CA2366527C - Dispositif a systeme microelectromecaniques a actionneur electrostatique - Google Patents

Dispositif a systeme microelectromecaniques a actionneur electrostatique Download PDF

Info

Publication number
CA2366527C
CA2366527C CA002366527A CA2366527A CA2366527C CA 2366527 C CA2366527 C CA 2366527C CA 002366527 A CA002366527 A CA 002366527A CA 2366527 A CA2366527 A CA 2366527A CA 2366527 C CA2366527 C CA 2366527C
Authority
CA
Canada
Prior art keywords
electrode
component
optical element
array
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002366527A
Other languages
English (en)
Other versions
CA2366527A1 (fr
Inventor
Vladimir Anatolyevich Aksyuk
Cristian A. Bolle
Flavio Pardo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agere Systems LLC
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Agere Systems Guardian Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc, Agere Systems Guardian Corp filed Critical Lucent Technologies Inc
Publication of CA2366527A1 publication Critical patent/CA2366527A1/fr
Application granted granted Critical
Publication of CA2366527C publication Critical patent/CA2366527C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
CA002366527A 2001-01-05 2001-12-27 Dispositif a systeme microelectromecaniques a actionneur electrostatique Expired - Fee Related CA2366527C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/755,727 2001-01-05
US09/755,727 US6600851B2 (en) 2001-01-05 2001-01-05 Electrostatically actuated micro-electro-mechanical system (MEMS) device

Publications (2)

Publication Number Publication Date
CA2366527A1 CA2366527A1 (fr) 2002-07-05
CA2366527C true CA2366527C (fr) 2005-06-28

Family

ID=25040385

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002366527A Expired - Fee Related CA2366527C (fr) 2001-01-05 2001-12-27 Dispositif a systeme microelectromecaniques a actionneur electrostatique

Country Status (6)

Country Link
US (1) US6600851B2 (fr)
EP (1) EP1223453B1 (fr)
JP (1) JP4402861B2 (fr)
CA (1) CA2366527C (fr)
DE (1) DE60124498T2 (fr)
TW (1) TW544437B (fr)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6785038B2 (en) * 2001-01-17 2004-08-31 Optical Coating Laboratory, Inc. Optical cross-connect with magnetic micro-electro-mechanical actuator cells
US6625346B2 (en) 2001-03-19 2003-09-23 Capella Photonics, Inc. Reconfigurable optical add-drop multiplexers with servo control and dynamic spectral power management capabilities
US6760511B2 (en) 2001-03-19 2004-07-06 Capella Photonics, Inc. Reconfigurable optical add-drop multiplexers employing polarization diversity
US20070047113A1 (en) * 2001-06-02 2007-03-01 Capella Photonics, Inc. High fill-factor bulk silicon mirrors with reduced effect of mirror edge diffraction
US7209274B2 (en) * 2001-06-02 2007-04-24 Capella Photonics, Inc. High fill-factor bulk silicon mirrors
US6695457B2 (en) * 2001-06-02 2004-02-24 Capella Photonics, Inc. Bulk silicon mirrors with hinges underneath
JP3722021B2 (ja) * 2001-07-18 2005-11-30 株式会社デンソー 光スイッチ
US7593029B2 (en) * 2001-08-20 2009-09-22 Ricoh Company, Ltd. Optical scanning device and image forming apparatus using the same
JP3908503B2 (ja) * 2001-10-30 2007-04-25 富士通株式会社 光スイッチ
US6912336B2 (en) * 2002-03-15 2005-06-28 Nippon Telegraph And Telephone Corporation Optical switch device
US6891240B2 (en) * 2002-04-30 2005-05-10 Xerox Corporation Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
US7006720B2 (en) * 2002-04-30 2006-02-28 Xerox Corporation Optical switching system
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device
JP4227531B2 (ja) * 2004-01-27 2009-02-18 Ｈｏｙａ株式会社 ヒンジ構造
JP4396299B2 (ja) * 2004-02-09 2010-01-13 日立金属株式会社 ミラーシステム及び光スイッチ
US7705514B2 (en) * 2004-10-14 2010-04-27 Siyuan He Bi-directional actuator utilizing both attractive and repulsive electrostatic forces
US20060203195A1 (en) * 2005-03-10 2006-09-14 Squire Bret C Integrated ocular examination device
US7468572B2 (en) * 2005-03-28 2008-12-23 Maurice Thomas Versatile digitally controlled micro-mechanical actuator
US7142352B2 (en) * 2005-03-30 2006-11-28 Lucent Technologies Inc. MEMS mirror with amplified motion
FR2887537B1 (fr) * 2005-06-23 2007-09-07 Commissariat Energie Atomique Actionneur electrostatique, dispositif comportant de tels actionneurs, microsysteme comportant un tel dispositif et procede de realisation d'un tel actionneur
US7482664B2 (en) * 2006-01-09 2009-01-27 Microsoft Corporation Out-of-plane electrostatic actuator
US7443568B2 (en) * 2006-05-04 2008-10-28 Miradia Inc. Method and system for resonant operation of a reflective spatial light modulator
US7505195B2 (en) * 2006-05-04 2009-03-17 Miradia Inc. Reflective spatial light modulator with high stiffness torsion spring hinge
DE102007034888B3 (de) * 2007-07-16 2009-01-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrosystem und Verfahren zum Herstellen eines Mikrosystems
JP4816762B2 (ja) * 2009-05-20 2011-11-16 オムロン株式会社 バネの構造および当該バネを用いたアクチュエータ
EP3186189A4 (fr) * 2014-08-04 2018-05-09 Ba-Tis, Faez Micro-actionneur électrostatique à tubes et pistons mems à 3 degrés de liberté
US20180079640A1 (en) * 2016-09-22 2018-03-22 Innovative Micro Technology Mems device with offset electrode
US11163152B2 (en) 2017-08-02 2021-11-02 United States Of America As Represented By The Secretary Of The Air Force MEMS electrothermal actuator for large angle beamsteering
CN115980994A (zh) * 2022-12-30 2023-04-18 苏州璇光半导体科技有限公司 一种电磁驱动式的大直径mems微镜

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US5966230A (en) * 1990-05-29 1999-10-12 Symbol Technologies, Inc. Integrated scanner on a common substrate
US5142405A (en) * 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5805119A (en) * 1992-10-13 1998-09-08 General Motors Corporation Vehicle projected display using deformable mirror device
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5552924A (en) * 1994-11-14 1996-09-03 Texas Instruments Incorporated Micromechanical device having an improved beam
US6154302A (en) * 1997-11-15 2000-11-28 Canon Kabushiki Kaisha Light deflection device and array thereof
US6201631B1 (en) * 1999-10-08 2001-03-13 Lucent Technologies Inc. Process for fabricating an optical mirror array
US6657759B2 (en) * 2001-07-03 2003-12-02 Pts Corporation Bistable micromirror with contactless stops

Also Published As

Publication number Publication date
EP1223453A2 (fr) 2002-07-17
JP4402861B2 (ja) 2010-01-20
CA2366527A1 (fr) 2002-07-05
DE60124498T2 (de) 2007-09-20
EP1223453B1 (fr) 2006-11-15
TW544437B (en) 2003-08-01
EP1223453A3 (fr) 2004-01-21
US20030103717A1 (en) 2003-06-05
US6600851B2 (en) 2003-07-29
JP2002254399A (ja) 2002-09-10
DE60124498D1 (de) 2006-12-28

Similar Documents

Publication Publication Date Title
CA2366527C (fr) Dispositif a systeme microelectromecaniques a actionneur electrostatique
US7095546B2 (en) Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
US6657759B2 (en) Bistable micromirror with contactless stops
CA2522790C (fr) Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve
US6701037B2 (en) MEMS-based noncontacting free-space optical switch
US6175443B1 (en) Article comprising a deformable segmented mirror
US6760144B2 (en) Articulated MEMS electrostatic rotary actuator
EP1368690B1 (fr) Miroir microelectromecanique et reseau de miroirs microelectromecaniques
EP1130442B1 (fr) Commutateurs optiques à micromiroirs à deux axes
KR100944203B1 (ko) 특히 광학적 적용을 위한 스위치 장치
EP3396426B1 (fr) Amortisseurs verticaux interdigités pour actionneurs mems
US6300619B1 (en) Micro-electro-mechanical optical device
JP2002254399A5 (fr)
CA2370016A1 (fr) Appareil microelectromecanique avec corps basculables comprenant des sections d'enclenchement d'arret de bascule variables et les methodes de fonctionnement et de fabrication connexes
JPWO2005102909A1 (ja) アクチュエータ
EP1322989A1 (fr) Dispositif microelectromecanique
GB2365988A (en) Micro Electro-Mechanical Device
US7535618B2 (en) Discretely controlled micromirror device having multiple motions
Zairi et al. Design of buried hinge based 3D torsional micro mirrors
CN112368232A (zh) 包括可移动结构元件的mems和mems阵列

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20191227