CA1307981C - Lightsafe masking film - Google Patents

Lightsafe masking film

Info

Publication number
CA1307981C
CA1307981C CA000584817A CA584817A CA1307981C CA 1307981 C CA1307981 C CA 1307981C CA 000584817 A CA000584817 A CA 000584817A CA 584817 A CA584817 A CA 584817A CA 1307981 C CA1307981 C CA 1307981C
Authority
CA
Canada
Prior art keywords
lightsafe
layer
masking film
substrate
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000584817A
Other languages
English (en)
French (fr)
Inventor
Hiroshi Maruyama
Yoshiharu Horii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Application granted granted Critical
Publication of CA1307981C publication Critical patent/CA1307981C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Laminated Bodies (AREA)
  • Printing Plates And Materials Therefor (AREA)
CA000584817A 1987-05-29 1988-12-02 Lightsafe masking film Expired - Fee Related CA1307981C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62131433A JPS63298247A (ja) 1987-05-29 1987-05-29 遮光性マスキングフィルム
JP62-131433 1987-05-29

Publications (1)

Publication Number Publication Date
CA1307981C true CA1307981C (en) 1992-09-29

Family

ID=15057847

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000584817A Expired - Fee Related CA1307981C (en) 1987-05-29 1988-12-02 Lightsafe masking film

Country Status (3)

Country Link
JP (1) JPS63298247A (ko)
KR (1) KR920005768B1 (ko)
CA (1) CA1307981C (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6314423B2 (ja) * 2013-10-25 2018-04-25 凸版印刷株式会社 反射型マスク

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434069Y2 (ko) * 1975-08-21 1979-10-19
DE8113747U1 (de) * 1981-05-09 1982-01-21 Röhm GmbH, 6100 Darmstadt "koextrudiertes lichtdurchlaessiges kunststoffprofil"
JPS61143758A (ja) * 1984-12-17 1986-07-01 Kimoto & Co Ltd 遮光性マスキングフイルム

Also Published As

Publication number Publication date
KR900010469A (ko) 1990-07-07
JPH0575109B2 (ko) 1993-10-19
JPS63298247A (ja) 1988-12-06
KR920005768B1 (ko) 1992-07-18

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Legal Events

Date Code Title Description
MKLA Lapsed