CA1124679A - Electrode sputtering process for exhaust gas oxygen sensor - Google Patents

Electrode sputtering process for exhaust gas oxygen sensor

Info

Publication number
CA1124679A
CA1124679A CA344,809A CA344809A CA1124679A CA 1124679 A CA1124679 A CA 1124679A CA 344809 A CA344809 A CA 344809A CA 1124679 A CA1124679 A CA 1124679A
Authority
CA
Canada
Prior art keywords
platinum
exhaust gas
thimble
sensor
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA344,809A
Other languages
English (en)
French (fr)
Inventor
Terry J. Gold
Kurt D. Humphrey
Keith A. Penney
Robert J. Smith
Randy L. Voto
Ralph V. Wilhelm, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motors Liquidation Co
Original Assignee
General Motors Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/098,726 external-priority patent/US4253931A/en
Application filed by General Motors Corp filed Critical General Motors Corp
Application granted granted Critical
Publication of CA1124679A publication Critical patent/CA1124679A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90—Selection of catalytic material
    • H01M4/9041—Metals or alloys
    • H01M4/905—Metals or alloys specially used in fuel cell operating at high temperature, e.g. SOFC
    • H01M4/9058—Metals or alloys specially used in fuel cell operating at high temperature, e.g. SOFC of noble metals or noble-metal based alloys
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Biochemistry (AREA)
  • Mechanical Engineering (AREA)
  • Molecular Biology (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Metallurgy (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Physical Vapour Deposition (AREA)
CA344,809A 1979-04-17 1980-01-31 Electrode sputtering process for exhaust gas oxygen sensor Expired CA1124679A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US3074879A 1979-04-17 1979-04-17
US030,748 1979-04-17
US098,726 1979-11-30
US06/098,726 US4253931A (en) 1979-11-30 1979-11-30 Electrode sputtering process for exhaust gas oxygen sensor

Publications (1)

Publication Number Publication Date
CA1124679A true CA1124679A (en) 1982-06-01

Family

ID=26706416

Family Applications (1)

Application Number Title Priority Date Filing Date
CA344,809A Expired CA1124679A (en) 1979-04-17 1980-01-31 Electrode sputtering process for exhaust gas oxygen sensor

Country Status (5)

Country Link
CA (1) CA1124679A (enrdf_load_stackoverflow)
DE (1) DE3014871A1 (enrdf_load_stackoverflow)
FR (1) FR2454621A1 (enrdf_load_stackoverflow)
GB (1) GB2046799B (enrdf_load_stackoverflow)
IT (1) IT1145266B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060275647A1 (en) * 2005-06-06 2006-12-07 Caine Finnerty Textile derived solid oxide fuel cell system
DE102013205037A1 (de) 2013-03-21 2014-09-25 Robert Bosch Gmbh Sensorelement und Abgassensor aufweisend ein Sensorelement

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3978006A (en) * 1972-02-10 1976-08-31 Robert Bosch G.M.B.H. Methods for producing oxygen-sensing element, particularly for use with internal combustion engine exhaust emission analysis
US3844920A (en) * 1973-11-21 1974-10-29 Gen Motors Corp Air fuel ratio sensor
US4040929A (en) * 1975-09-15 1977-08-09 Universal Oil Products Company Oxygen sensor having thin film electrolyte
US4136000A (en) * 1978-03-13 1979-01-23 Bendix Autolite Corporation Process for producing improved solid electrolyte oxygen gas sensors

Also Published As

Publication number Publication date
DE3014871A1 (de) 1980-11-06
GB2046799B (en) 1983-04-20
FR2454621B1 (enrdf_load_stackoverflow) 1982-07-30
FR2454621A1 (fr) 1980-11-14
GB2046799A (en) 1980-11-19
IT8048418A0 (it) 1980-04-15
IT1145266B (it) 1986-11-05
DE3014871C2 (enrdf_load_stackoverflow) 1990-03-22

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Legal Events

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