BR8801912A - Processo para formar uma pelicula amorfa que contem silicio sobre um substrato,substrato e dispositivo - Google Patents
Processo para formar uma pelicula amorfa que contem silicio sobre um substrato,substrato e dispositivoInfo
- Publication number
- BR8801912A BR8801912A BR8801912A BR8801912A BR8801912A BR 8801912 A BR8801912 A BR 8801912A BR 8801912 A BR8801912 A BR 8801912A BR 8801912 A BR8801912 A BR 8801912A BR 8801912 A BR8801912 A BR 8801912A
- Authority
- BR
- Brazil
- Prior art keywords
- substrate
- amorpus
- film containing
- containing silicon
- silicon
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 2
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- H01L21/205—
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02425—Conductive materials, e.g. metallic silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Silicon Compounds (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/064,641 US4762808A (en) | 1987-06-22 | 1987-06-22 | Method of forming semiconducting amorphous silicon films from the thermal decomposition of fluorohydridodisilanes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BR8801912A true BR8801912A (pt) | 1989-01-03 |
Family
ID=22057318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR8801912A BR8801912A (pt) | 1987-06-22 | 1988-04-21 | Processo para formar uma pelicula amorfa que contem silicio sobre um substrato,substrato e dispositivo |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4762808A (pt) |
| EP (1) | EP0296702A3 (pt) |
| JP (1) | JPS649614A (pt) |
| KR (1) | KR890001211A (pt) |
| AU (1) | AU610153B2 (pt) |
| BR (1) | BR8801912A (pt) |
| ES (1) | ES2009897A6 (pt) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4762808A (en) * | 1987-06-22 | 1988-08-09 | Dow Corning Corporation | Method of forming semiconducting amorphous silicon films from the thermal decomposition of fluorohydridodisilanes |
| NL8801379A (nl) * | 1988-05-30 | 1989-12-18 | Imec Inter Uni Micro Electr | Werkwijze voor het vervaardigen van een dunne-filmtransistor en een dergelijke dunne-filmtransistor. |
| SE9200555D0 (sv) * | 1992-02-25 | 1992-02-25 | Markpoint Dev Ab | A method of coating a piezoelectric substrate |
| US7540920B2 (en) * | 2002-10-18 | 2009-06-02 | Applied Materials, Inc. | Silicon-containing layer deposition with silicon compounds |
| DE102009056731A1 (de) | 2009-12-04 | 2011-06-09 | Rev Renewable Energy Ventures, Inc. | Halogenierte Polysilane und Polygermane |
| US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
| US10391589B2 (en) | 2015-03-30 | 2019-08-27 | Senju Metal Industry Co., Ltd. | Flux applying device |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2606811A (en) * | 1947-10-10 | 1952-08-12 | Union Carbide & Carbon Corp | Hydrogenation of silicon compounds |
| US4064521A (en) * | 1975-07-28 | 1977-12-20 | Rca Corporation | Semiconductor device having a body of amorphous silicon |
| US4196438A (en) * | 1976-09-29 | 1980-04-01 | Rca Corporation | Article and device having an amorphous silicon containing a halogen and method of fabrication |
| US4079071A (en) * | 1977-03-28 | 1978-03-14 | Union Carbide Corporation | Synthesis of hydrosilanes from methylchloropolysilanes |
| US4217374A (en) * | 1978-03-08 | 1980-08-12 | Energy Conversion Devices, Inc. | Amorphous semiconductors equivalent to crystalline semiconductors |
| US4374182A (en) * | 1980-07-07 | 1983-02-15 | Dow Corning Corporation | Preparation of silicon metal through polymer degradation |
| JPS58500360A (ja) * | 1981-03-11 | 1983-03-10 | クロ−ナ−・コ−ポレイション | 非晶質半導体の方法及び装置 |
| US4459163A (en) * | 1981-03-11 | 1984-07-10 | Chronar Corporation | Amorphous semiconductor method |
| JPS57149465A (en) * | 1981-03-12 | 1982-09-16 | Canon Inc | Formation of accumulated film |
| JPS58219732A (ja) * | 1982-06-16 | 1983-12-21 | Tokyo Inst Of Technol | フツ素含有アモルフアス半導体の製造方法 |
| DE3429899A1 (de) * | 1983-08-16 | 1985-03-07 | Canon K.K., Tokio/Tokyo | Verfahren zur bildung eines abscheidungsfilms |
| JPS60200523A (ja) * | 1984-03-26 | 1985-10-11 | Agency Of Ind Science & Technol | シリコン薄膜の製造法 |
| JPS60249313A (ja) * | 1984-05-24 | 1985-12-10 | Canon Inc | 堆積膜の形成方法 |
| US4762808A (en) * | 1987-06-22 | 1988-08-09 | Dow Corning Corporation | Method of forming semiconducting amorphous silicon films from the thermal decomposition of fluorohydridodisilanes |
-
1987
- 1987-06-22 US US07/064,641 patent/US4762808A/en not_active Expired - Fee Related
-
1988
- 1988-04-08 ES ES8801084A patent/ES2009897A6/es not_active Expired
- 1988-04-18 EP EP88303468A patent/EP0296702A3/en not_active Withdrawn
- 1988-04-19 AU AU14764/88A patent/AU610153B2/en not_active Ceased
- 1988-04-19 JP JP63094706A patent/JPS649614A/ja active Pending
- 1988-04-21 BR BR8801912A patent/BR8801912A/pt unknown
- 1988-04-21 KR KR1019880004517A patent/KR890001211A/ko not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| JPS649614A (en) | 1989-01-12 |
| ES2009897A6 (es) | 1989-10-16 |
| KR890001211A (ko) | 1989-03-18 |
| EP0296702A3 (en) | 1989-08-23 |
| EP0296702A2 (en) | 1988-12-28 |
| AU610153B2 (en) | 1991-05-16 |
| AU1476488A (en) | 1988-12-22 |
| US4762808A (en) | 1988-08-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| HO | Change of classification |
Free format text: INT. CL. 5 C23C 16/22, H01L 21/205, C03C 17/22 |