BR7702421A - Transdutor semicondutor - Google Patents

Transdutor semicondutor

Info

Publication number
BR7702421A
BR7702421A BR7702421A BR7702421A BR7702421A BR 7702421 A BR7702421 A BR 7702421A BR 7702421 A BR7702421 A BR 7702421A BR 7702421 A BR7702421 A BR 7702421A BR 7702421 A BR7702421 A BR 7702421A
Authority
BR
Brazil
Prior art keywords
semiconductor transducer
transducer
semiconductor
Prior art date
Application number
BR7702421A
Other languages
English (en)
Inventor
Y Kurihara
T Kosugi
T Kagami
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of BR7702421A publication Critical patent/BR7702421A/pt

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0002Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00Measuring and testing
    • Y10S73/04Piezoelectric
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49103Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
BR7702421A 1976-04-19 1977-04-15 Transdutor semicondutor BR7702421A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4358176A JPS52127257A (en) 1976-04-19 1976-04-19 Displacement converter

Publications (1)

Publication Number Publication Date
BR7702421A true BR7702421A (pt) 1977-12-20

Family

ID=12667721

Family Applications (1)

Application Number Title Priority Date Filing Date
BR7702421A BR7702421A (pt) 1976-04-19 1977-04-15 Transdutor semicondutor

Country Status (4)

Country Link
US (1) US4151502A (pt)
JP (1) JPS52127257A (pt)
BR (1) BR7702421A (pt)
DE (1) DE2717052C3 (pt)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550668A (en) * 1978-10-06 1980-04-12 Hitachi Ltd Semiconductor pressure converter
JPS5611312A (en) * 1979-07-10 1981-02-04 Hitachi Ltd Semiconductor displacement converter
DE3016348A1 (de) * 1980-04-28 1981-10-29 G.L. Rexroth Gmbh, 8770 Lohr Kraftmessverfahren
JPS58197780A (ja) * 1982-05-14 1983-11-17 Hitachi Ltd 半導体圧力変換器
US5001454A (en) * 1988-09-12 1991-03-19 Kabushiki Kaisha Toyota Chuo Kenkyusho Thin film resistor for strain gauge
US5045827A (en) * 1990-03-28 1991-09-03 Blh Electronics, Inc. Low-force transducer
US5419210A (en) * 1993-03-09 1995-05-30 Blh Electronics, Inc. High capacity weigh module
US5505093A (en) * 1994-11-21 1996-04-09 Brewer Science, Inc. Homogeneously conductive polymer films as strain gauges
JP3465427B2 (ja) * 1995-07-28 2003-11-10 ソニー株式会社 圧電アクチュエーター及びその製造方法
US5934140A (en) * 1996-06-19 1999-08-10 Xerox Corporation Paper property sensing system
US6631646B1 (en) * 1998-02-18 2003-10-14 Honeywell International Inc. Electrically insulated strain gage
US6655218B1 (en) * 1999-05-28 2003-12-02 Fuji Jukogyo Kabushiki Kaisha Composite material and method of controlling damage thereto and damage sensor
US7185545B2 (en) * 2004-12-29 2007-03-06 General Electric Company Instrumentation and method for monitoring change in electric potential to detect crack growth
JP2007255953A (ja) * 2006-03-22 2007-10-04 Hitachi Ltd 力学量測定装置
DE102019129411A1 (de) * 2019-09-12 2021-03-18 Wika Alexander Wiegand Se & Co. Kg Aufnehmerkörper mit einem Messelement und Herstellungsverfahren für einen Aufnehmerkörper

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB923153A (en) * 1960-08-18 1963-04-10 Fairchild Semiconductor Semiconductor strain gauge
US3458345A (en) * 1965-09-09 1969-07-29 Gen Electric Method of making glass-silicon composite bodies
US3451030A (en) * 1966-07-01 1969-06-17 Gen Electric Solder-bonded semiconductor strain gauges
FR2001397A1 (pt) * 1968-02-06 1969-09-26 Matsushita Electric Ind Co Ltd
DE1905667A1 (de) * 1968-02-06 1969-08-28 Matsushita Electric Ind Co Ltd Auf Druck ansprechende Vorrichtung
US4047144A (en) * 1971-06-30 1977-09-06 Becton, Dickinson Electronics Company Transducer
US3753196A (en) * 1971-10-05 1973-08-14 Kulite Semiconductor Products Transducers employing integral protective coatings and supports
US3922705A (en) * 1973-06-04 1975-11-25 Gen Electric Dielectrically isolated integral silicon diaphram or other semiconductor product
US3913391A (en) * 1974-04-22 1975-10-21 Kulite Semiconductor Products Strain gage configurations employing high di-electric strength and efficient strain transmission
US4019388A (en) * 1976-03-11 1977-04-26 Bailey Meter Company Glass to metal seal

Also Published As

Publication number Publication date
DE2717052A1 (de) 1977-11-10
DE2717052C3 (de) 1982-01-07
US4151502A (en) 1979-04-24
DE2717052B2 (de) 1981-04-09
JPS52127257A (en) 1977-10-25

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