CA2010245A1 - Appareil generateur de plasma, a ondes a hautes frequences, de type a cavite coaxiale - Google Patents
Appareil generateur de plasma, a ondes a hautes frequences, de type a cavite coaxialeInfo
- Publication number
- CA2010245A1 CA2010245A1 CA2010245A CA2010245A CA2010245A1 CA 2010245 A1 CA2010245 A1 CA 2010245A1 CA 2010245 A CA2010245 A CA 2010245A CA 2010245 A CA2010245 A CA 2010245A CA 2010245 A1 CA2010245 A1 CA 2010245A1
- Authority
- CA
- Canada
- Prior art keywords
- radiofrequency wave
- generating apparatus
- plasma generating
- cavity
- cavity type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Transmitters (AREA)
- Discharge Heating (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
- Stringed Musical Instruments (AREA)
- Ignition Installations For Internal Combustion Engines (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/331,754 US4906900A (en) | 1989-04-03 | 1989-04-03 | Coaxial cavity type, radiofrequency wave, plasma generating apparatus |
US331,754 | 1989-04-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2010245A1 true CA2010245A1 (fr) | 1990-10-03 |
CA2010245C CA2010245C (fr) | 1993-05-11 |
Family
ID=23295234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002010245A Expired - Fee Related CA2010245C (fr) | 1989-04-03 | 1990-02-16 | Appareil generateur de plasma, a ondes a hautes frequences, de type a cavite coaxiale |
Country Status (9)
Country | Link |
---|---|
US (1) | US4906900A (fr) |
EP (1) | EP0391156B1 (fr) |
JP (1) | JPH02295052A (fr) |
AT (1) | ATE123915T1 (fr) |
CA (1) | CA2010245C (fr) |
DE (2) | DE69020031T2 (fr) |
DK (1) | DK0391156T3 (fr) |
ES (1) | ES2018464T3 (fr) |
GR (2) | GR910300023T1 (fr) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5227695A (en) * | 1989-06-05 | 1993-07-13 | Centre National De La Recherche Scientifique | Device for coupling microwave energy with an exciter and for distributing it therealong for the purpose of producing a plasma |
DE69026337T2 (de) * | 1989-10-31 | 1996-08-14 | Nippon Electric Co | Ionenantrieb für Weltraumflüge |
US5274306A (en) * | 1990-08-31 | 1993-12-28 | Kaufman & Robinson, Inc. | Capacitively coupled radiofrequency plasma source |
DE4037091C2 (de) * | 1990-11-22 | 1996-06-20 | Leybold Ag | Vorrichtung für die Erzeugung eines homogenen Mikrowellenfeldes |
US7235819B2 (en) * | 1991-03-18 | 2007-06-26 | The Trustees Of Boston University | Semiconductor device having group III nitride buffer layer and growth layers |
US5311103A (en) * | 1992-06-01 | 1994-05-10 | Board Of Trustees Operating Michigan State University | Apparatus for the coating of material on a substrate using a microwave or UHF plasma |
US5292370A (en) * | 1992-08-14 | 1994-03-08 | Martin Marietta Energy Systems, Inc. | Coupled microwave ECR and radio-frequency plasma source for plasma processing |
FR2702119B1 (fr) * | 1993-02-25 | 1995-07-13 | Metal Process | Dispositif d'excitation d'un plasma à la résonance cyclotronique électronique par l'intermédiaire d'un applicateur filaire d'un champ micro-onde et d'un champ magnétique statique. |
FR2711035B1 (fr) * | 1993-10-04 | 1995-12-29 | Plasmion | Dispositif et procédé pour former un plasma par application de micro-ondes. |
US5470423A (en) * | 1994-01-25 | 1995-11-28 | Board Of Trustees Operating Michigan State University | Microwave pultrusion apparatus and method of use |
FR2722213B1 (fr) * | 1994-07-05 | 1996-09-20 | Plasmion | Dispositif pour creer un faisceau d'ions d'energie ajustable notamment pour le traitement au defile et sous vide de surfaces de grandes dimensions |
SG50732A1 (en) * | 1995-05-19 | 1998-07-20 | Hitachi Ltd | Method and apparatus for plasma processing apparatus |
US5736818A (en) * | 1996-03-15 | 1998-04-07 | Board Of Trustees Operating Michigan State University | Resonant radiofrequency wave plasma generating apparatus with improved stage |
DE19756774B4 (de) * | 1997-12-19 | 2009-12-31 | Tec Tra Gmbh | Mikrowellenplasmaquelle |
DE19801366B4 (de) * | 1998-01-16 | 2008-07-03 | Applied Materials Gmbh & Co. Kg | Vorrichtung zur Erzeugung von Plasma |
US20030152700A1 (en) * | 2002-02-11 | 2003-08-14 | Board Of Trustees Operating Michigan State University | Process for synthesizing uniform nanocrystalline films |
US7511246B2 (en) | 2002-12-12 | 2009-03-31 | Perkinelmer Las Inc. | Induction device for generating a plasma |
CN101495262B (zh) | 2005-03-11 | 2014-11-12 | 魄金莱默有限公司 | 等离子体及其使用方法 |
US8622735B2 (en) * | 2005-06-17 | 2014-01-07 | Perkinelmer Health Sciences, Inc. | Boost devices and methods of using them |
US7742167B2 (en) * | 2005-06-17 | 2010-06-22 | Perkinelmer Health Sciences, Inc. | Optical emission device with boost device |
