CA1210824A - Apparatus and method for evaporation arc stabilization - Google Patents

Apparatus and method for evaporation arc stabilization

Info

Publication number
CA1210824A
CA1210824A CA000443298A CA443298A CA1210824A CA 1210824 A CA1210824 A CA 1210824A CA 000443298 A CA000443298 A CA 000443298A CA 443298 A CA443298 A CA 443298A CA 1210824 A CA1210824 A CA 1210824A
Authority
CA
Canada
Prior art keywords
target
ring
arc
permeable
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000443298A
Other languages
English (en)
French (fr)
Inventor
William M. Mularie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vac Tec Systems Inc
Original Assignee
Vac Tec Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27050887&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA1210824(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US06/492,831 external-priority patent/US4430184A/en
Priority claimed from US06/531,287 external-priority patent/US4559121A/en
Application filed by Vac Tec Systems Inc filed Critical Vac Tec Systems Inc
Application granted granted Critical
Publication of CA1210824A publication Critical patent/CA1210824A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CA000443298A 1983-05-09 1983-12-14 Apparatus and method for evaporation arc stabilization Expired CA1210824A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/492,831 US4430184A (en) 1983-05-09 1983-05-09 Evaporation arc stabilization
US492,831 1983-05-09
US06/531,287 US4559121A (en) 1983-09-12 1983-09-12 Method and apparatus for evaporation arc stabilization for permeable targets
US531,287 1990-05-31

Publications (1)

Publication Number Publication Date
CA1210824A true CA1210824A (en) 1986-09-02

Family

ID=27050887

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000443298A Expired CA1210824A (en) 1983-05-09 1983-12-14 Apparatus and method for evaporation arc stabilization

Country Status (5)

Country Link
CA (1) CA1210824A (nl)
DE (1) DE3345493C2 (nl)
FR (1) FR2545840B1 (nl)
GB (1) GB2140040B (nl)
NL (1) NL181880C (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning
DE3901401C2 (de) * 1988-03-01 1996-12-19 Fraunhofer Ges Forschung Verfahren zur Steuerung einer Vakuum-Lichtbogenentladung
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
GB9108553D0 (en) * 1991-04-22 1991-06-05 Ion Coat Ltd Ionised vapour source
DE4220588C2 (de) * 1992-06-24 2001-02-15 Leybold Ag Lichtbogen-Verdampfungsvorrichtung
WO2000016373A1 (de) * 1998-09-14 2000-03-23 Unaxis Trading Ag Targetanordnung für eine arc-verdampfungs-kammer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836451A (en) * 1968-12-26 1974-09-17 A Snaper Arc deposition apparatus
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
SU636266A1 (ru) * 1976-04-05 1978-02-10 Предприятие П/Я В-8851 Электродуговой испаритель металлов
CH631743A5 (de) * 1977-06-01 1982-08-31 Balzers Hochvakuum Verfahren zum aufdampfen von material in einer vakuumaufdampfanlage.
JPS54110988A (en) * 1978-01-31 1979-08-30 Nii Chiefunorogii Afutomobirin Coating vacuum evaporation apparatus
DE3152736C2 (de) * 1981-02-23 1984-04-05 Leonid Pavlovič Sablev Selbstverzehrende Kathode f}r einen Lichtbogen-Metallverdampfer

Also Published As

Publication number Publication date
DE3345493C2 (de) 1986-01-16
NL181880B (nl) 1987-06-16
GB2140040B (en) 1986-09-17
GB2140040A (en) 1984-11-21
GB8332650D0 (en) 1984-01-11
NL8400053A (nl) 1984-12-03
NL181880C (nl) 1993-01-18
FR2545840B1 (fr) 1985-11-29
DE3345493A1 (de) 1984-11-15
FR2545840A1 (fr) 1984-11-16

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Legal Events

Date Code Title Description
MKEX Expiry
MKEX Expiry

Effective date: 20031214