CA1341514C - Cible contenant du silicium, pour utilisation en puluverisation sous vide - Google Patents
Cible contenant du silicium, pour utilisation en puluverisation sous vide Download PDFInfo
- Publication number
- CA1341514C CA1341514C CA000617133A CA617133A CA1341514C CA 1341514 C CA1341514 C CA 1341514C CA 000617133 A CA000617133 A CA 000617133A CA 617133 A CA617133 A CA 617133A CA 1341514 C CA1341514 C CA 1341514C
- Authority
- CA
- Canada
- Prior art keywords
- film
- layer
- oxide
- glass
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Laminated Bodies (AREA)
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4876588 | 1988-03-03 | ||
| JP48765/1988 | 1988-03-03 | ||
| JP63076202A JPH0682163B2 (ja) | 1988-03-03 | 1988-03-31 | 耐久性の優れた光学体 |
| JP76202/1988 | 1988-03-31 | ||
| JP144827/1988 | 1988-06-14 | ||
| JP63144827A JPH0626877B2 (ja) | 1988-06-14 | 1988-06-14 | 熱線遮断ガラス |
| JP264163/1988 | 1988-10-21 | ||
| JP26416388 | 1988-10-21 | ||
| CA1338431 | 1989-03-02 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000592521A Division CA1338431C (fr) | 1988-03-03 | 1989-03-02 | Pellicule constituee d'un oxyde amorphe et article recouvert de celle-ci |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1341514C true CA1341514C (fr) | 2006-11-07 |
Family
ID=37441515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000617133A Expired - Fee Related CA1341514C (fr) | 1988-03-03 | 1989-03-02 | Cible contenant du silicium, pour utilisation en puluverisation sous vide |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1341514C (fr) |
-
1989
- 1989-03-02 CA CA000617133A patent/CA1341514C/fr not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |