CA1184573A - Substantially pore-free shaped articles of polycrystalline silicon nitride and polycrystalline silicon carbide, and a process for their manufacture by isostatic hot-pressing - Google Patents
Substantially pore-free shaped articles of polycrystalline silicon nitride and polycrystalline silicon carbide, and a process for their manufacture by isostatic hot-pressingInfo
- Publication number
- CA1184573A CA1184573A CA000412591A CA412591A CA1184573A CA 1184573 A CA1184573 A CA 1184573A CA 000412591 A CA000412591 A CA 000412591A CA 412591 A CA412591 A CA 412591A CA 1184573 A CA1184573 A CA 1184573A
- Authority
- CA
- Canada
- Prior art keywords
- article
- preshaped
- gas
- encased
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 42
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 238000007731 hot pressing Methods 0.000 title claims abstract description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims description 26
- 230000008569 process Effects 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000203 mixture Substances 0.000 claims abstract description 41
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 35
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 25
- 239000000843 powder Substances 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 239000011230 binding agent Substances 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 8
- 239000011148 porous material Substances 0.000 claims description 8
- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
- 229910052681 coesite Inorganic materials 0.000 claims description 6
- 229910052906 cristobalite Inorganic materials 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 229910052682 stishovite Inorganic materials 0.000 claims description 6
- 229910052905 tridymite Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000001513 hot isostatic pressing Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000005245 sintering Methods 0.000 abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910005091 Si3N Inorganic materials 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 239000002775 capsule Substances 0.000 description 5
- 238000000280 densification Methods 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 238000005488 sandblasting Methods 0.000 description 4
- DSSYKIVIOFKYAU-XCBNKYQSSA-N (R)-camphor Chemical compound C1C[C@@]2(C)C(=O)C[C@@H]1C2(C)C DSSYKIVIOFKYAU-XCBNKYQSSA-N 0.000 description 3
- 241000723346 Cinnamomum camphora Species 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 206010037660 Pyrexia Diseases 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 229960000846 camphor Drugs 0.000 description 3
- 229930008380 camphor Natural products 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- -1 for example Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 101100379067 Caenorhabditis elegans anc-1 gene Proteins 0.000 description 1
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- 101100130497 Drosophila melanogaster Mical gene Proteins 0.000 description 1
- IMWZZHHPURKASS-UHFFFAOYSA-N Metaxalone Chemical compound CC1=CC(C)=CC(OCC2OC(=O)NC2)=C1 IMWZZHHPURKASS-UHFFFAOYSA-N 0.000 description 1
- 101100345589 Mus musculus Mical1 gene Proteins 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 241000206607 Porphyra umbilicalis Species 0.000 description 1
- XDXHAEQXIBQUEZ-UHFFFAOYSA-N Ropinirole hydrochloride Chemical compound Cl.CCCN(CCC)CCC1=CC=CC2=C1CC(=O)N2 XDXHAEQXIBQUEZ-UHFFFAOYSA-N 0.000 description 1
- 208000036366 Sensation of pressure Diseases 0.000 description 1
- 229910005094 Si3M Inorganic materials 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- STEPQTYSZVCJPV-UHFFFAOYSA-N metazachlor Chemical compound CC1=CC=CC(C)=C1N(C(=O)CCl)CN1N=CC=C1 STEPQTYSZVCJPV-UHFFFAOYSA-N 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- VMXUWOKSQNHOCA-UKTHLTGXSA-N ranitidine Chemical compound [O-][N+](=O)\C=C(/NC)NCCSCC1=CC=C(CN(C)C)O1 VMXUWOKSQNHOCA-UKTHLTGXSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813142058 DE3142058A1 (de) | 1981-10-23 | 1981-10-23 | Praktisch porenfreie formkoerper aus polykristallinem siliciumnitrid und siliciumcarbid und verfahren zu ihrer herstellung durch isostatisches heisspressen |
DEP3142058.3 | 1981-10-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1184573A true CA1184573A (en) | 1985-03-26 |
Family
ID=6144688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000412591A Expired CA1184573A (en) | 1981-10-23 | 1982-09-30 | Substantially pore-free shaped articles of polycrystalline silicon nitride and polycrystalline silicon carbide, and a process for their manufacture by isostatic hot-pressing |
Country Status (6)
Country | Link |
---|---|
US (1) | US4560668A (enrdf_load_html_response) |
EP (1) | EP0078010B1 (enrdf_load_html_response) |
JP (1) | JPS5874570A (enrdf_load_html_response) |
AT (1) | ATE24707T1 (enrdf_load_html_response) |
CA (1) | CA1184573A (enrdf_load_html_response) |
DE (2) | DE3142058A1 (enrdf_load_html_response) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4800182A (en) * | 1987-01-22 | 1989-01-24 | Mitsubishi Gas Chemical Company, Inc. | Silicon nitride-silicon carbide composite material and process for production thereof |
US5093056A (en) * | 1987-04-22 | 1992-03-03 | Yoshida Kogyo K.K. | High strength Si3 N4 composite containing SiC whiskers and method of producing the same |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3325490A1 (de) * | 1983-07-14 | 1985-01-24 | Elektroschmelzwerk Kempten GmbH, 8000 München | Feuerfeste, elektrisch leitfaehige mischwerkstoffe und verfahren zu ihrer herstellung durch isostatisches heisspressen |
JPS61120893A (ja) * | 1984-11-16 | 1986-06-07 | Nippon Steel Corp | コ−クス乾式消火設備用バケツト |
JPS61158867A (ja) * | 1984-12-28 | 1986-07-18 | 工業技術院長 | 窒化ケイ素系焼結体の強化方法 |
US4690790A (en) * | 1985-07-23 | 1987-09-01 | Stemcor Corporation | Silicon nitride/silicon carbide composition and articles thereof |
US4752424A (en) * | 1986-01-30 | 1988-06-21 | Kabushiki Kaisha Toshiba | Method of manufacturing a rare earth oxysulfide ceramic |
JPS62207767A (ja) * | 1986-03-06 | 1987-09-12 | 工業技術院長 | 高温高強度窒化ケイ素セラミツクスおよびその製造方法 |
DE3708689A1 (de) * | 1987-03-17 | 1988-10-20 | Max Planck Gesellschaft | Verfahren zum heissisostatischen pressen von carbidfaser- und carbidwhisker verstaerkten siliziumnitridkoerpern |
FR2619103B1 (fr) * | 1987-08-05 | 1989-11-03 | Commissariat Energie Atomique | Procede de mise en forme d'un materiau par pressage isostatique a chaud et gaine en titane utilisable dans ce procede |
US4840763A (en) * | 1987-08-06 | 1989-06-20 | Ltv Aerospace And Defense Company | Method for the production of reinforced composites |
US4931241A (en) * | 1987-08-06 | 1990-06-05 | Ltv Aerospace And Defense Company | Method for producing structures by isostatic compression |
EP0341924A3 (en) * | 1988-05-11 | 1990-10-03 | Ethyl Corporation | Densified silicon nitride ceramics and their production |
JPH0283270A (ja) * | 1988-09-21 | 1990-03-23 | Ngk Insulators Ltd | セラミックス成形体のガラスカプセルhip方法 |
US5209996A (en) * | 1989-07-26 | 1993-05-11 | Shin-Etsu Chemical Co., Ltd. | Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same |
GB8926455D0 (en) * | 1989-11-23 | 1990-05-30 | T & N Technology Ltd | Manufacture of shaped articles from sinterable powder |
JP2730245B2 (ja) * | 1990-01-29 | 1998-03-25 | 日産自動車株式会社 | 炭化珪素・窒化珪素質複合焼結体の製造方法 |
JP2573720B2 (ja) * | 1990-04-28 | 1997-01-22 | 日本碍子 株式会社 | 窒化珪素焼結体の製造法 |
