CA1083266A - Field emission cathode and method for preparation thereof - Google Patents
Field emission cathode and method for preparation thereofInfo
- Publication number
- CA1083266A CA1083266A CA255,658A CA255658A CA1083266A CA 1083266 A CA1083266 A CA 1083266A CA 255658 A CA255658 A CA 255658A CA 1083266 A CA1083266 A CA 1083266A
- Authority
- CA
- Canada
- Prior art keywords
- cathode
- glassy carbon
- needle
- shaped
- field emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- 229910021397 glassy carbon Inorganic materials 0.000 claims abstract description 80
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 32
- 239000002994 raw material Substances 0.000 claims description 25
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 25
- 229910052721 tungsten Inorganic materials 0.000 claims description 25
- 239000010937 tungsten Substances 0.000 claims description 25
- 239000011347 resin Substances 0.000 claims description 17
- 229920005989 resin Polymers 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 13
- 230000008093 supporting effect Effects 0.000 claims description 13
- 229920000642 polymer Polymers 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 11
- 238000010000 carbonizing Methods 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 10
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 claims description 8
- 238000001354 calcination Methods 0.000 claims description 7
- 229920001187 thermosetting polymer Polymers 0.000 claims description 7
- 238000007493 shaping process Methods 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 5
- 230000003028 elevating effect Effects 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- 239000007849 furan resin Substances 0.000 claims description 4
- 239000005011 phenolic resin Substances 0.000 claims description 4
- 229920001568 phenolic resin Polymers 0.000 claims description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 4
- 229920002554 vinyl polymer Polymers 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052702 rhenium Inorganic materials 0.000 claims description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims 6
- 229910052751 metal Inorganic materials 0.000 abstract description 13
- 239000002184 metal Substances 0.000 abstract description 13
- 239000007789 gas Substances 0.000 description 57
- 238000010438 heat treatment Methods 0.000 description 30
- 238000001179 sorption measurement Methods 0.000 description 29
- 230000000694 effects Effects 0.000 description 13
- 229920000049 Carbon (fiber) Polymers 0.000 description 11
- 239000004917 carbon fiber Substances 0.000 description 11
- 238000002474 experimental method Methods 0.000 description 11
- 238000003795 desorption Methods 0.000 description 10
- 230000006870 function Effects 0.000 description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 10
- 239000000470 constituent Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000000523 sample Substances 0.000 description 8
- 239000003575 carbonaceous material Substances 0.000 description 5
- 238000013016 damping Methods 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 4
- 229910001868 water Inorganic materials 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- XPFVYQJUAUNWIW-UHFFFAOYSA-N furfuryl alcohol Chemical compound OCC1=CC=CO1 XPFVYQJUAUNWIW-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000010849 ion bombardment Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000010406 cathode material Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- HYBBIBNJHNGZAN-UHFFFAOYSA-N furfural Chemical compound O=CC1=CC=CO1 HYBBIBNJHNGZAN-UHFFFAOYSA-N 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- GVNVAWHJIKLAGL-UHFFFAOYSA-N 2-(cyclohexen-1-yl)cyclohexan-1-one Chemical compound O=C1CCCCC1C1=CCCCC1 GVNVAWHJIKLAGL-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 229920002972 Acrylic fiber Polymers 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 101150065749 Churc1 gene Proteins 0.000 description 1
- 241001663154 Electron Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 102100038239 Protein Churchill Human genes 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 101700004678 SLIT3 Proteins 0.000 description 1
