CA1063445A - Electroless plating of peroxide forming metals - Google Patents
Electroless plating of peroxide forming metalsInfo
- Publication number
- CA1063445A CA1063445A CA233,740A CA233740A CA1063445A CA 1063445 A CA1063445 A CA 1063445A CA 233740 A CA233740 A CA 233740A CA 1063445 A CA1063445 A CA 1063445A
- Authority
- CA
- Canada
- Prior art keywords
- metal
- molybdenum
- solution
- plating
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 88
- 239000002184 metal Substances 0.000 title claims abstract description 88
- 238000007772 electroless plating Methods 0.000 title claims abstract description 11
- 150000002978 peroxides Chemical class 0.000 title claims description 26
- 150000002739 metals Chemical class 0.000 title claims description 8
- 238000007747 plating Methods 0.000 claims abstract description 54
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 49
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 43
- 239000011733 molybdenum Substances 0.000 claims abstract description 43
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000008569 process Effects 0.000 claims abstract description 20
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 18
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 10
- 239000010937 tungsten Substances 0.000 claims abstract description 10
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 9
- 239000011651 chromium Substances 0.000 claims abstract description 9
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 7
- 239000010941 cobalt Substances 0.000 claims abstract description 7
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 7
- 150000004972 metal peroxides Chemical class 0.000 claims abstract description 7
- 229910052703 rhodium Inorganic materials 0.000 claims abstract description 7
- 239000010948 rhodium Substances 0.000 claims abstract description 7
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims abstract description 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 20
- 150000001455 metallic ions Chemical class 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 8
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 claims description 7
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 7
- 239000010953 base metal Substances 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 5
- 238000005275 alloying Methods 0.000 claims description 4
- 229910000361 cobalt sulfate Inorganic materials 0.000 claims description 4
- 229940044175 cobalt sulfate Drugs 0.000 claims description 4
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 claims description 4
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 claims description 4
- YWFDDXXMOPZFFM-UHFFFAOYSA-H rhodium(3+);trisulfate Chemical compound [Rh+3].[Rh+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O YWFDDXXMOPZFFM-UHFFFAOYSA-H 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 238000006479 redox reaction Methods 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 2
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical class [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 2
- -1 molybdenum peroxides Chemical class 0.000 claims 4
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 230000003301 hydrolyzing effect Effects 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 230000033116 oxidation-reduction process Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 23
- 230000003647 oxidation Effects 0.000 abstract description 15
- 238000007254 oxidation reaction Methods 0.000 abstract description 15
- 229910052723 transition metal Inorganic materials 0.000 abstract description 11
- 150000003624 transition metals Chemical class 0.000 abstract description 11
- 238000006722 reduction reaction Methods 0.000 abstract description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 5
- 239000001301 oxygen Substances 0.000 abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 abstract description 5
- 230000005012 migration Effects 0.000 abstract description 3
- 238000013508 migration Methods 0.000 abstract description 3
- 239000000243 solution Substances 0.000 description 43
- 238000006243 chemical reaction Methods 0.000 description 34
- 241001279686 Allium moly Species 0.000 description 8
- 230000009467 reduction Effects 0.000 description 7
- 239000011550 stock solution Substances 0.000 description 6
- 230000008030 elimination Effects 0.000 description 5
- 238000003379 elimination reaction Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000002253 acid Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 3
- 239000000908 ammonium hydroxide Substances 0.000 description 3
