BR112021006501A2 - processo de deposição de vapor químico para preparar um substrato de vidro revestido, e uso de água e opcionalmente oxigênio - Google Patents

processo de deposição de vapor químico para preparar um substrato de vidro revestido, e uso de água e opcionalmente oxigênio

Info

Publication number
BR112021006501A2
BR112021006501A2 BR112021006501A BR112021006501A BR112021006501A2 BR 112021006501 A2 BR112021006501 A2 BR 112021006501A2 BR 112021006501 A BR112021006501 A BR 112021006501A BR 112021006501 A BR112021006501 A BR 112021006501A BR 112021006501 A2 BR112021006501 A2 BR 112021006501A2
Authority
BR
Brazil
Prior art keywords
glass substrate
water
vapor deposition
chemical vapor
deposition process
Prior art date
Application number
BR112021006501A
Other languages
English (en)
Inventor
Rimmer David
Raisbeck Deborah
Leitl Hans-Eckhard
David Sanderson Kevin
John Glynn Mark
Andrew Skinner Paul
Original Assignee
Pilkington Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilkington Group Ltd filed Critical Pilkington Group Ltd
Publication of BR112021006501A2 publication Critical patent/BR112021006501A2/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3441—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising carbon, a carbide or oxycarbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/308—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/228—Other specific oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/31—Pre-treatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Photovoltaic Devices (AREA)

Abstract

processo de deposição de vapor químico para preparar um substrato de vidro revestido, e uso de água e opcionalmente oxigênio. um processo de deposição química de vapor para preparar um substrato de vidro revestido, o dito processo compreendendo pelo menos as seguintes etapas em sequência: a) fornecer um substrato de vidro tendo uma superfície, b) depositar a camada a base de sico e/ou sino na superfície do substrato de vidro, c) expor a camada a base de sico e/ou sino a uma mistura gasosa (i) compreendendo água, e d) depositar subsequentemente uma camada a base de um tco sobre a camada a base de sico e/ou sino.
BR112021006501A 2018-10-08 2019-10-08 processo de deposição de vapor químico para preparar um substrato de vidro revestido, e uso de água e opcionalmente oxigênio BR112021006501A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1816381.6A GB2582886B (en) 2018-10-08 2018-10-08 Process for preparing a coated glass substrate
PCT/GB2019/052845 WO2020074877A1 (en) 2018-10-08 2019-10-08 Process for preparing a coated glass substrate

Publications (1)

Publication Number Publication Date
BR112021006501A2 true BR112021006501A2 (pt) 2021-07-06

Family

ID=64394808

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112021006501A BR112021006501A2 (pt) 2018-10-08 2019-10-08 processo de deposição de vapor químico para preparar um substrato de vidro revestido, e uso de água e opcionalmente oxigênio

Country Status (10)

Country Link
US (1) US11845690B2 (pt)
EP (1) EP3863981B1 (pt)
JP (2) JP2022508601A (pt)
CN (1) CN112955413B (pt)
AU (1) AU2019358314B2 (pt)
BR (1) BR112021006501A2 (pt)
ES (1) ES2971847T3 (pt)
GB (1) GB2582886B (pt)
PL (1) PL3863981T3 (pt)
WO (1) WO2020074877A1 (pt)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1204974A (zh) * 1996-08-13 1999-01-13 利比-欧文斯-福特公司 玻璃涂层
FR2780054B1 (fr) * 1998-06-19 2000-07-21 Saint Gobain Vitrage Procede de depot d'une couche a base d'oxyde metallique sur un substrat verrier, substrat verrier ainsi revetu
JP2005029464A (ja) * 2003-06-20 2005-02-03 Nippon Sheet Glass Co Ltd 薄膜付きガラス板とその製造方法、およびこのガラス板を用いた光電変換装置
US20090091033A1 (en) * 2005-05-27 2009-04-09 Wei Gao Fabrication of metal oxide films
FR2922886B1 (fr) * 2007-10-25 2010-10-29 Saint Gobain Substrat verrier revetu de couches a resistivite amelioree.
MX2010004936A (es) * 2007-11-02 2010-12-21 Agc Flat Glass Na Inc Recubrimiento de oxido conductivo transparente para aplicaciones fotovoltaicas de peliculas delgadas y metodos de fabricar el mismo.
EA025167B1 (ru) * 2009-03-18 2016-11-30 Эй-Джи-Си Флет Гласс Норт Эмерике, Инк. Тонкопленочное покрытие и способ его изготовления
WO2011044325A2 (en) * 2009-10-08 2011-04-14 Stewart Engineers, Inc. Methods of nucleation control in film deposition
FR2956659B1 (fr) * 2010-02-22 2014-10-10 Saint Gobain Substrat verrier revetu de couches a tenue mecanique amelioree
WO2014061612A1 (ja) * 2012-10-17 2014-04-24 旭硝子株式会社 導電性薄膜付きガラス基板、薄膜太陽電池、低放射ガラス基板、導電性薄膜付きガラス基板の製造方法
GB201702168D0 (en) * 2017-02-09 2017-03-29 Pilkington Group Ltd Coated glazing

Also Published As

Publication number Publication date
PL3863981T3 (pl) 2024-03-25
CN112955413B (zh) 2023-10-31
EP3863981A1 (en) 2021-08-18
CN112955413A (zh) 2021-06-11
US20210340059A1 (en) 2021-11-04
WO2020074877A1 (en) 2020-04-16
JP2024109589A (ja) 2024-08-14
GB2582886B (en) 2023-03-29
AU2019358314B2 (en) 2023-12-21
GB2582886A (en) 2020-10-14
GB201816381D0 (en) 2018-11-28
US11845690B2 (en) 2023-12-19
JP2022508601A (ja) 2022-01-19
AU2019358314A1 (en) 2021-05-06
EP3863981B1 (en) 2023-12-06
ES2971847T3 (es) 2024-06-10

Similar Documents

Publication Publication Date Title
SG10201802228YA (en) Selective growth of silicon nitride
TW201612352A (en) Method for hydrophobization of surface of silicon-containing film by ALD
MX2020007502A (es) Estructura de carton con por lo menos una capa de recubrimiento de barrera.
BR112012005997A2 (pt) artigos que incluem um substrato poroso que tem uma camada conformal sobre os mesmos
BRPI0821501B8 (pt) Método para preparação de uma camada de absorção leve de célula solar de filme fino de cobre-índio-gálio-enxofre-selênio.
ATE374168T1 (de) Verfahren zur abscheidung von galliumoxidbeschichtungen auf flachglas
MX2011007156A (es) Sustrato hidrofobo comprendiendo una capa de cebador del tipo oxicarburo de silicio activado por plasma.
BR112014000395A2 (pt) películas de barreira de óxido de metal misto e método de deposição de camada atômica para preparar películas de barreira de óxido de metal misto
CL2018002957A1 (es) Superficies de vidrio recubiertas y método para recubrir un sustrato de vidrio.
BRPI0621069B1 (pt) composição impregnante,substrato poroso e método para revestir pelo menos parcialmente um substrato poroso
BR112016020156A2 (pt) sistema, e, métodos para fabricar e para formar um dispositivo de película ótica fina
MY195436A (en) Coating and Coating Formulation
WO2012069451A3 (en) Thermal gradient chemical vapour deposition apparatus and method
MY180709A (en) Transparent substrate with stacked film and manufacturing method thereof
MX2018009531A (es) Composicion catalizadora multicapa para motores de combustion interna.
EA201490034A1 (ru) Способ получения оконного стекла, содержащего пористый слой
RU2015144306A (ru) Способ подготовки и обработки стальной подложки
RU2010125614A (ru) Элемент горелки и горелка с покрытием из оксида алюминия и способ покрытия элемента горелки
BR112021023168A2 (pt) Substrato revestido
CL2019003123A1 (es) Recubrimientos de baja emisividad, superficies de vidrio que incluyen lo mismo y método para hacer lo mismo.
MY188421A (en) Polymer coatings and methods for depositing polymer coatings
BR112018005853A2 (pt) folha de vidro revestida e meio de fornecimento
EA202192758A1 (ru) Специальное стекло с покрытием для vig в сборе
AR009058A1 (es) Un proceso para aplicar recubrimientos de oxido de indio sobre vidrios planos y los vidrios recubiertos asi obtenidos
EA201370102A1 (ru) Способ покрытия стекла

Legal Events

Date Code Title Description
B06W Patent application suspended after preliminary examination (for patents with searches from other patent authorities) chapter 6.23 patent gazette]