FR2545840B1 - Appareil perfectionne pour la stabilisation d'un arc servant a la vaporisation d'une matiere solide - Google Patents

Appareil perfectionne pour la stabilisation d'un arc servant a la vaporisation d'une matiere solide

Info

Publication number
FR2545840B1
FR2545840B1 FR8320123A FR8320123A FR2545840B1 FR 2545840 B1 FR2545840 B1 FR 2545840B1 FR 8320123 A FR8320123 A FR 8320123A FR 8320123 A FR8320123 A FR 8320123A FR 2545840 B1 FR2545840 B1 FR 2545840B1
Authority
FR
France
Prior art keywords
vaporize
stabilization
solid material
improved apparatus
arc used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8320123A
Other languages
English (en)
Other versions
FR2545840A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vac Tec Systems Inc
Original Assignee
Vac Tec Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27050887&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2545840(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US06/492,831 external-priority patent/US4430184A/en
Priority claimed from US06/531,287 external-priority patent/US4559121A/en
Application filed by Vac Tec Systems Inc filed Critical Vac Tec Systems Inc
Publication of FR2545840A1 publication Critical patent/FR2545840A1/fr
Application granted granted Critical
Publication of FR2545840B1 publication Critical patent/FR2545840B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR8320123A 1983-05-09 1983-12-15 Appareil perfectionne pour la stabilisation d'un arc servant a la vaporisation d'une matiere solide Expired FR2545840B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/492,831 US4430184A (en) 1983-05-09 1983-05-09 Evaporation arc stabilization
US06/531,287 US4559121A (en) 1983-09-12 1983-09-12 Method and apparatus for evaporation arc stabilization for permeable targets

Publications (2)

Publication Number Publication Date
FR2545840A1 FR2545840A1 (fr) 1984-11-16
FR2545840B1 true FR2545840B1 (fr) 1985-11-29

Family

ID=27050887

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8320123A Expired FR2545840B1 (fr) 1983-05-09 1983-12-15 Appareil perfectionne pour la stabilisation d'un arc servant a la vaporisation d'une matiere solide

Country Status (5)

Country Link
CA (1) CA1210824A (fr)
DE (1) DE3345493C2 (fr)
FR (1) FR2545840B1 (fr)
GB (1) GB2140040B (fr)
NL (1) NL181880C (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning
DE3901401C2 (de) * 1988-03-01 1996-12-19 Fraunhofer Ges Forschung Verfahren zur Steuerung einer Vakuum-Lichtbogenentladung
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
GB9108553D0 (en) * 1991-04-22 1991-06-05 Ion Coat Ltd Ionised vapour source
DE4220588C2 (de) * 1992-06-24 2001-02-15 Leybold Ag Lichtbogen-Verdampfungsvorrichtung
JP2002525431A (ja) * 1998-09-14 2002-08-13 ユナキス・トレーディング・アクチェンゲゼルシャフト アーク蒸化室用ターゲット配置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836451A (en) * 1968-12-26 1974-09-17 A Snaper Arc deposition apparatus
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
SU636266A1 (ru) * 1976-04-05 1978-02-10 Предприятие П/Я В-8851 Электродуговой испаритель металлов
CH631743A5 (de) * 1977-06-01 1982-08-31 Balzers Hochvakuum Verfahren zum aufdampfen von material in einer vakuumaufdampfanlage.
JPS54110988A (en) * 1978-01-31 1979-08-30 Nii Chiefunorogii Afutomobirin Coating vacuum evaporation apparatus
GB2106545B (en) * 1981-02-23 1985-06-26 Rimma Ivanovna Stupak Consumable cathode for electric-arc evaporator of metal

Also Published As

Publication number Publication date
DE3345493C2 (de) 1986-01-16
DE3345493A1 (de) 1984-11-15
NL181880C (nl) 1993-01-18
FR2545840A1 (fr) 1984-11-16
GB2140040A (en) 1984-11-21
GB2140040B (en) 1986-09-17
CA1210824A (fr) 1986-09-02
GB8332650D0 (en) 1984-01-11
NL181880B (nl) 1987-06-16
NL8400053A (nl) 1984-12-03

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Legal Events

Date Code Title Description
TP Transmission of property