- 229940043379 ammonium hydroxide Drugs 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000007800 oxidant agent Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 2
- QXYJCZRRLLQGCR-UHFFFAOYSA-N dioxomolybdenum Chemical compound O=[Mo]=O QXYJCZRRLLQGCR-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910015667 MoO4 Inorganic materials 0.000 description 1
- 240000001987 Pyrus communis Species 0.000 description 1
- 241000193803 Therea Species 0.000 description 1
- CAPJTKJLPOPDFA-UHFFFAOYSA-J [Cr](=O)(=O)(O)O.S(=O)(=O)([O-])[O-].[Ni+2] Chemical class [Cr](=O)(=O)(O)O.S(=O)(=O)([O-])[O-].[Ni+2] CAPJTKJLPOPDFA-UHFFFAOYSA-J 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000009089 cytolysis Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- MCWXGJITAZMZEV-UHFFFAOYSA-N dimethoate Chemical compound CNC(=O)CSP(=S)(OC)OC MCWXGJITAZMZEV-UHFFFAOYSA-N 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical class O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
- KMPZCBWYGBGUPB-UHFFFAOYSA-N molybdenum;hydrate Chemical class O.[Mo] KMPZCBWYGBGUPB-UHFFFAOYSA-N 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 238000006213 oxygenation reaction Methods 0.000 description 1
- 230000003405 preventing effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000036647 reaction Effects 0.000 description 1
- 239000012047 saturated solution Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
Landscapes
- Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/499,077 US3935345A (en) | 1974-08-20 | 1974-08-20 | Electroless plating of peroxide forming metals |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1063445A true CA1063445A (en) | 1979-10-02 |
Family
ID=23983720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA233,740A Expired CA1063445A (en) | 1974-08-20 | 1975-08-19 | Electroless plating of peroxide forming metals |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3935345A (esLanguage) |
| JP (1) | JPS5611312B2 (esLanguage) |
| CA (1) | CA1063445A (esLanguage) |
| DE (1) | DE2536516C3 (esLanguage) |
| FR (1) | FR2282482A1 (esLanguage) |
| GB (1) | GB1473763A (esLanguage) |
| SE (1) | SE418306B (esLanguage) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4212907A (en) * | 1979-03-22 | 1980-07-15 | The United States Of America As Represented By The United States Department Of Energy | Pre-treatment for molybdenum or molybdenum-rich alloy articles to be plated |
| US4450187A (en) * | 1982-04-09 | 1984-05-22 | Diamond Shamrock Corporation | Immersion deposited cathodes |
| US4695489A (en) * | 1986-07-28 | 1987-09-22 | General Electric Company | Electroless nickel plating composition and method |
| US5750202A (en) * | 1994-07-19 | 1998-05-12 | Santa Barbara Research Center | Preparation of gold-coated molybdenum articles and articles prepared thereby |
| US5843517A (en) * | 1997-04-30 | 1998-12-01 | Macdermid, Incorporated | Composition and method for selective plating |
| US7204871B2 (en) | 2005-05-24 | 2007-04-17 | Wolverine Plating Corp. | Metal plating process |
| US8198712B2 (en) * | 2006-06-07 | 2012-06-12 | International Rectifier Corporation | Hermetically sealed semiconductor device module |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2317205A (en) * | 1943-04-20 | Method of working metals | ||
| US3741735A (en) * | 1964-01-08 | 1973-06-26 | Atomic Energy Commission | Coating molybdenum with pure gold |
| US3386896A (en) * | 1964-11-05 | 1968-06-04 | Bell Telephone Labor Inc | Electroplasting onto molybdenum surfaces |
| US3505095A (en) * | 1967-04-05 | 1970-04-07 | Atomic Energy Commission | Preplating treatment for maraging steels |
-
1974
- 1974-08-20 US US05/499,077 patent/US3935345A/en not_active Expired - Lifetime
-
1975
- 1975-08-15 GB GB3411575A patent/GB1473763A/en not_active Expired
- 1975-08-16 DE DE2536516A patent/DE2536516C3/de not_active Expired
- 1975-08-19 FR FR7525689A patent/FR2282482A1/fr active Granted
- 1975-08-19 SE SE7509240A patent/SE418306B/xx not_active IP Right Cessation
- 1975-08-19 CA CA233,740A patent/CA1063445A/en not_active Expired
- 1975-08-19 JP JP10055875A patent/JPS5611312B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2536516A1 (de) | 1976-03-04 |
| DE2536516C3 (de) | 1980-03-20 |
| SE7509240L (sv) | 1976-02-23 |
| GB1473763A (en) | 1977-05-18 |
| FR2282482B1 (esLanguage) | 1979-07-27 |
| DE2536516B2 (de) | 1979-07-19 |
| JPS5146527A (esLanguage) | 1976-04-21 |
| SE418306B (sv) | 1981-05-18 |
| JPS5611312B2 (esLanguage) | 1981-03-13 |
| US3935345A (en) | 1976-01-27 |
| FR2282482A1 (fr) | 1976-03-19 |
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