CA2163033C - Dispositif a onde acoustique en volume - Google Patents
Dispositif a onde acoustique en volume Download PDFInfo
- Publication number
- CA2163033C CA2163033C CA002163033A CA2163033A CA2163033C CA 2163033 C CA2163033 C CA 2163033C CA 002163033 A CA002163033 A CA 002163033A CA 2163033 A CA2163033 A CA 2163033A CA 2163033 C CA2163033 C CA 2163033C
- Authority
- CA
- Canada
- Prior art keywords
- acoustic wave
- bulk acoustic
- wave device
- thin film
- piezoelectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 claims abstract 46
- 239000000919 ceramic Substances 0.000 claims abstract 44
- 239000004065 semiconductor Substances 0.000 claims abstract 39
- 239000004020 conductor Substances 0.000 claims abstract 33
- 239000000758 substrate Substances 0.000 claims abstract 16
- 239000000126 substance Substances 0.000 claims abstract 6
- 239000010408 film Substances 0.000 claims 45
- 230000010287 polarization Effects 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 7
- 230000001939 inductive effect Effects 0.000 claims 4
- 230000001681 protective effect Effects 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 230000000644 propagated effect Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 abstract 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6289804A JPH08148968A (ja) | 1994-11-24 | 1994-11-24 | 薄膜圧電素子 |
| JP06-289804 | 1994-11-24 | ||
| JP28062895A JP3371050B2 (ja) | 1995-10-27 | 1995-10-27 | 薄膜圧電素子 |
| JP07-280628 | 1995-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2163033A1 CA2163033A1 (fr) | 1996-05-25 |
| CA2163033C true CA2163033C (fr) | 2000-01-25 |
Family
ID=26553860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002163033A Expired - Fee Related CA2163033C (fr) | 1994-11-24 | 1995-11-17 | Dispositif a onde acoustique en volume |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2163033C (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022134196A1 (fr) * | 2020-12-25 | 2022-06-30 | 杭州左蓝微电子技术有限公司 | Résonateur à ondes acoustiques de volume à film mince, procédé de fabrication associé et filtre |
-
1995
- 1995-11-17 CA CA002163033A patent/CA2163033C/fr not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022134196A1 (fr) * | 2020-12-25 | 2022-06-30 | 杭州左蓝微电子技术有限公司 | Résonateur à ondes acoustiques de volume à film mince, procédé de fabrication associé et filtre |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2163033A1 (fr) | 1996-05-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |