CA2051556A1 - Senseur de gaz - Google Patents

Senseur de gaz

Info

Publication number
CA2051556A1
CA2051556A1 CA2051556A CA2051556A CA2051556A1 CA 2051556 A1 CA2051556 A1 CA 2051556A1 CA 2051556 A CA2051556 A CA 2051556A CA 2051556 A CA2051556 A CA 2051556A CA 2051556 A1 CA2051556 A1 CA 2051556A1
Authority
CA
Canada
Prior art keywords
gas sensor
metal electrode
precious metal
semiconductor layer
interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2051556A
Other languages
English (en)
Other versions
CA2051556C (fr
Inventor
Kiyoshi Fukui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Cosmos Electric Co Ltd
Original Assignee
New Cosmos Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Cosmos Electric Co Ltd filed Critical New Cosmos Electric Co Ltd
Publication of CA2051556A1 publication Critical patent/CA2051556A1/fr
Application granted granted Critical
Publication of CA2051556C publication Critical patent/CA2051556C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CA002051556A 1990-11-30 1991-09-17 Senseur de gaz Expired - Lifetime CA2051556C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2340843A JP2702279B2 (ja) 1990-11-30 1990-11-30 ガス検知素子
JP2-340843 1990-11-30

Publications (2)

Publication Number Publication Date
CA2051556A1 true CA2051556A1 (fr) 1992-05-31
CA2051556C CA2051556C (fr) 1996-11-12

Family

ID=18340817

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002051556A Expired - Lifetime CA2051556C (fr) 1990-11-30 1991-09-17 Senseur de gaz

Country Status (5)

Country Link
US (1) US5457333A (fr)
EP (1) EP0488503B1 (fr)
JP (1) JP2702279B2 (fr)
CA (1) CA2051556C (fr)
DE (1) DE69124207T2 (fr)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5625209A (en) * 1992-08-26 1997-04-29 Texas Instruments Incorporated Silicon based sensor apparatus
GB9313320D0 (en) * 1993-06-28 1993-08-11 Univ Loughborough Sensing devices
GB2303924A (en) * 1994-04-29 1997-03-05 Capteur Sensors & Analysers Resistive gas sensing
GB9408542D0 (en) * 1994-04-29 1994-06-22 Capteur Sensors & Analysers Gas sensing resistors
DE4437692A1 (de) * 1994-10-21 1996-04-25 Fraunhofer Ges Forschung Kohlendioxid-Sensor
US5594162A (en) * 1995-06-06 1997-01-14 Dolan; James P. Valve stem gas leak detector
US5777207A (en) * 1995-11-27 1998-07-07 Lg Electronics Inc. Gas sensor and method for fabricating the same
US5955776A (en) * 1996-12-04 1999-09-21 Ball Semiconductor, Inc. Spherical shaped semiconductor integrated circuit
JPH11142356A (ja) * 1997-11-07 1999-05-28 Fis Kk 半導体ガスセンサ
JP2000283943A (ja) * 1999-03-30 2000-10-13 Matsushita Seiko Co Ltd ガス検出装置
JP3518800B2 (ja) * 1999-12-16 2004-04-12 フィガロ技研株式会社 ガスセンサ及びガス検出装置
US6197610B1 (en) * 2000-01-14 2001-03-06 Ball Semiconductor, Inc. Method of making small gaps for small electrical/mechanical devices
US7096865B1 (en) 2000-10-18 2006-08-29 Oxygen Lifeline, Llc Personal gas supply delivery system
JP2002139469A (ja) * 2000-11-02 2002-05-17 Yazaki Corp ガス検知素子及びそれを有するガス検知装置
US6498643B1 (en) 2000-11-13 2002-12-24 Ball Semiconductor, Inc. Spherical surface inspection system
ITTO20030318A1 (it) * 2003-04-24 2004-10-25 Sacmi Dispositivo sensore di gas a film sottile semiconduttore.
CN100468029C (zh) * 2005-03-03 2009-03-11 清华大学 标准漏孔及其制作方法
US7694547B2 (en) * 2007-03-01 2010-04-13 The Ohio State University Research Foundation Robust high temperature composite and CO sensor made from such composite
JP4580405B2 (ja) * 2007-03-30 2010-11-10 エフアイエス株式会社 水素ガスセンサ
DE102008042859A1 (de) * 2008-10-15 2010-04-22 Robert Bosch Gmbh Elektronisches Bauelement
US8501269B2 (en) * 2008-10-16 2013-08-06 Apollo, Inc. Sensitive materials for gas sensing and method of making same
DE102009007940B4 (de) * 2009-02-06 2010-11-18 Heraeus Sensor Technology Gmbh Nichtleitfähiges Zirkonoxid
JP6224311B2 (ja) * 2012-11-06 2017-11-01 Ｎｉｓｓｈａ株式会社 半導体ガスセンサ素子
US9377426B2 (en) * 2012-11-16 2016-06-28 The Regents Of The University Of California Selective nanoscale asymmetric gas sensors
US9691910B2 (en) * 2013-08-19 2017-06-27 Idemitsu Kosan Co., Ltd. Oxide semiconductor substrate and schottky barrier diode
JP6472168B2 (ja) * 2014-03-25 2019-02-20 新コスモス電機株式会社 接触燃焼式ガスセンサ
CN105738416B (zh) * 2016-02-25 2018-11-09 华南师范大学 一种表面活性剂诱导电沉积加工ZnO气体传感器的方法
US20220082541A1 (en) * 2019-01-11 2022-03-17 Eth Zurich Device and Method for Detecting an Analyte
CN112142093B (zh) * 2020-09-17 2023-02-28 上海大学 一种负载Pd的棱状氧化锌及其制备方法和应用
CN114354724B (zh) * 2022-01-11 2022-11-22 山西大学 一种金属氧化物半导体气体传感器及其制备方法和应用

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA915458A (en) * 1970-07-06 1972-11-28 British Columbia Research Council Method and apparatus for identifying gases
US4030340A (en) * 1976-07-22 1977-06-21 General Monitors, Inc. Hydrogen gas detector
GB1601119A (en) * 1977-11-30 1981-10-28 Nat Res Dev Gas sensors
US4169369A (en) * 1978-07-24 1979-10-02 General Motors Corporation Method and thin film semiconductor sensor for detecting NOx
JPS56112638A (en) * 1980-02-13 1981-09-05 Nippon Denso Co Ltd Gas component detecting element
US4358951A (en) * 1981-02-17 1982-11-16 General Motors Corporation Zinc oxide thin film sensor having improved reducing gas sensitivity
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
JPS59120945A (ja) * 1982-12-28 1984-07-12 Shinkosumosu Denki Kk 水素選択性センサ
EP0197629B1 (fr) * 1985-02-12 1990-05-23 New Cosmos Electric Co., Ltd. Détecteur de gaz sélectif à alcool
JPS6246247A (ja) * 1985-08-23 1987-02-28 Matsushita Electric Works Ltd ガスセンサ
JPS6247542A (ja) * 1985-08-27 1987-03-02 Matsushita Electric Works Ltd ガスセンサ
JPH0623709B2 (ja) * 1986-02-28 1994-03-30 朝安 中野 ガスセンサ
JPS63109359A (ja) * 1986-10-28 1988-05-14 Figaro Eng Inc センサ
JPS63109357A (ja) * 1986-10-28 1988-05-14 Figaro Eng Inc 燃焼安全装置
JPH02193053A (ja) * 1988-07-14 1990-07-30 Figaro Eng Inc 排ガスセンサ及びその製造方法
US5047214A (en) * 1989-03-08 1991-09-10 New Cosmos Electric Co., Ltd. Smell sensing element and smell sensing device

Also Published As

Publication number Publication date
CA2051556C (fr) 1996-11-12
US5457333A (en) 1995-10-10
JP2702279B2 (ja) 1998-01-21
JPH04208847A (ja) 1992-07-30
EP0488503B1 (fr) 1997-01-15
EP0488503A3 (en) 1993-04-28
DE69124207T2 (de) 1997-08-21
EP0488503A2 (fr) 1992-06-03
DE69124207D1 (de) 1997-02-27

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Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry