CA2540633C - Valve assembly - Google Patents

Valve assembly Download PDF

Info

Publication number
CA2540633C
CA2540633C CA2540633A CA2540633A CA2540633C CA 2540633 C CA2540633 C CA 2540633C CA 2540633 A CA2540633 A CA 2540633A CA 2540633 A CA2540633 A CA 2540633A CA 2540633 C CA2540633 C CA 2540633C
Authority
CA
Canada
Prior art keywords
plunger
valve
guide spring
valve assembly
orifice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA2540633A
Other languages
English (en)
French (fr)
Other versions
CA2540633A1 (en
Inventor
Walter D. Robertson, Iii
Thomas J. Mcnichols
Stephen Kramer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks Instrument LLC
Original Assignee
Brooks Instrument LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Instrument LLC filed Critical Brooks Instrument LLC
Publication of CA2540633A1 publication Critical patent/CA2540633A1/en
Application granted granted Critical
Publication of CA2540633C publication Critical patent/CA2540633C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetically Actuated Valves (AREA)
  • Lift Valve (AREA)
CA2540633A 2003-10-09 2004-10-08 Valve assembly Expired - Lifetime CA2540633C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US48149503P 2003-10-09 2003-10-09
US60/481,495 2003-10-09
PCT/US2004/033180 WO2005036035A2 (en) 2003-10-09 2004-10-08 Valve assembly

Publications (2)

Publication Number Publication Date
CA2540633A1 CA2540633A1 (en) 2005-04-21
CA2540633C true CA2540633C (en) 2012-12-04

Family

ID=34434814

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2540633A Expired - Lifetime CA2540633C (en) 2003-10-09 2004-10-08 Valve assembly

Country Status (8)

