CA1022258A - Methode et systeme de positionnement automatique - Google Patents
Methode et systeme de positionnement automatiqueInfo
- Publication number
- CA1022258A CA1022258A CA217,208A CA217208A CA1022258A CA 1022258 A CA1022258 A CA 1022258A CA 217208 A CA217208 A CA 217208A CA 1022258 A CA1022258 A CA 1022258A
- Authority
- CA
- Canada
- Prior art keywords
- positioning system
- automatic positioning
- automatic
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Control Of Position Or Direction (AREA)
- Feeding Of Articles To Conveyors (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Image Processing (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Supply And Installment Of Electrical Components (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US475006A US3903363A (en) | 1974-05-31 | 1974-05-31 | Automatic positioning system and method |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1022258A true CA1022258A (fr) | 1977-12-06 |
Family
ID=23885861
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA217,208A Expired CA1022258A (fr) | 1974-05-31 | 1974-12-31 | Methode et systeme de positionnement automatique |
Country Status (14)
Country | Link |
---|---|
US (1) | US3903363A (fr) |
JP (1) | JPS5711142B2 (fr) |
BE (1) | BE829643A (fr) |
BR (1) | BR7503172A (fr) |
CA (1) | CA1022258A (fr) |
DE (1) | DE2523858C2 (fr) |
ES (1) | ES438079A1 (fr) |
FR (1) | FR2275821A1 (fr) |
GB (1) | GB1509574A (fr) |
HK (1) | HK72979A (fr) |
IL (1) | IL47364A (fr) |
IT (1) | IT1032985B (fr) |
NL (1) | NL183915C (fr) |
SE (1) | SE393880B (fr) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3988535A (en) * | 1975-11-04 | 1976-10-26 | Western Electric Company, Inc. | Automated positioning |
JPS52140278A (en) * | 1976-05-19 | 1977-11-22 | Hitachi Ltd | Position detector |
DE2643809B2 (de) * | 1976-09-29 | 1980-10-09 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Einjustieren eines Körpers |
DE2803653C3 (de) * | 1978-01-27 | 1986-05-28 | Texas Instruments Deutschland Gmbh, 8050 Freising | Ausrichtvorrichtung |
JPS54114182A (en) * | 1978-02-27 | 1979-09-06 | Canon Inc | Alingment device |
JPS54114183A (en) * | 1978-02-27 | 1979-09-06 | Canon Inc | Position matching method |
JPS54114181A (en) * | 1978-02-27 | 1979-09-06 | Canon Inc | Alignment device |
JPS5850420B2 (ja) * | 1978-02-28 | 1983-11-10 | 株式会社新川 | パタ−ン位置合せ装置 |
US4208675A (en) * | 1978-03-20 | 1980-06-17 | Agence Nationale De Valorization De La Recherche (Anvar) | Method and apparatus for positioning an object |
CH643959A5 (de) * | 1978-04-14 | 1984-06-29 | Siemens Ag | Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips. |
JPS5856402B2 (ja) * | 1978-08-30 | 1983-12-14 | 大日本スクリ−ン製造株式会社 | 位置決め用センサ− |
US4253111A (en) * | 1978-09-25 | 1981-02-24 | Gca Corporation | Apparatus for bonding leads to semiconductor chips |
US4233625A (en) * | 1978-11-03 | 1980-11-11 | Teledyne, Inc. | Television monitoring system for automatically aligning semiconductor devices during manufacture |
JPS5588347A (en) * | 1978-12-27 | 1980-07-04 | Fujitsu Ltd | Automatic aligning system |
US4318081A (en) * | 1979-12-19 | 1982-03-02 | Hajime Industries Ltd. | Object inspection system |
US4260979A (en) * | 1979-12-31 | 1981-04-07 | International Business Machines Corporation | Apparatus for sensing non-coded images |
US4316189A (en) * | 1980-05-08 | 1982-02-16 | Westinghouse Electric Corp. | Electromechanical display apparatus |
US4376584A (en) * | 1980-06-02 | 1983-03-15 | Bell Telephone Laboratories, Inc. | Pattern printing including aligning masks and monitoring such alignment |
US4342090A (en) * | 1980-06-27 | 1982-07-27 | International Business Machines Corp. | Batch chip placement system |
JPS58130840A (ja) * | 1982-01-29 | 1983-08-04 | Fuji Electric Co Ltd | 紙葉類搬送装置 |
US4471947A (en) * | 1983-04-19 | 1984-09-18 | Osborne Charles W | Fence Construction |
US4551912A (en) * | 1983-06-30 | 1985-11-12 | International Business Machines Corporation | Highly integrated universal tape bonding |
US4593406A (en) * | 1984-01-16 | 1986-06-03 | The United States Of America As Represented By The United States Department Of Energy | Automatic image acquisition processor and method |
US4604648A (en) * | 1984-10-12 | 1986-08-05 | Kley Victor B | Electronic viewing system for integrated circuit packages |
US4651203A (en) * | 1985-10-29 | 1987-03-17 | At&T Technologies, Inc. | Video controlled article positioning system |
DE3621056A1 (de) * | 1986-06-24 | 1988-01-14 | Polygram Gmbh | Verfahren zum ausrichten der drehlage von drehbaren oder positionieren von verschieblichen gegenstaenden |
US4880309A (en) * | 1987-04-14 | 1989-11-14 | General Signal Corporation | Dark field target design system for alignment of semiconductor wafers |
GB8801691D0 (en) * | 1988-01-26 | 1988-02-24 | Protocol Eng Plc | Film punch registration |
GB9125603D0 (en) * | 1991-12-02 | 1992-01-29 | Gec-Marconi Limited | Optical analysis system and positioning apparatus therefor |
JP3223583B2 (ja) * | 1992-06-29 | 2001-10-29 | 株式会社島津製作所 | マイクロマニピュレータ用操作装置 |
US6587581B1 (en) * | 1997-01-10 | 2003-07-01 | Hitachi, Ltd. | Visual inspection method and apparatus therefor |
DE69838166T2 (de) * | 1998-04-07 | 2007-11-22 | Fujitsu Ltd., Kawasaki | Vorrichtung und Verfahren zum Zusammenbau einer Halbleiteranordnung |
US6331891B1 (en) * | 1998-04-07 | 2001-12-18 | Fujitsu Limited | Apparatus and method for assembling semiconductor device and semiconductor device thus fabricated |
US7141450B2 (en) * | 2002-04-08 | 2006-11-28 | Lucent Technologies Inc. | Flip-chip alignment method |
WO2005105449A1 (fr) * | 2004-05-04 | 2005-11-10 | Sys Tec, S.R.L. | Procede et machine destines a aligner des plaques d'impression souples sur des cylindres d'impression |
US7344273B2 (en) | 2005-03-22 | 2008-03-18 | Binary Works, Inc. | Ring light with user manipulable control |
CN104395209B (zh) * | 2012-06-18 | 2017-09-01 | 富士机械制造株式会社 | 散料供料器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3207904A (en) * | 1962-04-09 | 1965-09-21 | Western Electric Co | Electro-optical article positioning system |
US3497705A (en) * | 1968-02-12 | 1970-02-24 | Itek Corp | Mask alignment system using radial patterns and flying spot scanning |
US3749830A (en) * | 1968-04-09 | 1973-07-31 | Westinghouse Electric Corp | Pattern sensing and positioning system |
US3593286A (en) * | 1968-11-27 | 1971-07-13 | Norman G Altman | Pattern recognition system having electronically controllable aperture shape, scan shape, and scan position |
US3581375A (en) * | 1969-03-07 | 1971-06-01 | Ibm | Method and apparatus for manufacturing integrated circuits |
US3811011A (en) * | 1969-07-08 | 1974-05-14 | Itek Corp | Multiple image registration system |
CA968439A (en) * | 1971-05-26 | 1975-05-27 | Western Electric Company, Incorporated | Video controlled positioning method and apparatus |
US3796497A (en) * | 1971-12-01 | 1974-03-12 | Ibm | Optical alignment method and apparatus |
-
1974
- 1974-05-31 US US475006A patent/US3903363A/en not_active Expired - Lifetime
- 1974-12-31 CA CA217,208A patent/CA1022258A/fr not_active Expired
-
1975
- 1975-05-21 BR BR4060/75A patent/BR7503172A/pt unknown
- 1975-05-22 SE SE7505834A patent/SE393880B/xx not_active IP Right Cessation
- 1975-05-26 IT IT68357/75A patent/IT1032985B/it active
- 1975-05-27 NL NLAANVRAGE7506234,A patent/NL183915C/xx not_active IP Right Cessation
- 1975-05-27 IL IL47364A patent/IL47364A/en unknown
- 1975-05-29 BE BE156833A patent/BE829643A/fr not_active IP Right Cessation
- 1975-05-30 DE DE2523858A patent/DE2523858C2/de not_active Expired
- 1975-05-30 ES ES438079A patent/ES438079A1/es not_active Expired
- 1975-05-30 FR FR7516990A patent/FR2275821A1/fr active Granted
- 1975-05-30 GB GB23675/75A patent/GB1509574A/en not_active Expired
- 1975-05-31 JP JP6486775A patent/JPS5711142B2/ja not_active Expired
-
1979
- 1979-10-18 HK HK729/79A patent/HK72979A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
SE393880B (sv) | 1977-05-23 |
JPS513580A (fr) | 1976-01-13 |
HK72979A (en) | 1979-10-26 |
GB1509574A (en) | 1978-05-04 |
SE7505834L (sv) | 1975-12-01 |
IT1032985B (it) | 1979-06-20 |
BE829643A (fr) | 1975-09-15 |
JPS5711142B2 (fr) | 1982-03-02 |
NL183915C (nl) | 1989-02-16 |
ES438079A1 (es) | 1977-02-01 |
DE2523858C2 (de) | 1984-08-23 |
IL47364A0 (en) | 1975-07-28 |
NL7506234A (nl) | 1975-12-02 |
FR2275821B1 (fr) | 1979-07-06 |
FR2275821A1 (fr) | 1976-01-16 |
BR7503172A (pt) | 1976-05-25 |
IL47364A (en) | 1977-02-28 |
US3903363A (en) | 1975-09-02 |
DE2523858A1 (de) | 1975-12-18 |
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