CA2522790C - Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve - Google Patents
Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve Download PDFInfo
- Publication number
- CA2522790C CA2522790C CA2522790A CA2522790A CA2522790C CA 2522790 C CA2522790 C CA 2522790C CA 2522790 A CA2522790 A CA 2522790A CA 2522790 A CA2522790 A CA 2522790A CA 2522790 C CA2522790 C CA 2522790C
- Authority
- CA
- Canada
- Prior art keywords
- mirror
- articulated hinge
- dimensional rotational
- dimensional
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003491 array Methods 0.000 title description 9
- 239000000725 suspension Substances 0.000 title description 5
- 230000033001 locomotion Effects 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 238000010276 construction Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 208000005647 Mumps Diseases 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000012769 bulk production Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 208000010805 mumps infectious disease Diseases 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
L'invention concerne un dispositif miroir à système micro-électro-mécanique (MEMS) comprenant un miroir ayant, à une première extrémité, une articulation rotative bidimensionnelle et, à la deuxième extrémité opposée à la première extrémité, une articulation rotative unidimensionnelle; un élément en porte-à-faux mobile relié au miroir par l'articulation rotative unidimensionnelle; une structure support connectée au miroir par l'articulation rotative bidimensionnelle et connectée à l'élément en porte-à-faux mobile. Le mouvement de cet élément en porte-à-faux mobile engendre la rotation du miroir dans un premier axe de rotation, et le miroir tourne également autour d'un deuxième axe de rotation perpendiculaire au premier axe de rotation.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46497203P | 2003-04-24 | 2003-04-24 | |
| US60/464,972 | 2003-04-24 | ||
| PCT/CA2004/000598 WO2004094301A1 (fr) | 2003-04-24 | 2004-04-20 | Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2522790A1 CA2522790A1 (fr) | 2004-11-04 |
| CA2522790C true CA2522790C (fr) | 2013-12-03 |
Family
ID=33310985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2522790A Expired - Lifetime CA2522790C (fr) | 2003-04-24 | 2004-04-20 | Miroir bidimensionnel a systeme micro-electro-mecanique ayant des structures de suspension articulees destinees a des reseaux a facteur de remplissage eleve |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1620350A1 (fr) |
| JP (1) | JP2006524349A (fr) |
| CA (1) | CA2522790C (fr) |
| WO (1) | WO2004094301A1 (fr) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2157480B1 (fr) | 2003-04-09 | 2015-05-27 | Nikon Corporation | Procédé et appareil d'exposition et procédé de fabrication d'un dispositif |
| TWI474132B (zh) | 2003-10-28 | 2015-02-21 | 尼康股份有限公司 | 照明光學裝置、投影曝光裝置、曝光方法以及元件製造方法 |
| TWI519819B (zh) | 2003-11-20 | 2016-02-01 | 尼康股份有限公司 | 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法 |
| TWI505329B (zh) | 2004-02-06 | 2015-10-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
| US7911672B2 (en) * | 2006-12-26 | 2011-03-22 | Zhou Tiansheng | Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore |
| CA2764402C (fr) | 2007-04-19 | 2014-02-11 | Nippon Telegraph And Telephone Corporation | Element micromiroir, et reseau de micromiroirs |
| US8451427B2 (en) | 2007-09-14 | 2013-05-28 | Nikon Corporation | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method |
| JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| JP5418230B2 (ja) | 2007-11-06 | 2014-02-19 | 株式会社ニコン | 露光方法、及び露光装置 |
| JP5582287B2 (ja) | 2007-11-06 | 2014-09-03 | 株式会社ニコン | 照明光学装置及び露光装置 |
| JP5326259B2 (ja) | 2007-11-08 | 2013-10-30 | 株式会社ニコン | 照明光学装置、露光装置、およびデバイス製造方法 |
| TW200929333A (en) | 2007-12-17 | 2009-07-01 | Nikon Corp | Illumination optical system, exposure apparatus, and device manufacturing method |
| WO2009078223A1 (fr) | 2007-12-17 | 2009-06-25 | Nikon Corporation | Unité de modulation spatiale de lumière, système d'éclairage optique, dispositif d'alignement et procédé de fabrication de dispositif |
| KR20110000619A (ko) | 2008-04-11 | 2011-01-04 | 가부시키가이샤 니콘 | 공간 광 변조 유닛, 조명 광학계, 노광 장치, 및 디바이스 제조 방법 |
| US8208192B2 (en) * | 2008-04-29 | 2012-06-26 | Micralyne Inc. | MEMS device with independent rotation in two axes of rotation |
| WO2009145048A1 (fr) | 2008-05-28 | 2009-12-03 | 株式会社ニコン | Dispositif et procédé d'inspection pour modulateur spatial de lumière, système optique d'éclairage, procédé de réglage de ce système optique d'éclairage, dispositif d'exposition et procédé de fabrication de dispositif |
| US8264666B2 (en) | 2009-03-13 | 2012-09-11 | Nikon Corporation | Exposure apparatus, exposure method, and method of manufacturing device |
| US20110037962A1 (en) | 2009-08-17 | 2011-02-17 | Nikon Corporation | Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method |
| US20110205519A1 (en) | 2010-02-25 | 2011-08-25 | Nikon Corporation | Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method |
| US9389519B2 (en) | 2010-02-25 | 2016-07-12 | Nikon Corporation | Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method |
| JP2012004465A (ja) | 2010-06-19 | 2012-01-05 | Nikon Corp | 照明光学系、露光装置、およびデバイス製造方法 |
| KR101701219B1 (ko) * | 2013-03-11 | 2017-02-01 | 인텔 코포레이션 | Ｍｅｍｓ 스캐닝 미러 시야 제공 방법 및 장치 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
| US6075239A (en) * | 1997-09-10 | 2000-06-13 | Lucent Technologies, Inc. | Article comprising a light-actuated micromechanical photonic switch |
| US6431714B1 (en) * | 2000-10-10 | 2002-08-13 | Nippon Telegraph And Telephone Corporation | Micro-mirror apparatus and production method therefor |
-
2004
- 2004-04-20 EP EP04728310A patent/EP1620350A1/fr not_active Withdrawn
- 2004-04-20 CA CA2522790A patent/CA2522790C/fr not_active Expired - Lifetime
- 2004-04-20 WO PCT/CA2004/000598 patent/WO2004094301A1/fr active Application Filing
- 2004-04-20 JP JP2006504118A patent/JP2006524349A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004094301A1 (fr) | 2004-11-04 |
| CA2522790A1 (fr) | 2004-11-04 |
| JP2006524349A (ja) | 2006-10-26 |
| EP1620350A1 (fr) | 2006-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |