BR7604069A - Transdutor de pressao de semicondutor - Google Patents

Transdutor de pressao de semicondutor

Info

Publication number
BR7604069A
BR7604069A BR7604069A BR7604069A BR7604069A BR 7604069 A BR7604069 A BR 7604069A BR 7604069 A BR7604069 A BR 7604069A BR 7604069 A BR7604069 A BR 7604069A BR 7604069 A BR7604069 A BR 7604069A
Authority
BR
Brazil
Prior art keywords
pressure transducer
semiconductor pressure
semiconductor
transducer
pressure
Prior art date
Application number
BR7604069A
Other languages
English (en)
Portuguese (pt)
Inventor
M Shimazoe
K Nakamura
K Yamada
Y Takahashi
Y Matsushita
S Shimada
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of BR7604069A publication Critical patent/BR7604069A/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
BR7604069A 1975-07-04 1976-06-23 Transdutor de pressao de semicondutor BR7604069A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50081778A JPS5217780A (en) 1975-07-04 1975-07-04 Pressure convertor with semi-conductor elements

Publications (1)

Publication Number Publication Date
BR7604069A true BR7604069A (pt) 1977-07-05

Family

ID=13755926

Family Applications (1)

Application Number Title Priority Date Filing Date
BR7604069A BR7604069A (pt) 1975-07-04 1976-06-23 Transdutor de pressao de semicondutor

Country Status (4)

Country Link
US (1) US4065971A (OSRAM)
JP (1) JPS5217780A (OSRAM)
BR (1) BR7604069A (OSRAM)
GB (1) GB1547592A (OSRAM)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113379A (en) * 1978-02-23 1979-09-04 Nec Corp Pressure gauge
JPS54149486A (en) * 1978-05-16 1979-11-22 Toshiba Corp Pressure-sensitive element
DE2841312C2 (de) * 1978-09-22 1985-06-05 Robert Bosch Gmbh, 7000 Stuttgart Monolithischer Halbleiter-Drucksensor und Verfahren zu dessen Herstellung
JPS5550668A (en) * 1978-10-06 1980-04-12 Hitachi Ltd Semiconductor pressure converter
DE3277937D1 (en) * 1982-12-01 1988-02-11 Honeywell Inc Semiconductor pressure transducer
US4527428A (en) * 1982-12-30 1985-07-09 Hitachi, Ltd. Semiconductor pressure transducer
US4658279A (en) * 1983-09-08 1987-04-14 Wisconsin Alumini Research Foundation Velocity saturated strain sensitive semiconductor devices
JPS60258972A (ja) * 1984-06-05 1985-12-20 Fujikura Ltd 半導体圧力センサの温度補償方法
US4713680A (en) * 1986-06-30 1987-12-15 Motorola, Inc. Series resistive network
US5812047A (en) * 1997-02-18 1998-09-22 Exar Corporation Offset-free resistor geometry for use in piezo-resistive pressure sensor
US6247364B1 (en) * 1997-10-27 2001-06-19 Thomas P. Kicher & Co. Acceleration transducer and method
US6142021A (en) * 1998-08-21 2000-11-07 Motorola, Inc. Selectable pressure sensor
US6318183B1 (en) * 1998-12-22 2001-11-20 Motorola, Inc. Multiple element pressure sensor having a selectively pressure sensor range
US6341528B1 (en) 1999-11-12 2002-01-29 Measurement Specialties, Incorporated Strain sensing structure with improved reliability
WO2002061383A1 (en) * 2001-01-31 2002-08-08 Silicon Valley Sensors, Inc. Triangular chip strain sensing structure and corner,edge on a diaphragm
GB2521163A (en) * 2013-12-11 2015-06-17 Melexis Technologies Nv Semiconductor pressure sensor
US10317297B2 (en) 2013-12-11 2019-06-11 Melexis Technologies Nv Semiconductor pressure sensor
EP3032235B1 (en) * 2014-12-10 2017-09-20 Melexis Technologies NV Semiconductor pressure sensor
EP3211394B1 (en) 2016-02-29 2021-03-31 Melexis Technologies NV Semiconductor pressure sensor for harsh media application
EP3260833B1 (en) 2016-06-21 2021-10-27 Melexis Technologies NV Semiconductor sensor assembly for harsh media application
US10260981B2 (en) * 2017-02-06 2019-04-16 Nxp Usa, Inc. Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs
EP3358309B1 (en) 2017-02-06 2019-04-24 Melexis Technologies SA Method and circuit for biasing and readout of resistive sensor structure
US11650110B2 (en) * 2020-11-04 2023-05-16 Honeywell International Inc. Rosette piezo-resistive gauge circuit for thermally compensated measurement of full stress tensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3456226A (en) * 1967-10-27 1969-07-15 Conrac Corp Strain gage configuration
US3513430A (en) * 1968-06-19 1970-05-19 Tyco Laboratories Inc Semiconductor strain gage transducer and method of making same
US3537319A (en) * 1968-07-26 1970-11-03 Gen Electric Silicon diaphragm with optimized integral strain gages
US3772628A (en) * 1972-05-30 1973-11-13 Gen Electric Integral silicon diaphragms for low pressure measurements

Also Published As

Publication number Publication date
US4065971A (en) 1978-01-03
JPS5217780A (en) 1977-02-09
JPS551715B2 (OSRAM) 1980-01-16
GB1547592A (en) 1979-06-20

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