CA2522790A1 - Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve - Google Patents

Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve Download PDF

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Publication number
CA2522790A1
CA2522790A1 CA002522790A CA2522790A CA2522790A1 CA 2522790 A1 CA2522790 A1 CA 2522790A1 CA 002522790 A CA002522790 A CA 002522790A CA 2522790 A CA2522790 A CA 2522790A CA 2522790 A1 CA2522790 A1 CA 2522790A1
Authority
CA
Canada
Prior art keywords
mirror
articulated hinge
dimensional rotational
dimensional
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002522790A
Other languages
English (en)
Other versions
CA2522790C (fr
Inventor
Mohiuddin Mala
Thomas Ducellier
Alan Hnatiw
David Peale
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Operations LLC
Original Assignee
Metconnex Canada Inc.
Mohiuddin Mala
Thomas Ducellier
Alan Hnatiw
David Peale
Jds Uniphase Corporation
Lumentum Operations Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metconnex Canada Inc., Mohiuddin Mala, Thomas Ducellier, Alan Hnatiw, David Peale, Jds Uniphase Corporation, Lumentum Operations Llc filed Critical Metconnex Canada Inc.
Publication of CA2522790A1 publication Critical patent/CA2522790A1/fr
Application granted granted Critical
Publication of CA2522790C publication Critical patent/CA2522790C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CA2522790A 2003-04-24 2004-04-20 Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve Expired - Lifetime CA2522790C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US46497203P 2003-04-24 2003-04-24
US60/464,972 2003-04-24
PCT/CA2004/000598 WO2004094301A1 (fr) 2003-04-24 2004-04-20 Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve

Publications (2)

Publication Number Publication Date
CA2522790A1 true CA2522790A1 (fr) 2004-11-04
CA2522790C CA2522790C (fr) 2013-12-03

Family

ID=33310985

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2522790A Expired - Lifetime CA2522790C (fr) 2003-04-24 2004-04-20 Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve

Country Status (4)

Country Link
EP (1) EP1620350A1 (fr)
JP (1) JP2006524349A (fr)
CA (1) CA2522790C (fr)
WO (1) WO2004094301A1 (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1857880B1 (fr) 2003-04-09 2015-09-16 Nikon Corporation Procédé et appareil d'exposition et procédé de fabrication de dispositif
TW201834020A (zh) 2003-10-28 2018-09-16 日商尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TWI519819B (zh) 2003-11-20 2016-02-01 尼康股份有限公司 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法
TWI511182B (zh) 2004-02-06 2015-12-01 尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法以及元件製造方法
US7911672B2 (en) * 2006-12-26 2011-03-22 Zhou Tiansheng Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
WO2008129988A1 (fr) * 2007-04-19 2008-10-30 Nippon Telegraph And Telephone Corporation Élément micromiroir, et réseau de micromiroirs
US8451427B2 (en) 2007-09-14 2013-05-28 Nikon Corporation Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
JP5418230B2 (ja) 2007-11-06 2014-02-19 株式会社ニコン 露光方法、及び露光装置
KR20180072841A (ko) 2007-11-06 2018-06-29 가부시키가이샤 니콘 조명 광학계, 노광 장치 및 노광 방법
JP5326259B2 (ja) 2007-11-08 2013-10-30 株式会社ニコン 照明光学装置、露光装置、およびデバイス製造方法
WO2009078223A1 (fr) 2007-12-17 2009-06-25 Nikon Corporation Unité de modulation spatiale de lumière, système d'éclairage optique, dispositif d'alignement et procédé de fabrication de dispositif
TW200929333A (en) 2007-12-17 2009-07-01 Nikon Corp Illumination optical system, exposure apparatus, and device manufacturing method
KR20110000619A (ko) 2008-04-11 2011-01-04 가부시키가이샤 니콘 공간 광 변조 유닛, 조명 광학계, 노광 장치, 및 디바이스 제조 방법
CA2722783A1 (fr) 2008-04-29 2009-11-05 Micralyne Inc. Dispositif de microsysteme electromecanique (mems) presentant une rotation independante dans deux axes de rotation
WO2009145048A1 (fr) 2008-05-28 2009-12-03 株式会社ニコン Dispositif et procédé d'inspection pour modulateur spatial de lumière, système optique d'éclairage, procédé de réglage de ce système optique d'éclairage, dispositif d'exposition et procédé de fabrication de dispositif
US8264666B2 (en) 2009-03-13 2012-09-11 Nikon Corporation Exposure apparatus, exposure method, and method of manufacturing device
US20110037962A1 (en) 2009-08-17 2011-02-17 Nikon Corporation Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method
US20110205519A1 (en) 2010-02-25 2011-08-25 Nikon Corporation Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method
US9389519B2 (en) 2010-02-25 2016-07-12 Nikon Corporation Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method
JP2012004465A (ja) 2010-06-19 2012-01-05 Nikon Corp 照明光学系、露光装置、およびデバイス製造方法
JP5996774B2 (ja) * 2013-03-11 2016-09-21 インテル コーポレイション Ｍｅｍｓスキャニングミラーの視野の提供方法及び装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6075239A (en) * 1997-09-10 2000-06-13 Lucent Technologies, Inc. Article comprising a light-actuated micromechanical photonic switch
US6431714B1 (en) * 2000-10-10 2002-08-13 Nippon Telegraph And Telephone Corporation Micro-mirror apparatus and production method therefor

Also Published As

Publication number Publication date
JP2006524349A (ja) 2006-10-26
CA2522790C (fr) 2013-12-03
EP1620350A1 (fr) 2006-02-01
WO2004094301A1 (fr) 2004-11-04

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