BRPI0503903A - cámara de corrosão portátil - Google Patents

cámara de corrosão portátil

Info

Publication number
BRPI0503903A
BRPI0503903A BRPI0503903-7A BRPI0503903A BRPI0503903A BR PI0503903 A BRPI0503903 A BR PI0503903A BR PI0503903 A BRPI0503903 A BR PI0503903A BR PI0503903 A BRPI0503903 A BR PI0503903A
Authority
BR
Brazil
Prior art keywords
corrosion
chamber
portable
substrate
mems substrate
Prior art date
Application number
BRPI0503903-7A
Other languages
English (en)
Inventor
William J Cummings
Brian W Arbuckle
Philip D Floyd
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of BRPI0503903A publication Critical patent/BRPI0503903A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)

Abstract

"CáMARA DE CORROSãO PORTáTIL". Uma câmara de corrosão é configurada para suportar um substrato de MEMS no interior da câmara. A câmara de corrosão está configurada para se movimentar e atar, de forma fácil, a uma estação de corrosão que inclui uma fonte de vapor ou decapante gasoso, uma fonte de gás de purga e/ou uma fonte de vácuo. A câmara de corrosão portátil pode facilitar um processo para corrosão do substrato de MEMS ali contido. Como exemplo, um substrato MEMS em tal câmara de corrosão pode ser corroído por conexão da câmara em uma estação de corrosão e exposição do substrato MEMS a um decapante de modo a corroer o substrato MENS. O substrato pode ser movimentado para a ou da estação de corrosão dentro da câmara de corrosão portátil. Em modalidades preferidas, o substrato MEMS é um modulador interferométrico e o decapante é o XeF~ 2~.
BRPI0503903-7A 2004-09-27 2005-09-27 cámara de corrosão portátil BRPI0503903A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61341704P 2004-09-27 2004-09-27
US11/045,588 US20060065366A1 (en) 2004-09-27 2005-01-28 Portable etch chamber

Publications (1)

Publication Number Publication Date
BRPI0503903A true BRPI0503903A (pt) 2006-05-09

Family

ID=35197914

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0503903-7A BRPI0503903A (pt) 2004-09-27 2005-09-27 cámara de corrosão portátil

Country Status (11)

Country Link
US (1) US20060065366A1 (pt)
EP (1) EP1641027A2 (pt)
JP (1) JP2006099055A (pt)
KR (1) KR20060087379A (pt)
AU (1) AU2005203283A1 (pt)
BR (1) BRPI0503903A (pt)
CA (1) CA2514350A1 (pt)
MX (1) MXPA05009545A (pt)
RU (1) RU2005129925A (pt)
SG (1) SG121043A1 (pt)
TW (1) TW200626480A (pt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI569322B (zh) * 2009-12-02 2017-02-01 史畢茲科技公司 高選擇性蝕刻系統與方法
US10029908B1 (en) * 2016-12-30 2018-07-24 Texas Instruments Incorporated Dielectric cladding of microelectromechanical systems (MEMS) elements for improved reliability

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Also Published As

Publication number Publication date
AU2005203283A1 (en) 2006-04-13
MXPA05009545A (es) 2006-04-18
SG121043A1 (en) 2006-04-26
EP1641027A2 (en) 2006-03-29
CA2514350A1 (en) 2006-03-27
JP2006099055A (ja) 2006-04-13
US20060065366A1 (en) 2006-03-30
RU2005129925A (ru) 2007-04-10
KR20060087379A (ko) 2006-08-02
TW200626480A (en) 2006-08-01

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Legal Events

Date Code Title Description
B11A Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing
B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]