NL181880B - Verdampingsinrichting. - Google Patents

Verdampingsinrichting.

Info

Publication number
NL181880B
NL181880B NL8400053A NL8400053A NL181880B NL 181880 B NL181880 B NL 181880B NL 8400053 A NL8400053 A NL 8400053A NL 8400053 A NL8400053 A NL 8400053A NL 181880 B NL181880 B NL 181880B
Authority
NL
Netherlands
Prior art keywords
evaporating device
evaporating
Prior art date
Application number
NL8400053A
Other languages
English (en)
Other versions
NL8400053A (nl
NL181880C (nl
Original Assignee
Vac Tec Syst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27050887&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL181880(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US06/492,831 external-priority patent/US4430184A/en
Priority claimed from US06/531,287 external-priority patent/US4559121A/en
Application filed by Vac Tec Syst filed Critical Vac Tec Syst
Publication of NL8400053A publication Critical patent/NL8400053A/nl
Publication of NL181880B publication Critical patent/NL181880B/nl
Application granted granted Critical
Publication of NL181880C publication Critical patent/NL181880C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL8400053A 1983-05-09 1984-01-06 Werkwijze voor het op een voorwerp afzetten van een materiaal met gebruikmaking van een opdampinrichting. NL181880C (nl)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/492,831 US4430184A (en) 1983-05-09 1983-05-09 Evaporation arc stabilization
US49283183 1983-05-09
US06/531,287 US4559121A (en) 1983-09-12 1983-09-12 Method and apparatus for evaporation arc stabilization for permeable targets
US53128783 1983-09-12

Publications (3)

Publication Number Publication Date
NL8400053A NL8400053A (nl) 1984-12-03
NL181880B true NL181880B (nl) 1987-06-16
NL181880C NL181880C (nl) 1993-01-18

Family

ID=27050887

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8400053A NL181880C (nl) 1983-05-09 1984-01-06 Werkwijze voor het op een voorwerp afzetten van een materiaal met gebruikmaking van een opdampinrichting.

Country Status (5)

Country Link
CA (1) CA1210824A (nl)
DE (1) DE3345493C2 (nl)
FR (1) FR2545840B1 (nl)
GB (1) GB2140040B (nl)
NL (1) NL181880C (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning
DE3901401C2 (de) * 1988-03-01 1996-12-19 Fraunhofer Ges Forschung Verfahren zur Steuerung einer Vakuum-Lichtbogenentladung
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
GB9108553D0 (en) * 1991-04-22 1991-06-05 Ion Coat Ltd Ionised vapour source
DE4220588C2 (de) * 1992-06-24 2001-02-15 Leybold Ag Lichtbogen-Verdampfungsvorrichtung
WO2000016373A1 (de) * 1998-09-14 2000-03-23 Unaxis Trading Ag Targetanordnung für eine arc-verdampfungs-kammer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836451A (en) * 1968-12-26 1974-09-17 A Snaper Arc deposition apparatus
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
SU636266A1 (ru) * 1976-04-05 1978-02-10 Предприятие П/Я В-8851 Электродуговой испаритель металлов
CH631743A5 (de) * 1977-06-01 1982-08-31 Balzers Hochvakuum Verfahren zum aufdampfen von material in einer vakuumaufdampfanlage.
JPS54110988A (en) * 1978-01-31 1979-08-30 Nii Chiefunorogii Afutomobirin Coating vacuum evaporation apparatus
DE3152736C2 (de) * 1981-02-23 1984-04-05 Leonid Pavlovič Sablev Selbstverzehrende Kathode f}r einen Lichtbogen-Metallverdampfer

Also Published As

Publication number Publication date
DE3345493C2 (de) 1986-01-16
GB2140040B (en) 1986-09-17
GB2140040A (en) 1984-11-21
GB8332650D0 (en) 1984-01-11
NL8400053A (nl) 1984-12-03
NL181880C (nl) 1993-01-18
FR2545840B1 (fr) 1985-11-29
CA1210824A (en) 1986-09-02
DE3345493A1 (de) 1984-11-15
FR2545840A1 (fr) 1984-11-16

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
A85 Still pending on 85-01-01
BC A request for examination has been filed
R1B Notice of opposition during period of laying open
NP1G Not automatically granted patents, but text of patent specification modified with respect to the text of examined patent application
SNR Assignments of patents or rights arising from examined patent applications

Owner name: HAUZER INDUSTRIES B.V.

V1 Lapsed because of non-payment of the annual fee

Effective date: 20020801