CA2216296C - Methode de formation d'images pour la fabrication de microappareils - Google Patents

Methode de formation d'images pour la fabrication de microappareils Download PDF

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Publication number
CA2216296C
CA2216296C CA002216296A CA2216296A CA2216296C CA 2216296 C CA2216296 C CA 2216296C CA 002216296 A CA002216296 A CA 002216296A CA 2216296 A CA2216296 A CA 2216296A CA 2216296 C CA2216296 C CA 2216296C
Authority
CA
Canada
Prior art keywords
light source
light
pattern
aperture
stop
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA002216296A
Other languages
English (en)
Other versions
CA2216296A1 (fr
Inventor
Akiyoshi Suzuki
Miyoko Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3028631A external-priority patent/JP2633091B2/ja
Priority claimed from JP3128446A external-priority patent/JP2890892B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority claimed from CA002061499A external-priority patent/CA2061499C/fr
Publication of CA2216296A1 publication Critical patent/CA2216296A1/fr
Application granted granted Critical
Publication of CA2216296C publication Critical patent/CA2216296C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CA002216296A 1991-02-22 1992-02-19 Methode de formation d'images pour la fabrication de microappareils Expired - Lifetime CA2216296C (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP3028631A JP2633091B2 (ja) 1991-02-22 1991-02-22 像投影方法、回路製造方法及び投影露光装置
JP028631/1991 1991-02-22
JP3128446A JP2890892B2 (ja) 1991-04-30 1991-04-30 露光装置及びそれを用いた素子製造方法
JP128446/1991 1991-04-30
CA002061499A CA2061499C (fr) 1991-02-22 1992-02-19 Methode d'imagerie pour la fabrication de microdispositifs

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA002061499A Division CA2061499C (fr) 1991-02-22 1992-02-19 Methode d'imagerie pour la fabrication de microdispositifs

Publications (2)

Publication Number Publication Date
CA2216296A1 CA2216296A1 (fr) 1992-08-23
CA2216296C true CA2216296C (fr) 2003-04-15

Family

ID=27169025

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002216296A Expired - Lifetime CA2216296C (fr) 1991-02-22 1992-02-19 Methode de formation d'images pour la fabrication de microappareils

Country Status (1)

Country Link
CA (1) CA2216296C (fr)

Also Published As

Publication number Publication date
CA2216296A1 (fr) 1992-08-23

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