BR0314955A - Sistema de controle de fluxo - Google Patents

Sistema de controle de fluxo

Info

Publication number
BR0314955A
BR0314955A BR0314955A BR0314955A BR0314955A BR 0314955 A BR0314955 A BR 0314955A BR 0314955 A BR0314955 A BR 0314955A BR 0314955 A BR0314955 A BR 0314955A BR 0314955 A BR0314955 A BR 0314955A
Authority
BR
Brazil
Prior art keywords
process fluid
control system
flow control
outlet
rigid container
Prior art date
Application number
BR0314955A
Other languages
English (en)
Inventor
Matthew G Wheeler
Original Assignee
Emerson Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emerson Electric Co filed Critical Emerson Electric Co
Publication of BR0314955A publication Critical patent/BR0314955A/pt

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0676Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/206Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218Means to regulate or vary operation of device

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Flow Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Catching Or Destruction (AREA)

Abstract

"SISTEMA DE CONTROLE DE FLUXO". Descreve-se um sistema de controle de fluxo que inclui um recipiente substancialmente rígido com um reservatório de fluido de processo situado no recipiente rígido em comunicaçao fluida com uma saída. Um elemento móvel e/ou um fluido de trabalho está situado no recipiente rígido, de modo a expelir seletivamente fluido de processo pela saída. Empregando um elemento móvel, o movimento do elemento móvel em uma primeira direção faz com que o fluido de processo escoe para uma entrada, e o movimento do elemento móvel em uma segunda direção faz com que o fluido de processo seja expelido pela saída. Em outras implementações, o fluido de trabalho é medido no interior de um reservatório de fluido de trabalho para comprimir um reservatório de fluido de processo flexível e expelir fluido de processo do mesmo.
BR0314955A 2002-09-30 2003-09-10 Sistema de controle de fluxo BR0314955A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/065,275 US7204679B2 (en) 2002-09-30 2002-09-30 Flow control system
PCT/US2003/028397 WO2004030860A2 (en) 2002-09-30 2003-09-10 Flow control system

Publications (1)

Publication Number Publication Date
BR0314955A true BR0314955A (pt) 2005-08-02

Family

ID=32028515

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0314955A BR0314955A (pt) 2002-09-30 2003-09-10 Sistema de controle de fluxo

Country Status (18)

Country Link
US (1) US7204679B2 (pt)
EP (4) EP2347858A3 (pt)
JP (1) JP4372010B2 (pt)
KR (1) KR100649468B1 (pt)
CN (2) CN100528485C (pt)
AR (2) AR041382A1 (pt)
AT (1) ATE485919T1 (pt)
AU (1) AU2003266022B2 (pt)
BR (1) BR0314955A (pt)
CA (1) CA2500543C (pt)
DE (1) DE60334712D1 (pt)
DK (2) DK1545835T3 (pt)
HK (2) HK1086523A1 (pt)
MX (1) MXPA05003444A (pt)
MY (1) MY135346A (pt)
PL (3) PL206361B1 (pt)
RU (1) RU2313004C2 (pt)
WO (1) WO2004030860A2 (pt)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008526539A (ja) * 2005-01-18 2008-07-24 周正才 事前混合式研磨材スラリージェット用のブラスト装置
US7735563B2 (en) * 2005-03-10 2010-06-15 Hydril Usa Manufacturing Llc Pressure driven pumping system
JP2008539146A (ja) * 2005-04-25 2008-11-13 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド 化学試薬及び組成を保存・分配する装置及びプロセス
KR100806841B1 (ko) * 2006-09-11 2008-02-22 세메스 주식회사 슬러리 공급장치에서의 버블 댐퍼
EP2155373A4 (en) * 2007-05-09 2014-10-22 Foresight Proc Llc SYSTEMS AND METHOD FOR THE MIXTURE AND DISTRIBUTION OF MATERIALS
TW200939335A (en) * 2007-12-06 2009-09-16 Advanced Tech Materials Systems and methods for delivery of fluid-containing process material combinations
US20100243087A1 (en) * 2009-03-03 2010-09-30 Millipore Corporation System and pump apparatus for processing fluid samples
KR101936536B1 (ko) * 2009-06-10 2019-01-08 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 유체 가공 시스템 및 방법
US8308854B2 (en) * 2009-12-15 2012-11-13 Thermo Finnigan Llc Helium reclamation systems and methods for a gas chromatograph
RU2459978C1 (ru) * 2011-07-26 2012-08-27 Общество с ограниченной ответственностью "Купер" Насосная установка регулируемая, диафрагменная
KR20130090209A (ko) * 2012-02-03 2013-08-13 삼성전자주식회사 기판처리장치 및 기판처리방법
CN105188871B (zh) 2013-03-14 2018-01-12 生物辐射实验室股份有限公司 瓶子加压输送系统
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
US9695674B2 (en) * 2014-04-04 2017-07-04 Onesubsea Ip Uk Limited Subsea dosing pump
WO2015172081A1 (en) * 2014-05-08 2015-11-12 Baker Hughes Incorporated Oil injection unit
JP6622578B2 (ja) * 2015-12-08 2019-12-18 不二越機械工業株式会社 ワーク加工装置およびこれに用いる薬液収納バッグ
CN107096901A (zh) * 2017-05-02 2017-08-29 重庆天运汽车配件有限公司 一种离心浇铸均匀进液装置
US11251047B2 (en) * 2017-11-13 2022-02-15 Applied Materials, Inc. Clog detection in a multi-port fluid delivery system
JP7194996B2 (ja) * 2019-03-13 2022-12-23 株式会社松井製作所 流体研磨装置
JP7407439B2 (ja) * 2019-10-24 2024-01-04 兵神装備株式会社 流体圧送装置
TWI742924B (zh) * 2020-11-13 2021-10-11 國立勤益科技大學 自動擠膏拋光刀把

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR945469A (fr) 1946-03-22 1949-05-05 Passch & Larsen Petersen Procédé pour prélever une quantité déterminée de beurre ou autre matière plastique aspirées dans une cuve et appareil pour la mise en oeuvre de ce procédé
SU97285A1 (ru) 1952-09-26 1953-11-30 В.В. Залесский Насос дл перекачки жидкостей с плохими смазывающими свойствами
SU125162A1 (ru) 1959-06-15 1959-11-30 В.М. Данич Устройство дл подачи абразивных паст в рабочую зону полировального станка
US3635607A (en) * 1970-04-20 1972-01-18 Novelty Tool Co Inc Vacuum pump
US3756456A (en) * 1972-05-22 1973-09-04 Graco Inc Apparatus and method for a metering system
SU591609A1 (ru) 1976-04-26 1978-02-05 Московское Научно-Производственное Объединение По Механизированному Строительному Инструменту И Отделочным Машинам (Объединение "Вниисми") Поршневой растворонасос
SU723215A2 (ru) 1978-04-04 1980-03-25 Предприятие П/Я В-8662 Гидро - или пневмоприводной насос
SU767528A1 (ru) 1978-07-06 1980-09-30 Предприятие П/Я В-8644 Способ непрерывного дозировани жидкости
US4488853A (en) * 1980-08-28 1984-12-18 New Process Industries, Inc. Fluid pressure ratio transformer system
US4863066A (en) * 1986-06-02 1989-09-05 Technicon Instruments Corporation System for dispensing precisely metered quantities of a fluid and method of utilizing the system
FR2608225B1 (fr) 1986-12-10 1989-02-17 Imaje Sa Cellule a multiples fonctions comportant une chambre a volume variable, et circuit d'alimentation fluide d'une tete d'impression a jet d'encre qui en est equipe
US4950134A (en) * 1988-12-27 1990-08-21 Cybor Corporation Precision liquid dispenser
US5056036A (en) * 1989-10-20 1991-10-08 Pulsafeeder, Inc. Computer controlled metering pump
FR2706857B1 (pt) * 1993-06-25 1995-10-27 Dussau Distribution Sarl
US5753515A (en) * 1996-07-02 1998-05-19 Eastman Kodak Company Syringe pump apparatus for remote delivery of reactants
NL1004637C2 (nl) 1996-11-28 1998-05-29 Daniel Van Beek Doseerinrichting.
US5971722A (en) * 1997-09-05 1999-10-26 Baxter International Inc Electrochemical syringe pump having a sealed storage reservoir for a charge transfer medium
US6293849B1 (en) * 1997-10-31 2001-09-25 Ebara Corporation Polishing solution supply system
US6107203A (en) * 1997-11-03 2000-08-22 Motorola, Inc. Chemical mechanical polishing system and method therefor
US5945346A (en) * 1997-11-03 1999-08-31 Motorola, Inc. Chemical mechanical planarization system and method therefor
US6109881A (en) * 1998-01-09 2000-08-29 Snodgrass; Ocie T. Gas driven pump for the dispensing and filtering of process fluid
US6254453B1 (en) * 1999-09-30 2001-07-03 International Business Machines Corporation Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system
US6544109B1 (en) * 2000-08-31 2003-04-08 Micron Technology, Inc. Slurry delivery and planarization systems

Also Published As

Publication number Publication date
EP2347858A2 (en) 2011-07-27
PL206362B1 (pl) 2010-07-30
HK1129628A1 (en) 2009-12-04
MY135346A (en) 2008-03-31
AU2003266022A1 (en) 2004-04-23
US7204679B2 (en) 2007-04-17
PL375436A1 (en) 2005-11-28
RU2313004C2 (ru) 2007-12-20
HK1086523A1 (en) 2006-09-22
AR041382A1 (es) 2005-05-18
DE60334712D1 (de) 2010-12-09
EP2343156B1 (en) 2015-01-28
EP2343156A3 (en) 2012-05-02
PL206360B1 (pl) 2010-07-30
CN100528485C (zh) 2009-08-19
MXPA05003444A (es) 2005-07-05
KR100649468B1 (ko) 2006-11-28
WO2004030860A3 (en) 2004-09-30
DK2343156T3 (en) 2015-04-20
RU2005113299A (ru) 2005-09-20
CN1729082A (zh) 2006-02-01
JP4372010B2 (ja) 2009-11-25
AU2003266022B2 (en) 2007-09-06
EP1545835A2 (en) 2005-06-29
PL206361B1 (pl) 2010-07-30
WO2004030860A2 (en) 2004-04-15
CN101491889A (zh) 2009-07-29
US20040060607A1 (en) 2004-04-01
EP1545835B1 (en) 2010-10-27
ATE485919T1 (de) 2010-11-15
KR20050055737A (ko) 2005-06-13
EP2347858A3 (en) 2012-05-02
EP2343156A2 (en) 2011-07-13
CA2500543A1 (en) 2004-04-15
JP2006501075A (ja) 2006-01-12
DK1545835T3 (da) 2011-01-31
CN101491889B (zh) 2011-03-23
AR071409A2 (es) 2010-06-16
EP2108482A1 (en) 2009-10-14
CA2500543C (en) 2009-03-24

Similar Documents

Publication Publication Date Title
BR0314955A (pt) Sistema de controle de fluxo
DE60324210D1 (de) Mit einem Ventil versehenes intradermales Verabreichungsgerät
BR9504259A (pt) Bomba parao fornecimento de um fluido contido em um frasco elástico
WO2002101474A3 (en) Flow control systems
EP2210987A3 (de) Wascheinrichtung
WO2002001163A3 (en) Feedback control for microfluidic cartridges
PT941433E (pt) Dispositivo anti-retorno
ATE532545T1 (de) Vorrichtung zur injektion von hochviskosem material
BR0003881A (pt) Sistema cirúrgico de ventilação de lìquido e cartucho
GB2433764A (en) Flow diverter
AR042969A1 (es) Sistema microquirurgico oftalmologico
EA200600136A1 (ru) Регулятор потока текучей среды
CA2414097A1 (en) Apparatus for intermittent liquid dispersal
BR0308770A (pt) Cabeçote distribuidor montado em uma haste atuadora oca móvel
BR0109562A (pt) Bomba submarina de injeção de substâncias quìmicas e processo de injeção das mesmas
ATE301745T1 (de) Sanitärgegenstand, insbesondere handbrause, mit einer umschalteinrichtung zur beeinflussung einer flüssigkeitsströmung
ATE488308T1 (de) Vorrichtung zum reinigen und/oder desinfizieren von langgestreckten hohlkörpern, insbesondere von medizinischen schläuchen und kathedern
BRPI0401622A (pt) Conjunto para o condicionamento e a aplicação de um produto fluido e uso de um conjunto
BR0215568A (pt) Dispositivo dosador, e, método para fornecer um dispositivo dosador para um lìquido
DE50214254D1 (de) Auftragsvorrichtung
BR0314691A (pt) Aparelho de aplicação a quente e sob pressão de uma mistura borrachosa sobre uma superfìcie de recepção em movimento relativo em relação ao dito aparelho
WO2002103203A3 (en) Fluid transfer system
BR0315136A (pt) Distribuidor de produto fluido
BR9702933A (pt) Controlador operável para controlar o fluxo de fluido de uma fonte de fluido pressurizado para um dispositivo operado por pressão de fluido
ATE449910T1 (de) Hydraulikaggregat mit einem vorratsbehälter für hydraulik-flüssigkeit und mit einer motor-pumpe- einheit

Legal Events

Date Code Title Description
B07A Application suspended after technical examination (opinion) [chapter 7.1 patent gazette]
B09B Patent application refused [chapter 9.2 patent gazette]
B12B Appeal against refusal [chapter 12.2 patent gazette]