US8593064B2 (en) * | 2007-02-16 | 2013-11-26 | Ad Astra Rocket Company | Plasma source improved with an RF coupling system |
EP1976346A1 (fr) * | 2007-03-30 | 2008-10-01 | Ecole Polytechnique | Appareil de génération de plasma |
EP2904881B1 (fr) | 2012-07-13 | 2020-11-11 | PerkinElmer Health Sciences, Inc. | Chalumeaux avec des matériaux réfractaires et non réfractaires couplés entre eux |
WO2017085746A1 (fr) * | 2015-11-18 | 2017-05-26 | Jsw Steel Limited | Propulseur électrothermique hyperfréquence conçu pour la propulsion électrothermique dans l'espace |
US10923324B2 (en) | 2017-07-10 | 2021-02-16 | Verity Instruments, Inc. | Microwave plasma source |
US10679832B2 (en) * | 2017-07-10 | 2020-06-09 | Verity Instruments, Inc. | Microwave plasma source |
US10492287B2 (en) * | 2017-09-06 | 2019-11-26 | Omega-P R&D, Inc. | Apparatus and method for isotope production based on a charged particle accelerator |
TWI721373B (zh) * | 2018-06-28 | 2021-03-11 | 美商梅瑞堤儀器公司 | 電漿源,用於一電漿之激發之激發系統及光學監控系統 |
ES2696227B2 (es) * | 2018-07-10 | 2019-06-12 | Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat | Fuente de iones interna para ciclotrones de baja erosion |
US11701734B2 (en) * | 2019-07-25 | 2023-07-18 | The Esab Group, Inc. | Apparatus and methods associated with operating a plasma torch |
CN114899067A (zh) * | 2022-03-24 | 2022-08-12 | 兰州大学 | 一种八极永磁体结构天线内置式rf离子源 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3757518A (en) * | 1970-11-03 | 1973-09-11 | Messerschmitt Boelkow Blohm | Ion engine |
DE2219545A1 (de) * | 1972-04-21 | 1973-10-31 | Messerschmitt Boelkow Blohm | Ionentriebwerk |
US4058748A (en) * | 1976-05-13 | 1977-11-15 | Hitachi, Ltd. | Microwave discharge ion source |
JPS5852297B2 (ja) * | 1979-06-04 | 1983-11-21 | 株式会社日立製作所 | マイクロ波イオン源 |
US4393333A (en) * | 1979-12-10 | 1983-07-12 | Hitachi, Ltd. | Microwave plasma ion source |
JPS5947421B2 (ja) * | 1980-03-24 | 1984-11-19 | 株式会社日立製作所 | マイクロ波イオン源 |
US4585668A (en) * | 1983-02-28 | 1986-04-29 | Michigan State University | Method for treating a surface with a microwave or UHF plasma and improved apparatus |
US4691662A (en) * | 1983-02-28 | 1987-09-08 | Michigan State University | Dual plasma microwave apparatus and method for treating a surface |
US4507588A (en) * | 1983-02-28 | 1985-03-26 | Board Of Trustees Operating Michigan State University | Ion generating apparatus and method for the use thereof |
US4727293A (en) * | 1984-08-16 | 1988-02-23 | Board Of Trustees Operating Michigan State University | Plasma generating apparatus using magnets and method |
US4630566A (en) * | 1984-08-16 | 1986-12-23 | Board Of Trustees Operating Michigan State University | Microwave or UHF plasma improved apparatus |
US4777336A (en) * | 1987-04-22 | 1988-10-11 | Michigan State University | Method for treating a material using radiofrequency waves |
US4792772A (en) * | 1987-08-24 | 1988-12-20 | Michigan State University | Microwave apparatus |
US4778561A (en) * | 1987-10-30 | 1988-10-18 | Veeco Instruments, Inc. | Electron cyclotron resonance plasma source |
DE3738352A1 (de) * | 1987-11-11 | 1989-05-24 | Technics Plasma Gmbh | Filamentloses magnetron-ionenstrahlsystem |
-
1989
- 1989-04-03 US US07/331,754 patent/US4906900A/en not_active Expired - Lifetime
-
1990
- 1990-02-16 CA CA002010245A patent/CA2010245C/fr not_active Expired - Fee Related
- 1990-03-22 DK DK90105450.2T patent/DK0391156T3/da active
- 1990-03-22 DE DE69020031T patent/DE69020031T2/de not_active Expired - Fee Related
- 1990-03-22 ES ES90105450T patent/ES2018464T3/es not_active Expired - Lifetime
- 1990-03-22 EP EP90105450A patent/EP0391156B1/fr not_active Expired - Lifetime
- 1990-03-22 AT AT90105450T patent/ATE123915T1/de not_active IP Right Cessation
- 1990-03-22 DE DE199090105450T patent/DE391156T1/de active Pending
- 1990-03-26 JP JP2076548A patent/JPH02295052A/ja active Granted
-
1991
- 1991-11-15 GR GR91300023T patent/GR910300023T1/el unknown
-
1995
- 1995-08-09 GR GR950402197T patent/GR3017069T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
EP0391156A2 (fr) | 1990-10-10 |
GR910300023T1 (en) | 1991-11-15 |
DE69020031D1 (de) | 1995-07-20 |
ATE123915T1 (de) | 1995-06-15 |
DK0391156T3 (da) | 1995-10-02 |
GR3017069T3 (en) | 1995-11-30 |
DE391156T1 (de) | 1991-04-11 |
JPH0586021B2 (fr) | 1993-12-09 |
CA2010245C (fr) | 1993-05-11 |
US4906900A (en) | 1990-03-06 |
ES2018464T3 (es) | 1995-10-16 |
DE69020031T2 (de) | 1995-09-21 |
EP0391156B1 (fr) | 1995-06-14 |
JPH02295052A (ja) | 1990-12-05 |
ES2018464A4 (es) | 1991-04-16 |
EP0391156A3 (fr) | 1991-10-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |