CA1126975A - Capteur d'onde acoustique de surface - Google Patents

Capteur d'onde acoustique de surface

Info

Publication number
CA1126975A
CA1126975A CA341,637A CA341637A CA1126975A CA 1126975 A CA1126975 A CA 1126975A CA 341637 A CA341637 A CA 341637A CA 1126975 A CA1126975 A CA 1126975A
Authority
CA
Canada
Prior art keywords
sleeve
saw
substrate
cavity
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA341,637A
Other languages
English (en)
Inventor
Donald E. Cullen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Application granted granted Critical
Publication of CA1126975A publication Critical patent/CA1126975A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
CA341,637A 1978-12-22 1979-12-11 Capteur d'onde acoustique de surface Expired CA1126975A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22
US972,542 1978-12-22

Publications (1)

Publication Number Publication Date
CA1126975A true CA1126975A (fr) 1982-07-06

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
CA341,637A Expired CA1126975A (fr) 1978-12-22 1979-12-11 Capteur d'onde acoustique de surface

Country Status (8)

Country Link
JP (1) JPS5598323A (fr)
AU (1) AU524762B2 (fr)
CA (1) CA1126975A (fr)
DE (1) DE2951469A1 (fr)
FR (1) FR2444936A1 (fr)
GB (1) GB2037988B (fr)
IT (1) IT1125925B (fr)
SE (1) SE7910311L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329019D0 (en) 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
JP4983176B2 (ja) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 圧力センサの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure

Also Published As

Publication number Publication date
GB2037988B (en) 1983-03-02
AU524762B2 (en) 1982-09-30
AU5379779A (en) 1980-06-26
GB2037988A (en) 1980-07-16
JPS5598323A (en) 1980-07-26
IT1125925B (it) 1986-05-14
FR2444936B1 (fr) 1982-10-08
DE2951469A1 (de) 1980-07-03
IT7928110A0 (it) 1979-12-18
FR2444936A1 (fr) 1980-07-18
JPS6345049B2 (fr) 1988-09-07
SE7910311L (sv) 1980-06-23

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Legal Events

Date Code Title Description
MKEX Expiry