CA1090183A - System for illuminating an annular field - Google Patents
System for illuminating an annular fieldInfo
- Publication number
- CA1090183A CA1090183A CA287,089A CA287089A CA1090183A CA 1090183 A CA1090183 A CA 1090183A CA 287089 A CA287089 A CA 287089A CA 1090183 A CA1090183 A CA 1090183A
- Authority
- CA
- Canada
- Prior art keywords
- axis
- field
- illuminating
- mirror
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005855 radiation Effects 0.000 claims abstract description 25
- 238000003384 imaging method Methods 0.000 claims abstract description 18
- 210000001747 pupil Anatomy 0.000 claims description 32
- 238000005286 illumination Methods 0.000 claims description 30
- 238000012546 transfer Methods 0.000 claims description 22
- 210000000887 face Anatomy 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
- 229910052753 mercury Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000005350 fused silica glass Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0836—Catadioptric systems using more than three curved mirrors
- G02B17/0848—Catadioptric systems using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
- G03B27/54—Lamp housings; Illuminating means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA354,214A CA1110890A (en) | 1976-09-22 | 1980-06-17 | System for illuminating an annular field |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US72535176A | 1976-09-22 | 1976-09-22 | |
| US725,351 | 1976-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1090183A true CA1090183A (en) | 1980-11-25 |
Family
ID=24914185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA287,089A Expired CA1090183A (en) | 1976-09-22 | 1977-09-20 | System for illuminating an annular field |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5341079A (xx) |
| CA (1) | CA1090183A (xx) |
| CH (1) | CH623659A5 (xx) |
| DE (1) | DE2742488A1 (xx) |
| FR (1) | FR2372379A1 (xx) |
| GB (1) | GB1589784A (xx) |
| IT (1) | IT1090469B (xx) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4321628A (en) * | 1980-04-02 | 1982-03-23 | Xerox Corporation | Scanning apparatus |
| GB2173608A (en) * | 1985-03-25 | 1986-10-15 | Richard George Bingham | Imaging system having three curved and one aspherical mirror |
| JPH11326759A (ja) * | 1998-05-18 | 1999-11-26 | Ricoh Co Ltd | 画像表示装置 |
| JP2001228401A (ja) | 2000-02-16 | 2001-08-24 | Canon Inc | 投影光学系、および該投影光学系による投影露光装置、デバイス製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1541379A (fr) * | 1966-11-02 | 1968-10-04 | Eltro Gmbh | Procédé et dispositif de formation d'images |
| US3644030A (en) * | 1968-07-12 | 1972-02-22 | Ricoh Kk | Light source system |
| US3748015A (en) * | 1971-06-21 | 1973-07-24 | Perkin Elmer Corp | Unit power imaging catoptric anastigmat |
| DE2410924A1 (de) * | 1973-03-09 | 1974-09-26 | Perkin Elmer Corp | Vorrichtung zur fotografischen belichtung einer oberflaeche |
| DE2348567A1 (de) * | 1973-09-27 | 1975-04-17 | Guido Georg Reinert | Fluoreszenzlampe des entladungsroehrentyps mit uv-strahlendem leuchtstoff, sogenannter schwarzlichtleuchtstoffroehre fuer die beobachtung feiner strukturen mittels einer lupe, eines stereomikroskops oder aequivalenter optischer geraete |
| US3878419A (en) * | 1973-12-17 | 1975-04-15 | Carlo F Lafiandra | Precision base mercury vapor lamp |
| CH597618A5 (xx) * | 1975-12-02 | 1978-04-14 | Zelacolor Syst |
-
1977
- 1977-09-20 CA CA287,089A patent/CA1090183A/en not_active Expired
- 1977-09-21 FR FR7728457A patent/FR2372379A1/fr active Granted
- 1977-09-21 DE DE19772742488 patent/DE2742488A1/de active Granted
- 1977-09-21 IT IT5110977A patent/IT1090469B/it active
- 1977-09-21 JP JP11387277A patent/JPS5341079A/ja active Granted
- 1977-09-21 CH CH1154177A patent/CH623659A5/fr not_active IP Right Cessation
- 1977-09-21 GB GB3935877A patent/GB1589784A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2742488C2 (xx) | 1988-01-21 |
| FR2372379B1 (xx) | 1982-08-13 |
| JPH0315170B2 (xx) | 1991-02-28 |
| DE2742488A1 (de) | 1978-03-23 |
| FR2372379A1 (fr) | 1978-06-23 |
| JPS5341079A (en) | 1978-04-14 |
| GB1589784A (en) | 1981-05-20 |
| IT1090469B (it) | 1985-06-26 |
| CH623659A5 (en) | 1981-06-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry | ||
| MKEX | Expiry |
Effective date: 19971125 |