BR0314955A - Sistema de controle de fluxo - Google Patents
Sistema de controle de fluxoInfo
- Publication number
- BR0314955A BR0314955A BR0314955A BR0314955A BR0314955A BR 0314955 A BR0314955 A BR 0314955A BR 0314955 A BR0314955 A BR 0314955A BR 0314955 A BR0314955 A BR 0314955A BR 0314955 A BR0314955 A BR 0314955A
- Authority
- BR
- Brazil
- Prior art keywords
- process fluid
- control system
- flow control
- outlet
- rigid container
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract 10
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/218—Means to regulate or vary operation of device
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Reciprocating Pumps (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Flow Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Sampling And Sample Adjustment (AREA)
- Catching Or Destruction (AREA)
Abstract
"SISTEMA DE CONTROLE DE FLUXO". Descreve-se um sistema de controle de fluxo que inclui um recipiente substancialmente rígido com um reservatório de fluido de processo situado no recipiente rígido em comunicaçao fluida com uma saída. Um elemento móvel e/ou um fluido de trabalho está situado no recipiente rígido, de modo a expelir seletivamente fluido de processo pela saída. Empregando um elemento móvel, o movimento do elemento móvel em uma primeira direção faz com que o fluido de processo escoe para uma entrada, e o movimento do elemento móvel em uma segunda direção faz com que o fluido de processo seja expelido pela saída. Em outras implementações, o fluido de trabalho é medido no interior de um reservatório de fluido de trabalho para comprimir um reservatório de fluido de processo flexível e expelir fluido de processo do mesmo.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/065,275 US7204679B2 (en) | 2002-09-30 | 2002-09-30 | Flow control system |
PCT/US2003/028397 WO2004030860A2 (en) | 2002-09-30 | 2003-09-10 | Flow control system |
Publications (1)
Publication Number | Publication Date |
---|---|
BR0314955A true BR0314955A (pt) | 2005-08-02 |
Family
ID=32028515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR0314955A BR0314955A (pt) | 2002-09-30 | 2003-09-10 | Sistema de controle de fluxo |
Country Status (18)
Country | Link |
---|---|
US (1) | US7204679B2 (pt) |
EP (4) | EP2347858A3 (pt) |
JP (1) | JP4372010B2 (pt) |
KR (1) | KR100649468B1 (pt) |
CN (2) | CN100528485C (pt) |
AR (2) | AR041382A1 (pt) |
AT (1) | ATE485919T1 (pt) |
AU (1) | AU2003266022B2 (pt) |
BR (1) | BR0314955A (pt) |
CA (1) | CA2500543C (pt) |
DE (1) | DE60334712D1 (pt) |
DK (2) | DK1545835T3 (pt) |
HK (2) | HK1086523A1 (pt) |
MX (1) | MXPA05003444A (pt) |
MY (1) | MY135346A (pt) |
PL (3) | PL206361B1 (pt) |
RU (1) | RU2313004C2 (pt) |
WO (1) | WO2004030860A2 (pt) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008526539A (ja) * | 2005-01-18 | 2008-07-24 | 周正才 | 事前混合式研磨材スラリージェット用のブラスト装置 |
US7735563B2 (en) * | 2005-03-10 | 2010-06-15 | Hydril Usa Manufacturing Llc | Pressure driven pumping system |
JP2008539146A (ja) * | 2005-04-25 | 2008-11-13 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | 化学試薬及び組成を保存・分配する装置及びプロセス |
KR100806841B1 (ko) * | 2006-09-11 | 2008-02-22 | 세메스 주식회사 | 슬러리 공급장치에서의 버블 댐퍼 |
EP2155373A4 (en) * | 2007-05-09 | 2014-10-22 | Foresight Proc Llc | SYSTEMS AND METHOD FOR THE MIXTURE AND DISTRIBUTION OF MATERIALS |
TW200939335A (en) * | 2007-12-06 | 2009-09-16 | Advanced Tech Materials | Systems and methods for delivery of fluid-containing process material combinations |
US20100243087A1 (en) * | 2009-03-03 | 2010-09-30 | Millipore Corporation | System and pump apparatus for processing fluid samples |
KR101936536B1 (ko) * | 2009-06-10 | 2019-01-08 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 유체 가공 시스템 및 방법 |
US8308854B2 (en) * | 2009-12-15 | 2012-11-13 | Thermo Finnigan Llc | Helium reclamation systems and methods for a gas chromatograph |
RU2459978C1 (ru) * | 2011-07-26 | 2012-08-27 | Общество с ограниченной ответственностью "Купер" | Насосная установка регулируемая, диафрагменная |
KR20130090209A (ko) * | 2012-02-03 | 2013-08-13 | 삼성전자주식회사 | 기판처리장치 및 기판처리방법 |
CN105188871B (zh) | 2013-03-14 | 2018-01-12 | 生物辐射实验室股份有限公司 | 瓶子加压输送系统 |
US9770804B2 (en) | 2013-03-18 | 2017-09-26 | Versum Materials Us, Llc | Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture |
US9695674B2 (en) * | 2014-04-04 | 2017-07-04 | Onesubsea Ip Uk Limited | Subsea dosing pump |
WO2015172081A1 (en) * | 2014-05-08 | 2015-11-12 | Baker Hughes Incorporated | Oil injection unit |
JP6622578B2 (ja) * | 2015-12-08 | 2019-12-18 | 不二越機械工業株式会社 | ワーク加工装置およびこれに用いる薬液収納バッグ |
CN107096901A (zh) * | 2017-05-02 | 2017-08-29 | 重庆天运汽车配件有限公司 | 一种离心浇铸均匀进液装置 |
US11251047B2 (en) * | 2017-11-13 | 2022-02-15 | Applied Materials, Inc. | Clog detection in a multi-port fluid delivery system |
JP7194996B2 (ja) * | 2019-03-13 | 2022-12-23 | 株式会社松井製作所 | 流体研磨装置 |
JP7407439B2 (ja) * | 2019-10-24 | 2024-01-04 | 兵神装備株式会社 | 流体圧送装置 |
TWI742924B (zh) * | 2020-11-13 | 2021-10-11 | 國立勤益科技大學 | 自動擠膏拋光刀把 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR945469A (fr) | 1946-03-22 | 1949-05-05 | Passch & Larsen Petersen | Procédé pour prélever une quantité déterminée de beurre ou autre matière plastique aspirées dans une cuve et appareil pour la mise en oeuvre de ce procédé |
SU97285A1 (ru) | 1952-09-26 | 1953-11-30 | В.В. Залесский | Насос дл перекачки жидкостей с плохими смазывающими свойствами |
SU125162A1 (ru) | 1959-06-15 | 1959-11-30 | В.М. Данич | Устройство дл подачи абразивных паст в рабочую зону полировального станка |
US3635607A (en) * | 1970-04-20 | 1972-01-18 | Novelty Tool Co Inc | Vacuum pump |
US3756456A (en) * | 1972-05-22 | 1973-09-04 | Graco Inc | Apparatus and method for a metering system |
SU591609A1 (ru) | 1976-04-26 | 1978-02-05 | Московское Научно-Производственное Объединение По Механизированному Строительному Инструменту И Отделочным Машинам (Объединение "Вниисми") | Поршневой растворонасос |
SU723215A2 (ru) | 1978-04-04 | 1980-03-25 | Предприятие П/Я В-8662 | Гидро - или пневмоприводной насос |
SU767528A1 (ru) | 1978-07-06 | 1980-09-30 | Предприятие П/Я В-8644 | Способ непрерывного дозировани жидкости |
US4488853A (en) * | 1980-08-28 | 1984-12-18 | New Process Industries, Inc. | Fluid pressure ratio transformer system |
US4863066A (en) * | 1986-06-02 | 1989-09-05 | Technicon Instruments Corporation | System for dispensing precisely metered quantities of a fluid and method of utilizing the system |
FR2608225B1 (fr) | 1986-12-10 | 1989-02-17 | Imaje Sa | Cellule a multiples fonctions comportant une chambre a volume variable, et circuit d'alimentation fluide d'une tete d'impression a jet d'encre qui en est equipe |
US4950134A (en) * | 1988-12-27 | 1990-08-21 | Cybor Corporation | Precision liquid dispenser |
US5056036A (en) * | 1989-10-20 | 1991-10-08 | Pulsafeeder, Inc. | Computer controlled metering pump |
FR2706857B1 (pt) * | 1993-06-25 | 1995-10-27 | Dussau Distribution Sarl | |
US5753515A (en) * | 1996-07-02 | 1998-05-19 | Eastman Kodak Company | Syringe pump apparatus for remote delivery of reactants |
NL1004637C2 (nl) | 1996-11-28 | 1998-05-29 | Daniel Van Beek | Doseerinrichting. |
US5971722A (en) * | 1997-09-05 | 1999-10-26 | Baxter International Inc | Electrochemical syringe pump having a sealed storage reservoir for a charge transfer medium |
US6293849B1 (en) * | 1997-10-31 | 2001-09-25 | Ebara Corporation | Polishing solution supply system |
US6107203A (en) * | 1997-11-03 | 2000-08-22 | Motorola, Inc. | Chemical mechanical polishing system and method therefor |
US5945346A (en) * | 1997-11-03 | 1999-08-31 | Motorola, Inc. | Chemical mechanical planarization system and method therefor |
US6109881A (en) * | 1998-01-09 | 2000-08-29 | Snodgrass; Ocie T. | Gas driven pump for the dispensing and filtering of process fluid |
US6254453B1 (en) * | 1999-09-30 | 2001-07-03 | International Business Machines Corporation | Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system |
US6544109B1 (en) * | 2000-08-31 | 2003-04-08 | Micron Technology, Inc. | Slurry delivery and planarization systems |
-
2002
- 2002-09-30 US US10/065,275 patent/US7204679B2/en active Active
-
2003
- 2003-09-10 EP EP20100012714 patent/EP2347858A3/en not_active Withdrawn
- 2003-09-10 AU AU2003266022A patent/AU2003266022B2/en not_active Expired
- 2003-09-10 EP EP20100012713 patent/EP2343156B1/en not_active Expired - Lifetime
- 2003-09-10 CN CNB038254808A patent/CN100528485C/zh not_active Expired - Lifetime
- 2003-09-10 PL PL388177A patent/PL206361B1/pl unknown
- 2003-09-10 JP JP2004541523A patent/JP4372010B2/ja not_active Expired - Lifetime
- 2003-09-10 CA CA002500543A patent/CA2500543C/en not_active Expired - Lifetime
- 2003-09-10 DK DK03799281.5T patent/DK1545835T3/da active
- 2003-09-10 RU RU2005113299A patent/RU2313004C2/ru active
- 2003-09-10 EP EP20030799281 patent/EP1545835B1/en not_active Expired - Lifetime
- 2003-09-10 BR BR0314955A patent/BR0314955A/pt not_active Application Discontinuation
- 2003-09-10 CN CN2009100045957A patent/CN101491889B/zh not_active Expired - Lifetime
- 2003-09-10 MX MXPA05003444A patent/MXPA05003444A/es active IP Right Grant
- 2003-09-10 AT AT03799281T patent/ATE485919T1/de not_active IP Right Cessation
- 2003-09-10 PL PL388178A patent/PL206362B1/pl unknown
- 2003-09-10 KR KR1020057005550A patent/KR100649468B1/ko active IP Right Grant
- 2003-09-10 DK DK10012713.3T patent/DK2343156T3/en active
- 2003-09-10 EP EP20080170886 patent/EP2108482A1/en not_active Withdrawn
- 2003-09-10 DE DE60334712T patent/DE60334712D1/de not_active Expired - Lifetime
- 2003-09-10 WO PCT/US2003/028397 patent/WO2004030860A2/en active Search and Examination
- 2003-09-10 PL PL375436A patent/PL206360B1/pl unknown
- 2003-09-24 AR ARP030103480 patent/AR041382A1/es active IP Right Grant
- 2003-09-26 MY MYPI20033686A patent/MY135346A/en unknown
-
2006
- 2006-06-08 HK HK06106579A patent/HK1086523A1/xx not_active IP Right Cessation
- 2006-06-08 HK HK09108929A patent/HK1129628A1/xx not_active IP Right Cessation
-
2009
- 2009-04-24 AR ARP090101466 patent/AR071409A2/es active IP Right Grant
Also Published As
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B07A | Application suspended after technical examination (opinion) [chapter 7.1 patent gazette] | ||
B09B | Patent application refused [chapter 9.2 patent gazette] | ||
B12B | Appeal against refusal [chapter 12.2 patent gazette] |