JPS5341079A - Device for illuminating annular sirface - Google Patents

Device for illuminating annular sirface

Info

Publication number
JPS5341079A
JPS5341079A JP11387277A JP11387277A JPS5341079A JP S5341079 A JPS5341079 A JP S5341079A JP 11387277 A JP11387277 A JP 11387277A JP 11387277 A JP11387277 A JP 11387277A JP S5341079 A JPS5341079 A JP S5341079A
Authority
JP
Japan
Prior art keywords
sirface
illuminating
annular
illuminating annular
annular sirface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11387277A
Other languages
English (en)
Other versions
JPH0315170B2 (ja
Inventor
Ei Maakuru Deibuitsudo
Otsufunaa Eibu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of JPS5341079A publication Critical patent/JPS5341079A/ja
Publication of JPH0315170B2 publication Critical patent/JPH0315170B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0836—Catadioptric systems using more than three curved mirrors
    • G02B17/0848—Catadioptric systems using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/54—Lamp housings; Illuminating means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP11387277A 1976-09-22 1977-09-21 Device for illuminating annular sirface Granted JPS5341079A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72535176A 1976-09-22 1976-09-22

Publications (2)

Publication Number Publication Date
JPS5341079A true JPS5341079A (en) 1978-04-14
JPH0315170B2 JPH0315170B2 (ja) 1991-02-28

Family

ID=24914185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11387277A Granted JPS5341079A (en) 1976-09-22 1977-09-21 Device for illuminating annular sirface

Country Status (7)

Country Link
JP (1) JPS5341079A (ja)
CA (1) CA1090183A (ja)
CH (1) CH623659A5 (ja)
DE (1) DE2742488A1 (ja)
FR (1) FR2372379A1 (ja)
GB (1) GB1589784A (ja)
IT (1) IT1090469B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56156069A (en) * 1980-04-02 1981-12-02 Xerox Corp Raster image scanning device
JPH11326759A (ja) * 1998-05-18 1999-11-26 Ricoh Co Ltd 画像表示装置
JP2001228401A (ja) * 2000-02-16 2001-08-24 Canon Inc 投影光学系、および該投影光学系による投影露光装置、デバイス製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2173608A (en) * 1985-03-25 1986-10-15 Richard George Bingham Imaging system having three curved and one aspherical mirror

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1541379A (fr) * 1966-11-02 1968-10-04 Eltro Gmbh Procédé et dispositif de formation d'images
US3644030A (en) * 1968-07-12 1972-02-22 Ricoh Kk Light source system
US3748015A (en) * 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
DE2410924A1 (de) * 1973-03-09 1974-09-26 Perkin Elmer Corp Vorrichtung zur fotografischen belichtung einer oberflaeche
DE2348567A1 (de) * 1973-09-27 1975-04-17 Guido Georg Reinert Fluoreszenzlampe des entladungsroehrentyps mit uv-strahlendem leuchtstoff, sogenannter schwarzlichtleuchtstoffroehre fuer die beobachtung feiner strukturen mittels einer lupe, eines stereomikroskops oder aequivalenter optischer geraete
US3878419A (en) * 1973-12-17 1975-04-15 Carlo F Lafiandra Precision base mercury vapor lamp
CH597618A5 (ja) * 1975-12-02 1978-04-14 Zelacolor Syst

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56156069A (en) * 1980-04-02 1981-12-02 Xerox Corp Raster image scanning device
JPH0412062B2 (ja) * 1980-04-02 1992-03-03 Xerox Corp
JPH11326759A (ja) * 1998-05-18 1999-11-26 Ricoh Co Ltd 画像表示装置
JP2001228401A (ja) * 2000-02-16 2001-08-24 Canon Inc 投影光学系、および該投影光学系による投影露光装置、デバイス製造方法
US6995918B2 (en) 2000-02-16 2006-02-07 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus
US7075726B2 (en) 2000-02-16 2006-07-11 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus
US7092168B2 (en) 2000-02-16 2006-08-15 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus
US7239453B2 (en) 2000-02-16 2007-07-03 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus

Also Published As

Publication number Publication date
DE2742488A1 (de) 1978-03-23
FR2372379A1 (fr) 1978-06-23
DE2742488C2 (ja) 1988-01-21
FR2372379B1 (ja) 1982-08-13
CH623659A5 (en) 1981-06-15
GB1589784A (en) 1981-05-20
IT1090469B (it) 1985-06-26
CA1090183A (en) 1980-11-25
JPH0315170B2 (ja) 1991-02-28

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