KR101176825B1 - 밸브 조립체 - Google Patents

밸브 조립체 Download PDF

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Publication number
KR101176825B1
KR101176825B1 KR1020067009007A KR20067009007A KR101176825B1 KR 101176825 B1 KR101176825 B1 KR 101176825B1 KR 1020067009007 A KR1020067009007 A KR 1020067009007A KR 20067009007 A KR20067009007 A KR 20067009007A KR 101176825 B1 KR101176825 B1 KR 101176825B1
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KR
South Korea
Prior art keywords
plunger
valve assembly
guide spring
valve
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020067009007A
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English (en)
Korean (ko)
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KR20060118467A (ko
Inventor
왈터 데니스 3세 로버트슨
토마스 존 맥니콜스
스티븐 알. 크라머
Original Assignee
브룩스 인스트러먼트, 엘엘씨,
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Application filed by 브룩스 인스트러먼트, 엘엘씨, filed Critical 브룩스 인스트러먼트, 엘엘씨,
Publication of KR20060118467A publication Critical patent/KR20060118467A/ko
Application granted granted Critical
Publication of KR101176825B1 publication Critical patent/KR101176825B1/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetically Actuated Valves (AREA)
  • Lift Valve (AREA)
KR1020067009007A 2003-10-09 2004-10-08 밸브 조립체 Expired - Lifetime KR101176825B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US48149503P 2003-10-09 2003-10-09
US60/481,495 2003-10-09
PCT/US2004/033180 WO2005036035A2 (en) 2003-10-09 2004-10-08 Valve assembly

Publications (2)

Publication Number Publication Date
KR20060118467A KR20060118467A (ko) 2006-11-23
KR101176825B1 true KR101176825B1 (ko) 2012-08-24

Family

ID=34434814

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067009007A Expired - Lifetime KR101176825B1 (ko) 2003-10-09 2004-10-08 밸브 조립체

Country Status (8)

Country Link
US (1) US8100382B2 (enExample)
EP (1) EP1671055B1 (enExample)
JP (1) JP4904158B2 (enExample)
KR (1) KR101176825B1 (enExample)
CN (1) CN1864020B (enExample)
AU (1) AU2004280611A1 (enExample)
CA (1) CA2540633C (enExample)
WO (1) WO2005036035A2 (enExample)

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US9639093B2 (en) * 2009-05-07 2017-05-02 Parker-Hannifin Corporation Self-aligning axially constrained regulator valve assembly
JP5189603B2 (ja) * 2010-01-13 2013-04-24 Ｃｋｄ株式会社 流量コントローラ及び比例電磁弁
IT1401177B1 (it) * 2010-07-28 2013-07-12 Arag S R L Valvola a membrana ad azionamento elettromeccanico, particolarmente per condotti di derivazione di un fluido di impianti di irrorazione e/o di diserbo e simili
US9511151B2 (en) 2010-11-12 2016-12-06 Uti Limited Partnership Compositions and methods for the prevention and treatment of cancer
DE102011077069A1 (de) * 2011-06-07 2012-12-13 Robert Bosch Gmbh Elektromagnetisch betätigbares Ventil
US9464729B2 (en) * 2011-06-14 2016-10-11 Brooks Instrument, Llc Pressure balanced valve
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9448564B2 (en) * 2013-02-15 2016-09-20 Reno Technologies, Inc. Gas delivery system for outputting fast square waves of process gas during semiconductor processing
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US10988516B2 (en) 2012-03-26 2021-04-27 Uti Limited Partnership Methods and compositions for treating inflammation
WO2014040002A2 (en) 2012-09-10 2014-03-13 Mudd Daniel T Pressure based mass flow controller
US9603948B2 (en) 2012-10-11 2017-03-28 Uti Limited Partnership Methods and compositions for treating multiple sclerosis and related disorders
JP6081800B2 (ja) * 2013-01-07 2017-02-15 株式会社堀場エステック 流体制御弁及びマスフローコントローラ
SG11201603487YA (en) 2013-11-04 2016-05-30 Uti Limited Partnership Methods and compositions for sustained immunotherapy
DE102014109517A1 (de) * 2014-07-08 2016-01-14 Svm Schultz Verwaltungs-Gmbh & Co. Kg Magnetventil mit Mäanderfeder
KR101617809B1 (ko) * 2015-02-10 2016-05-03 주식회사 태성트레이딩 솔레노이드 밸브 매니폴드
WO2016198932A2 (en) 2015-05-06 2016-12-15 Uti Limited Partnership Nanoparticle compositions for sustained therapy
US10591081B2 (en) * 2016-04-01 2020-03-17 Emerson Electric Co. Solenoid coil including bobbin with moisture barrier
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US10208870B1 (en) * 2017-08-09 2019-02-19 Hydrotek Corporation Solenoid valve
US12397038B2 (en) 2017-11-29 2025-08-26 Uti Limited Partnership Ubiquitous antigens for treatment of autoimmune or inflammatory diseases
JP7583186B2 (ja) 2021-03-03 2024-11-13 アイコール・システムズ・インク マニホールドアセンブリを備える流体流れ制御システム

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JP2000035151A (ja) * 1998-05-13 2000-02-02 Ckd Corp プロセスガス供給ユニット

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Also Published As

Publication number Publication date
CA2540633A1 (en) 2005-04-21
AU2004280611A1 (en) 2005-04-21
US8100382B2 (en) 2012-01-24
KR20060118467A (ko) 2006-11-23
US20080116406A1 (en) 2008-05-22
HK1095620A1 (en) 2007-05-11
CN1864020B (zh) 2014-03-05
WO2005036035A3 (en) 2005-07-21
CN1864020A (zh) 2006-11-15
EP1671055A2 (en) 2006-06-21
JP2007508503A (ja) 2007-04-05
JP4904158B2 (ja) 2012-03-28
EP1671055A4 (en) 2012-01-04
CA2540633C (en) 2012-12-04
WO2005036035A2 (en) 2005-04-21
EP1671055B1 (en) 2013-03-20

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