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- VRZVPALEJCLXPR-UHFFFAOYSA-N ethyl 4-methylbenzenesulfonate Chemical compound CCOS(=O)(=O)C1=CC=C(C)C=C1 VRZVPALEJCLXPR-UHFFFAOYSA-N 0.000 description 1
- 239000011809 glassy carbon fiber Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30457—Diamond
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7940375A JPS524162A (en) | 1975-06-27 | 1975-06-27 | Electric field radiation cathode and its manufacturing method |
| JP79403/1975 | 1975-06-27 | ||
| JP31248/1976 | 1976-03-24 | ||
| JP3124876A JPS52115160A (en) | 1976-03-24 | 1976-03-24 | Field radiation cathode |
| JP3603376A JPS52120673A (en) | 1976-04-02 | 1976-04-02 | Electric field discharge cathode |
| JP36033/1976 | 1976-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1083266A true CA1083266A (en) | 1980-08-05 |
Family
ID=27287259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA255,658A Expired CA1083266A (en) | 1975-06-27 | 1976-06-25 | Field emission cathode and method for preparation thereof |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4143292A (OSRAM) |
| CA (1) | CA1083266A (OSRAM) |
| DE (1) | DE2628584C3 (OSRAM) |
| FR (1) | FR2319967A1 (OSRAM) |
| GB (1) | GB1517649A (OSRAM) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7605820A (nl) * | 1976-05-31 | 1977-12-02 | Philips Nv | Elektronenstraalbuis met veldemissieelektronen- bron, veldemissieelektronenbron voor een der- gelijke elektronenstraalbuis en werkwijze voor de vervaardiging van een dergelijke veldemis- sieelektronenbron. |
| JPS53128971A (en) * | 1977-04-18 | 1978-11-10 | Hitachi Ltd | Manufacture of electron radiation cathode |
| JPS5598435A (en) * | 1979-01-23 | 1980-07-26 | Denki Kagaku Kogyo Kk | Hot cathode |
| JPS57132632A (en) * | 1981-02-09 | 1982-08-17 | Hitachi Ltd | Ion source |
| GB2204991B (en) * | 1987-05-18 | 1991-10-02 | Gen Electric Plc | Vacuum electronic devices |
| US4916292A (en) * | 1988-04-14 | 1990-04-10 | Mitsubishi Pencil Co., Ltd. | Coiled resistance heating element of carbonaceous material |
| US5182166A (en) * | 1991-05-01 | 1993-01-26 | Burton Ralph A | Wear-resistant composite structure of vitreous carbon containing convoluted fibers |
| JP3255960B2 (ja) * | 1991-09-30 | 2002-02-12 | 株式会社神戸製鋼所 | 冷陰極エミッタ素子 |
| US5536193A (en) * | 1991-11-07 | 1996-07-16 | Microelectronics And Computer Technology Corporation | Method of making wide band gap field emitter |
| US5252833A (en) * | 1992-02-05 | 1993-10-12 | Motorola, Inc. | Electron source for depletion mode electron emission apparatus |
| US5449970A (en) * | 1992-03-16 | 1995-09-12 | Microelectronics And Computer Technology Corporation | Diode structure flat panel display |
| US5543684A (en) * | 1992-03-16 | 1996-08-06 | Microelectronics And Computer Technology Corporation | Flat panel display based on diamond thin films |
| US6127773A (en) * | 1992-03-16 | 2000-10-03 | Si Diamond Technology, Inc. | Amorphic diamond film flat field emission cathode |
| US5675216A (en) * | 1992-03-16 | 1997-10-07 | Microelectronics And Computer Technololgy Corp. | Amorphic diamond film flat field emission cathode |
| US5686791A (en) * | 1992-03-16 | 1997-11-11 | Microelectronics And Computer Technology Corp. | Amorphic diamond film flat field emission cathode |
| US5679043A (en) * | 1992-03-16 | 1997-10-21 | Microelectronics And Computer Technology Corporation | Method of making a field emitter |
| US5763997A (en) * | 1992-03-16 | 1998-06-09 | Si Diamond Technology, Inc. | Field emission display device |
| WO1995012835A1 (en) * | 1993-11-04 | 1995-05-11 | Microelectronics And Computer Technology Corporation | Methods for fabricating flat panel display systems and components |
| US5602439A (en) * | 1994-02-14 | 1997-02-11 | The Regents Of The University Of California, Office Of Technology Transfer | Diamond-graphite field emitters |
| US5578901A (en) * | 1994-02-14 | 1996-11-26 | E. I. Du Pont De Nemours And Company | Diamond fiber field emitters |
| US6204834B1 (en) | 1994-08-17 | 2001-03-20 | Si Diamond Technology, Inc. | System and method for achieving uniform screen brightness within a matrix display |