JP2746760B2 (ja) * | 1990-12-27 | 1998-05-06 | 京セラ株式会社 | 窒化珪素−炭化珪素質複合焼結体およびその製造方法 |
EP0564751B1 (en) * | 1992-04-10 | 1997-10-08 | STMicroelectronics S.r.l. | High-resolution digital filter |
US6214078B1 (en) | 1997-11-25 | 2001-04-10 | Ferro Corporation | High temperature ceramic filter |
KR100861287B1 (ko) * | 2008-01-25 | 2008-10-01 | 한국생산기술연구원 | 실리콘 분말을 이용하여 실리콘 성형체를 제조하는 방법 및 장치 |
CN101767998A (zh) * | 2010-01-26 | 2010-07-07 | 三峡大学 | 一种降低碳化钛和氮化钛粉末氧含量的方法 |
CN101857440B (zh) * | 2010-05-28 | 2013-03-20 | 中国南方航空工业(集团)有限公司 | 密封条及其制作方法与应用 |
CN113004043A (zh) * | 2019-12-20 | 2021-06-22 | 湖南太子新材料科技有限公司 | 重结晶碳化硅制品等静压成型工艺 |
CN114956829B (zh) * | 2022-06-18 | 2023-06-02 | 江苏诺明高温材料股份有限公司 | 一种干熄焦斜道用氮化硅结合碳化硅砖及其制备方法 |
CN119638442B (zh) * | 2025-02-18 | 2025-06-10 | 高富高新材料(浙江)有限公司 | 一种高致密性的氮化硅轴承球及其制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3890250A (en) * | 1973-03-14 | 1975-06-17 | Norton Co | Hot pressed silicon nitride containing finely dispersed silicon carbide or silicon aluminum oxynitride |
US3895219A (en) * | 1973-11-23 | 1975-07-15 | Norton Co | Composite ceramic heating element |
US3968194A (en) * | 1974-01-08 | 1976-07-06 | General Electric Company | Dense polycrystalline silicon carbide |
US3974106A (en) * | 1974-05-22 | 1976-08-10 | Norton Company | Ceramic electrical resistance igniter |
GB1522705A (en) * | 1974-11-11 | 1978-08-23 | Asea Ab | Method of manufacturing bodies of silicon nitride |
JPS5830264B2 (ja) * | 1975-10-18 | 1983-06-28 | トウホクダイガク キンゾクザイリヨウケンキユウシヨチヨウ | キンゾクチツカブツシヨウケツセイケイタイノセイゾウホウホウ |
US4184882A (en) * | 1976-03-25 | 1980-01-22 | Westinghouse Electric Corp. | Silicon nitride-silicon carbide composite material |
US4187116A (en) * | 1976-03-25 | 1980-02-05 | Westinghouse Electric Corp. | Silicon nitride-silicon carbide composite material |
US4119689A (en) * | 1977-01-03 | 1978-10-10 | General Electric Company | Sintering of silicon nitride using Be additive |
JPS6031799B2 (ja) * | 1979-11-30 | 1985-07-24 | 黒崎窯業株式会社 | SiC−Si↓3N↓4系複合耐熱セラミツクス材料及びその製造方法 |
DE3040771A1 (de) * | 1980-10-29 | 1982-05-27 | Elektroschmelzwerk Kempten GmbH, 8000 München | Verfahren zur herstellung von praktisch porenfreien, polykristallinen formkoerpern duch isostatisches heisspressen in glashuellen |
DE3129633A1 (de) * | 1981-07-28 | 1983-02-17 | Elektroschmelzwerk Kempten GmbH, 8000 München | "praktisch porenfreie formkoerper aus polykristallinem siliciumcarbid, die durch isostatisches heisspressen hergestellt worden sind" |
-
1981
- 1981-10-23 DE DE19813142058 patent/DE3142058A1/de not_active Withdrawn
-
1982
- 1982-07-16 JP JP57123060A patent/JPS5874570A/ja active Granted
- 1982-09-30 CA CA000412591A patent/CA1184573A/en not_active Expired
- 1982-10-20 EP EP82109677A patent/EP0078010B1/de not_active Expired
- 1982-10-20 DE DE8282109677T patent/DE3274973D1/de not_active Expired
- 1982-10-20 AT AT82109677T patent/ATE24707T1/de not_active IP Right Cessation
-
1984
- 1984-09-07 US US06/648,608 patent/US4560668A/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4800182A (en) * | 1987-01-22 | 1989-01-24 | Mitsubishi Gas Chemical Company, Inc. | Silicon nitride-silicon carbide composite material and process for production thereof |
US5093056A (en) * | 1987-04-22 | 1992-03-03 | Yoshida Kogyo K.K. | High strength Si3 N4 composite containing SiC whiskers and method of producing the same |
Also Published As
Publication number | Publication date |
---|---|
DE3274973D1 (en) | 1987-02-12 |
US4560668A (en) | 1985-12-24 |
ATE24707T1 (de) | 1987-01-15 |
JPS613301B2 (enrdf_load_html_response) | 1986-01-31 |
DE3142058A1 (de) | 1983-05-05 |
EP0078010A2 (de) | 1983-05-04 |
EP0078010A3 (en) | 1984-12-05 |
JPS5874570A (ja) | 1983-05-06 |
EP0078010B1 (de) | 1987-01-07 |
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