CA1003659A - Capacitive pressure transducer - Google Patents

Capacitive pressure transducer

Info

Publication number
CA1003659A
CA1003659A CA194,737A CA194737A CA1003659A CA 1003659 A CA1003659 A CA 1003659A CA 194737 A CA194737 A CA 194737A CA 1003659 A CA1003659 A CA 1003659A
Authority
CA
Canada
Prior art keywords
pressure transducer
capacitive pressure
capacitive
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA194,737A
Other languages
English (en)
Other versions
CA194737S (en
Inventor
Samuel A. Johnston
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bunker Ramo Corp
Original Assignee
Bunker Ramo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bunker Ramo Corp filed Critical Bunker Ramo Corp
Priority to CA263,082A priority Critical patent/CA1017592A/en
Application granted granted Critical
Publication of CA1003659A publication Critical patent/CA1003659A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B17/00—Sulfur; Compounds thereof
    • C01B17/48—Sulfur dioxide; Sulfurous acid
    • C01B17/50—Preparation of sulfur dioxide
    • C01B17/60—Isolation of sulfur dioxide from gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
CA194,737A 1973-04-16 1974-03-12 Capacitive pressure transducer Expired CA1003659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA263,082A CA1017592A (en) 1973-04-16 1976-10-08 Variable capacitance pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00351664A US3808480A (en) 1973-04-16 1973-04-16 Capacitive pressure transducer

Publications (1)

Publication Number Publication Date
CA1003659A true CA1003659A (en) 1977-01-18

Family

ID=23381826

Family Applications (1)

Application Number Title Priority Date Filing Date
CA194,737A Expired CA1003659A (en) 1973-04-16 1974-03-12 Capacitive pressure transducer

Country Status (11)

Country Link
US (1) US3808480A (ja)
JP (1) JPS503385A (ja)
BE (1) BE812447A (ja)
CA (1) CA1003659A (ja)
DE (1) DE2411212A1 (ja)
FR (1) FR2225739B1 (ja)
GB (1) GB1455375A (ja)
IL (1) IL44231A (ja)
IT (1) IT1007929B (ja)
NL (1) NL7403478A (ja)
SE (1) SE390455B (ja)

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US4040118A (en) * 1975-06-18 1977-08-02 Bunker Ramo Corporation Pressure sensitive transducer
SE7607589L (sv) * 1975-09-24 1977-03-25 Bunker Ramo Anordning for avkenning av tryck
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
JPS52117173A (en) * 1976-03-26 1977-10-01 Terumo Corp Differential pressure detector
US4176557A (en) * 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4202081A (en) * 1976-06-07 1980-05-13 Borg Instruments, Inc. Method of assembling a pressure sensor
US4207604A (en) * 1976-12-02 1980-06-10 Kavlico Corporation Capacitive pressure transducer with cut out conductive plate
US4128006A (en) * 1976-12-13 1978-12-05 Bunker Ramo Corporation Packaging of pressure sensor cells
US4092696A (en) * 1976-12-27 1978-05-30 Borg-Warner Corporation Variable area capacitive pressure transducer with temperature compensation
US4177680A (en) * 1977-10-14 1979-12-11 Bunker Ramo Corporation Dual pressure sensor
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer
US4225632A (en) * 1977-11-11 1980-09-30 Motorola, Inc. Fabrication of capacitive transducers
US4289035A (en) * 1978-02-15 1981-09-15 The Bendix Corporation Compensated capacitive transducer demodulator circuit
NL7802688A (nl) * 1978-03-13 1979-09-17 Philips Nv Inrichting voor het omzetten van akoestische in elektrische trillingen en omgekeerd, voor- zien van tenminste een kondensator elektreet- element aangesloten op een elektronische schakeling.
US4380041A (en) * 1978-09-25 1983-04-12 Motorola Inc. Capacitor pressure transducer with housing
JPS5565128A (en) * 1978-11-09 1980-05-16 Vaisala Oy Pressure gauge
DE2849793C2 (de) * 1978-11-16 1986-01-16 Vaisala Oy, Helsinki Barometer
FR2442438A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre
FR2442437A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre fonde sur l'usage d'une capsule aneroide
US4277814A (en) * 1979-09-04 1981-07-07 Ford Motor Company Semiconductor variable capacitance pressure transducer assembly
US4262532A (en) * 1979-09-13 1981-04-21 General Electric Company Pressure and temperature sensor
CH652823A5 (de) * 1980-03-26 1985-11-29 Bosch Gmbh Robert Weg-frequenz-messgroessenwandler.
JPS56142432A (en) * 1980-04-09 1981-11-06 Hitachi Ltd Electrostatic capacitance type pressure sensor
US4287553A (en) * 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer
US4370890A (en) * 1980-10-06 1983-02-01 Rosemount Inc. Capacitive pressure transducer with isolated sensing diaphragm
US4345299A (en) * 1980-11-03 1982-08-17 Motorola, Inc. Capacitive pressure transducer assembly with improved output lead design
JPS58210534A (ja) * 1982-06-01 1983-12-07 Citizen Watch Co Ltd 圧力検出装置
US4523474A (en) * 1983-08-12 1985-06-18 Borg-Warner Corporation Capacitive pressure sensor
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
US4587851A (en) * 1985-02-26 1986-05-13 Edward Mortberg High vacuum capacitance manometer having Px side open housing
JPS62235536A (ja) * 1986-03-14 1987-10-15 Aisin Seiki Co Ltd 圧力センサ
US4683757A (en) * 1986-03-24 1987-08-04 Motorola, Inc. Axial pressure sensor
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US4785669A (en) * 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
US5155653A (en) * 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
WO1993018381A1 (en) * 1992-03-12 1993-09-16 Industrial Research Limited Pressure sensor and method
JP2815279B2 (ja) * 1993-03-30 1998-10-27 本田技研工業株式会社 圧力センサー
DE19527919C2 (de) * 1995-07-29 2000-01-13 Beck Gmbh Druckmeselemente Druck-Meßeinrichtung
US5818002A (en) * 1996-03-01 1998-10-06 Cts Corporation Pressure change warning switch
DE19612964A1 (de) * 1996-04-01 1997-10-02 Bosch Gmbh Robert Drucksensor und Verfahren zur Herstellung eines Drucksensors
GB9609775D0 (en) * 1996-05-10 1996-07-17 Secr Defence Micromachined accelerometer
US5763787A (en) * 1996-09-05 1998-06-09 Rosemont Inc. Carrier assembly for fluid sensor
ATE268469T1 (de) * 1997-04-21 2004-06-15 Bergen Michael Van Linearer kraftsensor mit zwei schichten und zwei stempeln
US6295875B1 (en) 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US6839546B2 (en) 2002-04-22 2005-01-04 Rosemount Inc. Process transmitter with wireless communication link
WO2004011894A1 (en) * 2002-07-25 2004-02-05 Carpenter Brent L Precise pressure measurement by vibrating an oval conduit along different cross-sectional axes
JP2004192520A (ja) * 2002-12-13 2004-07-08 Korg Inc 押圧位置検出装置
DE10326975A1 (de) * 2003-06-12 2005-01-20 Endress + Hauser Gmbh + Co. Kg Drucksensor mit Feuchteschutz
US8145180B2 (en) * 2004-05-21 2012-03-27 Rosemount Inc. Power generation for process devices
US8160535B2 (en) * 2004-06-28 2012-04-17 Rosemount Inc. RF adapter for field device
US7262693B2 (en) * 2004-06-28 2007-08-28 Rosemount Inc. Process field device with radio frequency communication
US7204162B2 (en) * 2004-11-23 2007-04-17 Delphi Technologies, Inc. Capacitive strain gauge
US7680460B2 (en) * 2005-01-03 2010-03-16 Rosemount Inc. Wireless process field device diagnostics
US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
JP4676000B2 (ja) 2005-06-27 2011-04-27 ローズマウント インコーポレイテッド 動的に調節可能な電力消費量無線周波数通信を備えたフィールド装置
US7347102B2 (en) * 2005-08-10 2008-03-25 Postech Foundation Contact-type electric capacitive displacement sensor
US7379792B2 (en) * 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7308830B2 (en) * 2006-01-26 2007-12-18 Rosemount Inc. Pressure sensor fault detection
DE102007026243A1 (de) * 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7484416B1 (en) 2007-10-15 2009-02-03 Rosemount Inc. Process control transmitter with vibration sensor
WO2009154748A2 (en) * 2008-06-17 2009-12-23 Rosemount Inc. Rf adapter for field device with low voltage intrinsic safety clamping
US8929948B2 (en) * 2008-06-17 2015-01-06 Rosemount Inc. Wireless communication adapter for field devices
US8694060B2 (en) * 2008-06-17 2014-04-08 Rosemount Inc. Form factor and electromagnetic interference protection for process device wireless adapters
WO2009154756A1 (en) 2008-06-17 2009-12-23 Rosemount Inc. Rf adapter for field device with variable voltage drop
CA2726534C (en) * 2008-06-17 2016-03-22 Rosemount Inc. Rf adapter for field device with loop current bypass
US7870791B2 (en) * 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
US9674976B2 (en) * 2009-06-16 2017-06-06 Rosemount Inc. Wireless process communication adapter with improved encapsulation
US8626087B2 (en) * 2009-06-16 2014-01-07 Rosemount Inc. Wire harness for field devices used in a hazardous locations
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US10761524B2 (en) 2010-08-12 2020-09-01 Rosemount Inc. Wireless adapter with process diagnostics
US9310794B2 (en) 2011-10-27 2016-04-12 Rosemount Inc. Power supply for industrial process field device
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9048901B2 (en) 2013-03-15 2015-06-02 Rosemount Inc. Wireless interface within transmitter
JP6265361B2 (ja) * 2014-09-03 2018-01-24 コメットネットワーク シーオー．，エルティーディー． 差圧センサ
CN104655334B (zh) 2015-02-16 2017-05-03 迈尔森电子（天津）有限公司 Mems压力传感器及其形成方法
CN116625326B (zh) * 2023-07-20 2023-10-24 湖南大学 一种用于深海测量的高线性深度计

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2573870A (en) * 1948-03-04 1951-11-06 August H Pfund Manometric gas detector
US2605426A (en) * 1948-10-06 1952-07-29 Parsons C A & Co Ltd Infra-red gas analyzing apparatus
US3405559A (en) * 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer

Also Published As

Publication number Publication date
BE812447A (fr) 1974-07-15
SE390455B (sv) 1976-12-20
IT1007929B (it) 1976-10-30
NL7403478A (ja) 1974-10-18
GB1455375A (en) 1976-11-10
FR2225739B1 (ja) 1978-06-02
IL44231A0 (en) 1974-05-16
DE2411212A1 (de) 1974-10-24
FR2225739A1 (ja) 1974-11-08
AU6574774A (en) 1975-08-21
US3808480A (en) 1974-04-30
IL44231A (en) 1978-04-30
JPS503385A (ja) 1975-01-14

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