| US5531880A (en) * | 1994-09-13 | 1996-07-02 | Microelectronics And Computer Technology Corporation | Method for producing thin, uniform powder phosphor for display screens |
| US5588893A (en) * | 1995-06-06 | 1996-12-31 | Kentucky Research And Investment Company Limited | Field emission cathode and methods in the production thereof |
| US5628659A (en) * | 1995-04-24 | 1997-05-13 | Microelectronics And Computer Corporation | Method of making a field emission electron source with random micro-tip structures |
| US6296740B1 (en) | 1995-04-24 | 2001-10-02 | Si Diamond Technology, Inc. | Pretreatment process for a surface texturing process |
| JP3556331B2 (ja) * | 1995-07-17 | 2004-08-18 | 株式会社日立製作所 | 電子源の作製法 |
| RU2158036C2 (ru) * | 1996-02-29 | 2000-10-20 | ООО "Высокие технологии" | Способ получения алмазных пленок методом газофазного синтеза |
| RU2158037C2 (ru) * | 1996-07-16 | 2000-10-20 | ООО "Высокие технологии" | Способ получения алмазных пленок методом газофазного синтеза |
| US6020677A (en) * | 1996-11-13 | 2000-02-01 | E. I. Du Pont De Nemours And Company | Carbon cone and carbon whisker field emitters |
| RU2161838C2 (ru) * | 1997-06-24 | 2001-01-10 | Тарис Технолоджис, Инк. | Холодноэмиссионный пленочный катод и способы его получения |
| RU2150154C1 (ru) * | 1998-11-18 | 2000-05-27 | Акционерное общество закрытого типа "Карбид" | Полевой эмиттер электронов и способ его изготовления (варианты) |
| EP1003196A1 (en) * | 1998-11-19 | 2000-05-24 | Nec Corporation | Carbon material, method for manufacturing the same material, field-emission type cold cathode using the same material and method for manufacturing the same cathode |
| US6506482B1 (en) | 1999-05-24 | 2003-01-14 | Carbon Ceramics Company, Llc | Vitreous carbon composite and method of making and using same |
| US6342755B1 (en) | 1999-08-11 | 2002-01-29 | Sony Corporation | Field emission cathodes having an emitting layer comprised of electron emitting particles and insulating particles |
| US6384520B1 (en) | 1999-11-24 | 2002-05-07 | Sony Corporation | Cathode structure for planar emitter field emission displays |
| US6683399B2 (en) * | 2001-05-23 | 2004-01-27 | The United States Of America As Represented By The Secretary Of The Air Force | Field emission cold cathode |
| DE602005018625D1 (de) | 2005-07-14 | 2010-02-11 | Lightlab Sweden Ab | Kohlenstoffbasierte Feldemissionskathode und deren Herstellungsverfahren |
| US7862897B2 (en) * | 2006-01-27 | 2011-01-04 | Carbon Ceramics Company, Llc | Biphasic nanoporous vitreous carbon material and method of making the same |
| JP2008047309A (ja) * | 2006-08-11 | 2008-02-28 | Hitachi High-Technologies Corp | 電界放出型電子銃、およびその運転方法 |
| US8052903B2 (en) * | 2006-12-25 | 2011-11-08 | Christopher Whitmarsh | Vitreous carbon material and process for making the same |
| WO2012050964A1 (en) * | 2010-09-29 | 2012-04-19 | The Trustees Of Columbia University In The City Of New York | Systems and methods using a glassy carbon heater |
| JP6043476B2 (ja) * | 2011-10-12 | 2016-12-14 | 株式会社日立ハイテクノロジーズ | イオン源およびそれを用いたイオンビーム装置 |
| US11810774B2 (en) | 2020-08-26 | 2023-11-07 | Government Of The United States As Represented By The Secretary Of The Air Force | Field emission devices |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1628045A (en) * | 1926-10-08 | 1927-05-10 | Manhattan Electrical Supply Co | Electronic discharge device |
| US3109712A (en) * | 1960-01-11 | 1963-11-05 | Plessey Co Ltd | Bodies and shapes of carbonaceous materials and processes for their production |
| GB1291221A (en) * | 1968-07-07 | 1972-10-04 | Smith Kenneth C A | Electron probe forming system |
-
1976
- 1976-06-25 GB GB26498/76A patent/GB1517649A/en not_active Expired
- 1976-06-25 DE DE2628584A patent/DE2628584C3/de not_active Expired
- 1976-06-25 US US05/700,024 patent/US4143292A/en not_active Expired - Lifetime
- 1976-06-25 CA CA255,658A patent/CA1083266A/en not_active Expired
- 1976-07-16 FR FR7621762A patent/FR2319967A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2628584A1 (de) | 1976-12-30 |
| GB1517649A (en) | 1978-07-12 |
| FR2319967A1 (fr) | 1977-02-25 |
| FR2319967B1 (OSRAM) | 1979-06-08 |
| US4143292A (en) | 1979-03-06 |
| DE2628584B2 (de) | 1980-07-10 |
| DE2628584C3 (de) | 1981-04-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |