JP4815350B2 - 圧力センサカプセル - Google Patents
圧力センサカプセル Download PDFInfo
- Publication number
- JP4815350B2 JP4815350B2 JP2006533067A JP2006533067A JP4815350B2 JP 4815350 B2 JP4815350 B2 JP 4815350B2 JP 2006533067 A JP2006533067 A JP 2006533067A JP 2006533067 A JP2006533067 A JP 2006533067A JP 4815350 B2 JP4815350 B2 JP 4815350B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- capsule
- pressure sensor
- fluid
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0069—Electrical connection means from the sensor to its support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/145—Housings with stress relieving means
- G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Child & Adolescent Psychology (AREA)
- Measuring Fluid Pressure (AREA)
Description
Claims (7)
- 流体隔離体(22)に結合可能なカプセル(20)において、
該流体隔離体(22)に結合される流体入口部(38)、貫通開口(40)および該貫通開口(40)を囲む内部封止面(42)を有するカプセル壁(34)と、
該カプセル壁(34)に含まれ、前記流体隔離体(22)からの圧力を伝達する隔離流体(24)と、
前記カプセル壁(34)内にあり、前記隔離流体(24)の圧力を感知するセンサ要素(44)と、該センサ要素(44)から離して配置された電気接点(46)と、該電気接点(46)とセンサ要素(44)との間に設けられ両者を接続する回路配線(49)と、前記センサ要素(44)、電気接点(46)及び回路配線(49)を支持する層であって且つ内部にセンサ空洞(76)を形成すると共に該センサ空洞(76)を覆うダイアフラム(74)を形成するよう互いに接合された第1の層(70)及び第2の層(72)と、を含む圧力センサ(28)と、
前記電気接点(46)の上に設けられ前記貫通開口(40)と整列する貫通穴(50)を有し、かつ前記圧力センサ(28)に接合された第1の部材表面(52)と前記内部封止面(42)に接合された第2の部材表面(54)とを有するストレス隔離部材(48)とを具備し、
前記圧力センサ(28)は前記ストレス隔離部材(48)のみによって前記カプセル壁(34)に固定されることによって前記隔離流体(24)中に浮かされ、
前記センサ要素(44)は前記ストレス隔離部材(48)および前記電気接点(46)から離して前記ダイアフラム(74)に配置され、該ダイアフラム(74)は、前記センサ空洞(76)内に突出し過圧状態下のダイアフラムを支持する過圧停止部(78)を含むことを特徴とする、流体隔離体に結合可能なカプセル。 - 前記圧力センサが脆弱な材料で形成され、前記カプセル壁が金属で形成され、前記ストレス隔離部材が前記圧力センサの膨張温度係数とほぼ同一の膨張温度係数を有するストレス隔離部材で形成されている請求項1に記載のカプセル。
- 前記圧力センサがセンサ材料からなり、前記ストレス隔離部材が前記センサ材料の温度膨張係数と前記カプセル壁材料の温度膨張係数の中間にある温度膨張係数を有するストレス隔離材料からなる請求項1に記載のカプセル。
- 前記カプセル壁は溶接によりキャップに接合されたカップを具備する請求項1に記載のカプセル。
- 前記キャップが、前記圧力センサを過圧から保護するために歪曲可能な薄い部材からなる請求項4に記載のカプセル。
- 前記カプセル壁は排気孔を有し、前記ストレス隔離部材は排気貫通部を有し、前記圧力センサは前記センサ空洞から前記排気貫通部に延びる排気通路を有する請求項5に記載のカプセル。
- 流体入口部(38)、貫通開口(40)および該貫通開口(40)を囲む内部封止面(42)を有するカプセル壁(34)と、
前記流体入口部(38)に流体の圧力を伝達する入口部材(32)と、
前記カプセル壁(34)内にあり、前記流体の圧力を感知するセンサ要素(44)と、該センサ要素(44)から離して配置された電気接点(46)と、該電気接点(46)とセンサ要素(44)との間に設けられ両者を接続する回路配線(49)と、前記電気接点(46)、センサ要素(44)及び回路配線(49)を支持する層であって且つ内部にセンサ空洞(76)を形成すると共に該センサ空洞(76)を覆うダイアフラム(74)を形成するよう互いに接合された第1の層(70)及び第2の層(72)と、を含む圧力センサ(28)と、
前記電気接点(46)の上に設けられ前記貫通開口(40)と整列する貫通穴(50)を有し、かつ前記圧力センサ(28)に接合された第1の部材表面(52)と前記内部封止面(42)に接合された第2の部材表面(54)とを有するストレス隔離部材(48)とを具備し、
前記圧力センサ(28)は前記ストレス隔離部材(48)のみによって前記カプセル壁(34)に固定されることによって前記流体中に浮かされ、
前記センサ要素(44)は前記ストレス隔離部材(48)および前記電気接点(46)から離して前記ダイアフラム(74)に配置され、該ダイアフラム(74)は、前記センサ空洞(76)内に突出し過圧状態下のダイアフラムを支持する過圧停止部(78)を含むことを特徴とする、圧力センサカプセル。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/439,698 | 2003-05-16 | ||
US10/439,698 US6883380B2 (en) | 2003-05-16 | 2003-05-16 | Pressure sensor capsule |
PCT/US2004/015139 WO2004104541A1 (en) | 2003-05-16 | 2004-05-13 | Pressure sensor capsule |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006528365A JP2006528365A (ja) | 2006-12-14 |
JP2006528365A5 JP2006528365A5 (ja) | 2007-06-14 |
JP4815350B2 true JP4815350B2 (ja) | 2011-11-16 |
Family
ID=33417867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006533067A Expired - Fee Related JP4815350B2 (ja) | 2003-05-16 | 2004-05-13 | 圧力センサカプセル |
Country Status (6)
Country | Link |
---|---|
US (1) | US6883380B2 (ja) |
JP (1) | JP4815350B2 (ja) |
CN (1) | CN1791789B (ja) |
DE (1) | DE112004000818B4 (ja) |
RU (1) | RU2315273C2 (ja) |
WO (1) | WO2004104541A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015007626A (ja) * | 2013-06-19 | 2015-01-15 | ハネウェル・インターナショナル・インコーポレーテッド | シリコン応力隔離部材を有する統合soi圧力センサ |
Families Citing this family (34)
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US7258021B2 (en) * | 2004-06-25 | 2007-08-21 | Rosemount Inc. | Process transmitter isolation assembly |
US7162926B1 (en) * | 2005-08-04 | 2007-01-16 | Kavlico Corporation | Lead embedded pressure sensor |
EP1783475A1 (en) * | 2005-11-02 | 2007-05-09 | Services Pétroliers Schlumberger | Miniaturized membrane and shell for a pressure measuring sensor |
DE102005052929B4 (de) * | 2005-11-03 | 2011-07-21 | Eurocopter Deutschland GmbH, 86609 | Sensor für ein Luftfahrzeug, insbesondere ein Flugzeug oder Hubschrauber |
US7503221B2 (en) | 2006-11-08 | 2009-03-17 | Honeywell International Inc. | Dual span absolute pressure sense die |
US7458275B2 (en) * | 2007-03-15 | 2008-12-02 | Rosemount Inc. | Welded header for pressure transmitter |
US7624642B2 (en) * | 2007-09-20 | 2009-12-01 | Rosemount Inc. | Differential pressure sensor isolation in a process fluid pressure transmitter |
US7497123B1 (en) | 2007-12-18 | 2009-03-03 | Rosemount Inc. | Direct mount for pressure transmitter with thermal management |
US8042401B2 (en) * | 2008-06-12 | 2011-10-25 | Rosemount, Inc. | Isolation system for process pressure measurement |
US7861595B2 (en) * | 2009-05-11 | 2011-01-04 | Honeywell International Inc. | Pressure sensing device for harsh environments |
US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
PL2312290T3 (pl) * | 2009-10-16 | 2020-06-01 | First Sensor Mobility Gmbh | Czujnik ciśnienia i jego zastosowanie w zbiorniku płynu |
DE102011006517A1 (de) | 2011-03-31 | 2012-10-04 | Endress + Hauser Gmbh + Co. Kg | Druckfest gekapselter Differenzdrucksensor |
ITMI20120456A1 (it) * | 2012-03-23 | 2013-09-24 | Microtel Tecnologie Elettroniche S P A | Sensore di pressione ceramico e relativo metodo di produzione, e trasduttore che incorpora un sensore di pressione ceramico |
US9032805B2 (en) * | 2012-05-15 | 2015-05-19 | Fca Us Llc | High pressure visual indicator |
US9442031B2 (en) | 2013-06-28 | 2016-09-13 | Rosemount Inc. | High integrity process fluid pressure probe |
US9513183B2 (en) * | 2014-06-30 | 2016-12-06 | Rosemount Inc. | Process isolation diaphragm assembly for metal process seal |
US9638600B2 (en) * | 2014-09-30 | 2017-05-02 | Rosemount Inc. | Electrical interconnect for pressure sensor in a process variable transmitter |
US9719872B2 (en) | 2015-09-29 | 2017-08-01 | Rosemount Inc. | High over-pressure capable silicon die pressure sensor with extended pressure signal output |
US10060813B2 (en) | 2015-09-29 | 2018-08-28 | Rosemount Inc. | High over-pressure capable silicon die pressure sensor |
US10060820B2 (en) | 2015-12-22 | 2018-08-28 | Continental Automotive Systems, Inc. | Stress-isolated absolute pressure sensor |
JP6143926B1 (ja) * | 2016-07-09 | 2017-06-07 | 日本特殊陶業株式会社 | 圧力センサ |
US10271121B2 (en) | 2016-09-23 | 2019-04-23 | Apple Inc. | Shock mounted transducer assembly |
US10203258B2 (en) | 2016-09-26 | 2019-02-12 | Rosemount Inc. | Pressure sensor diaphragm with overpressure protection |
JP6721529B2 (ja) * | 2017-03-22 | 2020-07-15 | アズビル株式会社 | 差圧センサチップ、差圧発信器、および差圧センサチップの製造方法 |
JP6897421B2 (ja) * | 2017-08-22 | 2021-06-30 | 横河電機株式会社 | センサ |
CN107595261B (zh) * | 2017-09-27 | 2020-11-20 | 广州中科新知科技有限公司 | 一种人体振动信号采集板 |
CN108254123A (zh) * | 2017-12-13 | 2018-07-06 | 太原航空仪表有限公司 | 一种用于压力传感器的隔离自保护接口 |
CN107976279A (zh) * | 2017-12-15 | 2018-05-01 | 北京创昱科技有限公司 | 一种真空测量装置 |
EP3740653A4 (en) * | 2018-01-16 | 2021-10-20 | Q.E.D. Environmental Systems, Inc. | LIQUID LEVEL MONITORING SYSTEM AND METHOD WITH A PRESSURE SENSOR SYSTEM WITH INFLATABLE / FOLDABLE BAG |
US10782200B2 (en) | 2018-06-27 | 2020-09-22 | Mks Instruments, Inc. | Apparatus and method for thermal insulation of high-temperature pressure sensors |
CN111487006B (zh) * | 2020-04-16 | 2021-07-20 | 南京高华科技股份有限公司 | 基于应力隔离结构的微差压传感器 |
US11656138B2 (en) | 2020-06-19 | 2023-05-23 | Rosemount Inc. | Pressure sensor assembly |
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JPS63199044U (ja) * | 1987-06-10 | 1988-12-21 | ||
JPH06258163A (ja) * | 1992-01-24 | 1994-09-16 | Foxboro Co:The | 複数枚のラミネートで構成された基体を有する圧力センサー並びに同センサーの製造方法 |
JPH0933371A (ja) * | 1995-07-25 | 1997-02-07 | Yokogawa Electric Corp | 半導体圧力計 |
JPH0979928A (ja) * | 1995-09-12 | 1997-03-28 | Nagano Keiki Seisakusho Ltd | 半導体圧力センサ装置 |
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JP2002350260A (ja) * | 2001-05-28 | 2002-12-04 | Matsushita Electric Works Ltd | 半導体圧力センサ |
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2003
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-
2004
- 2004-05-13 CN CN200480013385.XA patent/CN1791789B/zh not_active Expired - Lifetime
- 2004-05-13 WO PCT/US2004/015139 patent/WO2004104541A1/en active Application Filing
- 2004-05-13 JP JP2006533067A patent/JP4815350B2/ja not_active Expired - Fee Related
- 2004-05-13 DE DE112004000818.2T patent/DE112004000818B4/de not_active Expired - Lifetime
- 2004-05-13 RU RU2005140100/28A patent/RU2315273C2/ru not_active IP Right Cessation
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JPS4833874A (ja) * | 1971-08-02 | 1973-05-14 | ||
JPS5288931U (ja) * | 1975-12-25 | 1977-07-02 | ||
JPS5669849A (en) * | 1979-11-12 | 1981-06-11 | Mitsubishi Electric Corp | Semiconductor pressure converting device |
JPS6339653U (ja) * | 1986-08-29 | 1988-03-15 | ||
JPS63199044U (ja) * | 1987-06-10 | 1988-12-21 | ||
JPH06258163A (ja) * | 1992-01-24 | 1994-09-16 | Foxboro Co:The | 複数枚のラミネートで構成された基体を有する圧力センサー並びに同センサーの製造方法 |
JPH0933371A (ja) * | 1995-07-25 | 1997-02-07 | Yokogawa Electric Corp | 半導体圧力計 |
JPH0979928A (ja) * | 1995-09-12 | 1997-03-28 | Nagano Keiki Seisakusho Ltd | 半導体圧力センサ装置 |
WO1997021986A1 (de) * | 1995-12-08 | 1997-06-19 | Micronas Semiconductor S.A. | Mikrosensoren mit siliziummembranen und verfahren zur herstellung derselben |
WO2001088497A1 (de) * | 2000-05-13 | 2001-11-22 | Robert Bosch Gmbh | Gefrierresistenter drucksensor |
JP2002055006A (ja) * | 2000-08-11 | 2002-02-20 | Saginomiya Seisakusho Inc | 圧力検出エレメントおよびその製造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015007626A (ja) * | 2013-06-19 | 2015-01-15 | ハネウェル・インターナショナル・インコーポレーテッド | シリコン応力隔離部材を有する統合soi圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
RU2005140100A (ru) | 2006-05-10 |
DE112004000818B4 (de) | 2018-06-28 |
CN1791789B (zh) | 2010-05-26 |
WO2004104541A1 (en) | 2004-12-02 |
DE112004000818T5 (de) | 2006-03-23 |
US20040226383A1 (en) | 2004-11-18 |
JP2006528365A (ja) | 2006-12-14 |
US6883380B2 (en) | 2005-04-26 |
RU2315273C2 (ru) | 2008-01-20 |
CN1791789A (zh) | 2006-06-21 |
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