also Published As

Publication number Publication date
WO2005047707A1 (de) 2005-05-26
DE502004008709D1 (de) 2009-01-29
DE10353034A1 (de) 2005-06-09
JP2007510853A (ja) 2007-04-26
EP1706645B1 (de) 2008-12-17
CN100453817C (zh) 2009-01-21
EP1706645A1 (de) 2006-10-04
US20070081889A1 (en) 2007-04-12
CN1878962A (zh) 2006-12-13

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Dead