CA1012658A - Manufacture of an insulated gate field effect transistor - Google Patents

Manufacture of an insulated gate field effect transistor

Info

Publication number
CA1012658A
CA1012658A CA204,805A CA204805A CA1012658A CA 1012658 A CA1012658 A CA 1012658A CA 204805 A CA204805 A CA 204805A CA 1012658 A CA1012658 A CA 1012658A
Authority
CA
Canada
Prior art keywords
manufacture
field effect
effect transistor
insulated gate
gate field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA204,805A
Other languages
English (en)
Inventor
Andrew G.F. Dingwall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of CA1012658A publication Critical patent/CA1012658A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P95/00—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10P14/61—
    • H10W10/012—
    • H10W10/0125—
    • H10W10/13—
CA204,805A 1973-08-06 1974-07-15 Manufacture of an insulated gate field effect transistor Expired CA1012658A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US38566973A 1973-08-06 1973-08-06

Publications (1)

Publication Number Publication Date
CA1012658A true CA1012658A (en) 1977-06-21

Family

ID=23522380

Family Applications (1)

Application Number Title Priority Date Filing Date
CA204,805A Expired CA1012658A (en) 1973-08-06 1974-07-15 Manufacture of an insulated gate field effect transistor

Country Status (12)

Country Link
US (1) US4069577A (index.php)
JP (1) JPS5051276A (index.php)
BE (1) BE818547A (index.php)
BR (1) BR7406340D0 (index.php)
CA (1) CA1012658A (index.php)
DE (1) DE2436517A1 (index.php)
FR (1) FR2240532B1 (index.php)
GB (1) GB1476790A (index.php)
IN (1) IN140846B (index.php)
IT (1) IT1015392B (index.php)
NL (1) NL7410214A (index.php)
SE (1) SE7409993L (index.php)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5075775A (index.php) * 1973-11-06 1975-06-21
JPS5918872B2 (ja) * 1973-12-07 1984-05-01 日本電気株式会社 絶縁ゲ−ト型電界効果半導体装置の製法
JPS5293278A (en) * 1976-01-30 1977-08-05 Matsushita Electronics Corp Manufacture for mos type semiconductor intergrated circuit
JPS52117079A (en) * 1976-03-29 1977-10-01 Oki Electric Ind Co Ltd Preparation of semiconductor device
FR2351502A1 (fr) * 1976-05-14 1977-12-09 Ibm Procede de fabrication de transistors a effet de champ a porte en silicium polycristallin auto-alignee avec les regions source et drain ainsi qu'avec les regions d'isolation de champ encastrees
US4035198A (en) * 1976-06-30 1977-07-12 International Business Machines Corporation Method of fabricating field effect transistors having self-registering electrical connections between gate electrodes and metallic interconnection lines, and fabrication of integrated circuits containing the transistors
US4095251A (en) * 1976-08-19 1978-06-13 International Business Machines Corporation Field effect transistors and fabrication of integrated circuits containing the transistors
JPS5464480A (en) * 1977-10-31 1979-05-24 Nec Corp Semiconductor device
JPS54109784A (en) * 1978-02-16 1979-08-28 Nec Corp Manufacture of semiconductor device
JPS5848936A (ja) * 1981-09-10 1983-03-23 Fujitsu Ltd 半導体装置の製造方法
JPS59123266A (ja) * 1982-12-28 1984-07-17 Toshiba Corp Ｍｉｓトランジスタ及びその製造方法
US5798291A (en) * 1995-03-20 1998-08-25 Lg Semicon Co., Ltd. Method of making a semiconductor device with recessed source and drain

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3691627A (en) * 1970-02-03 1972-09-19 Gen Electric Method of fabricating buried metallic film devices
US3673471A (en) * 1970-10-08 1972-06-27 Fairchild Camera Instr Co Doped semiconductor electrodes for mos type devices
US3761327A (en) * 1971-03-19 1973-09-25 Itt Planar silicon gate mos process
NL7113561A (index.php) * 1971-10-02 1973-04-04
CA1001771A (en) * 1973-01-15 1976-12-14 Fairchild Camera And Instrument Corporation Method of mos transistor manufacture and resulting structure

Also Published As

Publication number Publication date
GB1476790A (en) 1977-06-16
FR2240532B1 (index.php) 1978-08-11
NL7410214A (nl) 1975-02-10
AU7206174A (en) 1976-02-12
DE2436517A1 (de) 1975-03-06
BE818547A (fr) 1974-12-02
IT1015392B (it) 1977-05-10
SE7409993L (index.php) 1975-02-07
FR2240532A1 (index.php) 1975-03-07
IN140846B (index.php) 1976-12-25
BR7406340D0 (pt) 1975-09-09
JPS5051276A (index.php) 1975-05-08
US4069577A (en) 1978-01-24

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