CA1052639A - Deposition method and products - Google Patents

Deposition method and products

Info

Publication number
CA1052639A
CA1052639A CA197,712A CA197712A CA1052639A CA 1052639 A CA1052639 A CA 1052639A CA 197712 A CA197712 A CA 197712A CA 1052639 A CA1052639 A CA 1052639A
Authority
CA
Canada
Prior art keywords
substrate
carbon
deposit
tungsten
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA197,712A
Other languages
English (en)
French (fr)
Inventor
Robert A. Holzl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chemetal Corp
Original Assignee
Chemetal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chemetal Corp filed Critical Chemetal Corp
Application granted granted Critical
Publication of CA1052639A publication Critical patent/CA1052639A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
CA197,712A 1973-05-07 1974-04-17 Deposition method and products Expired CA1052639A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35811073A 1973-05-07 1973-05-07

Publications (1)

Publication Number Publication Date
CA1052639A true CA1052639A (en) 1979-04-17

Family

ID=23408352

Family Applications (1)

Application Number Title Priority Date Filing Date
CA197,712A Expired CA1052639A (en) 1973-05-07 1974-04-17 Deposition method and products

Country Status (5)

Country Link
JP (1) JPS5757552B2 (de)
CA (1) CA1052639A (de)
DE (1) DE2421131C2 (de)
GB (1) GB1465819A (de)
SE (1) SE408716B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5284875U (de) * 1975-12-22 1977-06-24
US4268582A (en) * 1979-03-02 1981-05-19 General Electric Company Boride coated cemented carbide
JPS59110146A (ja) * 1982-12-16 1984-06-26 Toshiba Corp パツケ−ジ形モジユ−ルの外部引出し端子
JPS607759A (ja) * 1983-06-28 1985-01-16 Internatl Rectifier Corp Japan Ltd 半導体装置の製造方法
JPH0278265A (ja) * 1988-09-14 1990-03-19 Nippon Inter Electronics Corp リードフレームおよびそのリードフレームを使用した複合半導体装置
DE4119967C1 (de) * 1991-06-18 1992-09-17 Mtu Muenchen Gmbh

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2887407A (en) * 1957-08-05 1959-05-19 Manufacturers Chemical Corp Preparation of diffusion coatings on metals
US3574672A (en) * 1964-08-05 1971-04-13 Texas Instruments Inc Cvd process for producing tungsten carbide and article of manufacture
US3658577A (en) * 1969-10-01 1972-04-25 Gene F Wakefield Vapor phase deposition of silicide refractory coatings

Also Published As

Publication number Publication date
GB1465819A (en) 1977-03-02
SE408716B (sv) 1979-07-02
JPS5014549A (de) 1975-02-15
JPS5757552B2 (de) 1982-12-04
DE2421131C2 (de) 1983-06-01
DE2421131A1 (de) 1974-11-28

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