Country Link
US (1) US8100382B2 (enExample)
EP (1) EP1671055B1 (enExample)
JP (1) JP4904158B2 (enExample)
KR (1) KR101176825B1 (enExample)
CN (1) CN1864020B (enExample)
AU (1) AU2004280611A1 (enExample)
CA (1) CA2540633C (enExample)
WO (1) WO2005036035A2 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9099231B2 (en) * 2007-10-23 2015-08-04 Brooks Instrument, Llc Pressure retaining sleeve
WO2010129826A2 (en) * 2009-05-07 2010-11-11 Parker-Hannifin Corporation Self-aligning axially constrained regulator valve assembly
JP5189603B2 (ja) * 2010-01-13 2013-04-24 Ｃｋｄ株式会社 流量コントローラ及び比例電磁弁
IT1401177B1 (it) * 2010-07-28 2013-07-12 Arag S R L Valvola a membrana ad azionamento elettromeccanico, particolarmente per condotti di derivazione di un fluido di impianti di irrorazione e/o di diserbo e simili
US9511151B2 (en) 2010-11-12 2016-12-06 Uti Limited Partnership Compositions and methods for the prevention and treatment of cancer
DE102011077069A1 (de) * 2011-06-07 2012-12-13 Robert Bosch Gmbh Elektromagnetisch betätigbares Ventil
US9464729B2 (en) * 2011-06-14 2016-10-11 Brooks Instrument, Llc Pressure balanced valve
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9690301B2 (en) 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
US9448564B2 (en) * 2013-02-15 2016-09-20 Reno Technologies, Inc. Gas delivery system for outputting fast square waves of process gas during semiconductor processing
US10988516B2 (en) 2012-03-26 2021-04-27 Uti Limited Partnership Methods and compositions for treating inflammation
US9603948B2 (en) 2012-10-11 2017-03-28 Uti Limited Partnership Methods and compositions for treating multiple sclerosis and related disorders
JP6081800B2 (ja) * 2013-01-07 2017-02-15 株式会社堀場エステック 流体制御弁及びマスフローコントローラ
DK3065771T3 (da) 2013-11-04 2019-06-11 Uti Lp Fremgangsmåder og sammensætninger til vedvarende immunterapi
DE102014109517A1 (de) * 2014-07-08 2016-01-14 Svm Schultz Verwaltungs-Gmbh & Co. Kg Magnetventil mit Mäanderfeder
KR101617809B1 (ko) * 2015-02-10 2016-05-03 주식회사 태성트레이딩 솔레노이드 밸브 매니폴드
KR102859521B1 (ko) 2015-05-06 2025-09-12 유티아이 리미티드 파트너쉽 지속 치료를 위한 나노입자 조성물
US10591081B2 (en) * 2016-04-01 2020-03-17 Emerson Electric Co. Solenoid coil including bobbin with moisture barrier
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US10208870B1 (en) * 2017-08-09 2019-02-19 Hydrotek Corporation Solenoid valve
CA3083748A1 (en) 2017-11-29 2019-06-06 Uti Limited Partnership Methods of treating autoimmune disease
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE792109A (fr) * 1971-12-02 1973-03-16 Rohe Scientific Corp Soupape a diaphragme a deplacement nul
DE2262247A1 (de) * 1972-12-20 1974-06-27 Teves Gmbh Alfred Elektromagnetisches ventil
JPS51117226A (en) * 1975-04-09 1976-10-15 Nissan Motor Co Ltd Air intake means in torch-ignition type internal combustion engine
US4085921A (en) * 1975-04-09 1978-04-25 Matsushita Electric Industrial Co., Ltd. Multiple-mode fluid-flow control valve arrangement
US4070004A (en) * 1976-03-01 1978-01-24 Waters Associates, Inc. Diaphragm valve
US4635683A (en) * 1985-10-03 1987-01-13 Ford Motor Company Variable force solenoid
JPS62113977A (ja) * 1985-11-13 1987-05-25 Aisin Seiki Co Ltd 電磁弁装置
US4915353A (en) * 1988-09-26 1990-04-10 Nupro Company Diaphragm valve
US5151178A (en) * 1989-02-27 1992-09-29 Hewlett-Packard Company Axially-driven valve controlled trapping assembly
US4969629A (en) * 1989-11-28 1990-11-13 The Boc Group, Inc. Diaphragm valve
US5211372A (en) * 1991-07-11 1993-05-18 Massachusetts Institute Of Technology Exhaust valve for a gas expansion system
US5158263A (en) * 1991-10-30 1992-10-27 Stec, Inc. Flow rate control valve
JPH074965A (ja) 1993-06-18 1995-01-10 Maeda Corp 地盤変位計測方法
JPH08200525A (ja) 1995-01-31 1996-08-06 Hitachi Metals Ltd 液体原料気化器用弁
US5772181A (en) * 1995-06-01 1998-06-30 Emerson Electric Co. Pivoting valve assembly
US6394138B1 (en) * 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
EP0938695B1 (en) * 1996-11-14 2003-10-08 Foxboro Eckardt GmbH Current to pressure converter
JP2000035151A (ja) * 1998-05-13 2000-02-02 Ckd Corp プロセスガス供給ユニット
JP2000081162A (ja) 1998-07-01 2000-03-21 Canon Inc 弁装置
DE29814444U1 (de) * 1998-08-12 1998-11-19 C. Rob. Hammerstein GmbH & Co. KG, 42699 Solingen Sitzgestell eines Fahrzeugsitzes mit einem Sitzträger, der zwei Seitenteile und eine rückwärtige Traverse hat
US6220569B1 (en) * 2000-01-07 2001-04-24 Clippard Instrument Laboratory, Inc. Electrically controlled proportional valve
US6450197B1 (en) * 2001-01-26 2002-09-17 Vacco Industries, Inc. Magnetically actuated valve system

Also Published As

Publication number Publication date
EP1671055A2 (en) 2006-06-21
CN1864020B (zh) 2014-03-05
JP4904158B2 (ja) 2012-03-28
WO2005036035A2 (en) 2005-04-21
HK1095620A1 (en) 2007-05-11
EP1671055A4 (en) 2012-01-04
WO2005036035A3 (en) 2005-07-21
KR20060118467A (ko) 2006-11-23
CN1864020A (zh) 2006-11-15
EP1671055B1 (en) 2013-03-20
JP2007508503A (ja) 2007-04-05
CA2540633A1 (en) 2005-04-21
KR101176825B1 (ko) 2012-08-24
US20080116406A1 (en) 2008-05-22
US8100382B2 (en) 2012-01-24
AU2004280611A1 (en) 2005-04-21

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