BR0212721A - Sensor de saw de temperatura estável com constantes eláticas de terceira ordem - Google Patents
Sensor de saw de temperatura estável com constantes eláticas de terceira ordemInfo
- Publication number
- BR0212721A BR0212721A BR0212721-0A BR0212721A BR0212721A BR 0212721 A BR0212721 A BR 0212721A BR 0212721 A BR0212721 A BR 0212721A BR 0212721 A BR0212721 A BR 0212721A
- Authority
- BR
- Brazil
- Prior art keywords
- substrate
- temperature
- elastic constants
- order
- variation
- Prior art date
Links
- 239000000758 substrate Substances 0.000 abstract 7
- 238000005259 measurement Methods 0.000 abstract 1
- 238000010897 surface acoustic wave method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
- G01D5/485—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means using magnetostrictive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
- G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/106—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
- Electrophonic Musical Instruments (AREA)
- Measurement Of Force In General (AREA)
Abstract
"SENSOR DE SAW DE TEMPERATURA ESTáVEL COM CONSTANTES ELáSTICAS DE TERCEIRA ORDEM". Um sensor de onda acústica de superfície (SAW) compreende um transdutor (24) provido sobre um substrato (23), onde o transdutor (24) é orientado sobre o substrato (23) de modo que a direção de propagação de onda acústica seja tal que a variação de saída do sensor com a temperatura, associada à variação das constantes elásticas de terceira ordem de substrato com a temperatura, substancialmente igual, mas oposta à soma total da variação de saída do sensor com a temperatura associada ao coeficiente de temperatura linear de substrato de expansão e com as variações com a temperatura das constantes elásticas de terceira ordem não nulas de substrato, as constantes elásticas de primeira ordem de substrato e a densidade de substrato. O efeito de variação de temperatura sobre a saída de sensor, assim, é minimizado. Isso é obtido com um arranjo de 35 graus ou com redes reflexivas inclinadas em um ângulo de 3,1 graus com a normal. Adicionalmente, uma embalagem robusta com um prato é dada. Uma aplicação em particular é a medição de torque.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0124831A GB0124831D0 (en) | 2001-10-16 | 2001-10-16 | Saw sensor with improved temperature stability |
GB0204940A GB2381069A (en) | 2001-10-16 | 2002-03-01 | SAW sensor with improved temperature stability |
PCT/GB2002/004669 WO2003034013A1 (en) | 2001-10-16 | 2002-10-16 | Temperature stable saw sensor with third-order elastic constants |
Publications (1)
Publication Number | Publication Date |
---|---|
BR0212721A true BR0212721A (pt) | 2004-10-05 |
Family
ID=26246664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR0212721-0A BR0212721A (pt) | 2001-10-16 | 2002-10-16 | Sensor de saw de temperatura estável com constantes eláticas de terceira ordem |
Country Status (9)
Country | Link |
---|---|
US (1) | US7202589B2 (pt) |
EP (1) | EP1438555B1 (pt) |
JP (1) | JP2005505775A (pt) |
CN (1) | CN1267715C (pt) |
AT (1) | ATE295533T1 (pt) |
BR (1) | BR0212721A (pt) |
DE (1) | DE60204161T2 (pt) |
TW (1) | TWI251077B (pt) |
WO (1) | WO2003034013A1 (pt) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2864618B1 (fr) * | 2003-12-24 | 2006-03-03 | Temex Sa | Capteur de temperature ou de temperature et de pression interrogeable a distance |
US8015886B2 (en) * | 2004-08-16 | 2011-09-13 | Transense Technologies Plc | Torque measurement within a powertrain |
US7293476B2 (en) * | 2004-08-20 | 2007-11-13 | Honeywell International Inc. | Power sensor module for engine transmission and driveline applications |
GB0421383D0 (en) * | 2004-09-27 | 2004-10-27 | Melexis Nv | Monitoring device |
US7165455B2 (en) | 2004-12-18 | 2007-01-23 | Honeywell International Inc. | Surface acoustic wave sensor methods and systems |
US7347106B2 (en) * | 2005-04-26 | 2008-03-25 | Honeywell International Inc. | Torque sensor with inverted sensing element and integral shaft housing |
GB2426336A (en) * | 2005-05-20 | 2006-11-22 | Transense Technologies Plc | SAW based torque and temperature sensor |
GB0511458D0 (en) * | 2005-06-06 | 2005-07-13 | Melexis Nv | Monitoring device for a rotatable shaft |
US7095198B1 (en) * | 2005-06-16 | 2006-08-22 | Honeywell International Inc. | Speed sensor for a power sensor module |
US20070028692A1 (en) * | 2005-08-05 | 2007-02-08 | Honeywell International Inc. | Acoustic wave sensor packaging for reduced hysteresis and creep |
US20070028700A1 (en) * | 2005-08-08 | 2007-02-08 | Liu James Z | Acoustic wave torque sensor |
US7395724B2 (en) * | 2005-08-22 | 2008-07-08 | Honeywell International Inc. | Torque sensor packaging systems and methods |
US7389682B2 (en) * | 2006-03-17 | 2008-06-24 | Gm Global Technology Operations, Inc. | Method and apparatus for engine torque sensing |
US20080196478A1 (en) * | 2007-02-20 | 2008-08-21 | Honeywell International Inc. | Transition metals doped zeolites for saw based CO2 gas sensor applications |
GB2450168B (en) * | 2007-06-15 | 2012-03-07 | Transense Technologies Plc | A SAW torque and temperature sensor with improved temperature sensitivity |
JP2009109495A (ja) * | 2007-10-29 | 2009-05-21 | Schott Ag | ひずみセンサ用パッケージ |
US8132314B2 (en) * | 2008-10-29 | 2012-03-13 | Honeywell International Inc. | Method and system for packaging and mounting surface acoustic wave sensor elements to a flex plate |
US9408537B2 (en) * | 2008-11-14 | 2016-08-09 | At&T Intellectual Property I, Lp | System and method for performing a diagnostic analysis of physiological information |
GB2480628A (en) * | 2010-05-25 | 2011-11-30 | Horstman Defence Systems Ltd | A suspension unit for use on a tracked vehicle including a load sensor |
KR101711204B1 (ko) * | 2010-10-29 | 2017-03-13 | 삼성전자주식회사 | 단일입력 다중출력 표면탄성파 디바이스 |
DE102010056053B4 (de) * | 2010-12-23 | 2014-12-18 | Epcos Ag | Drehmomentsensor und Anordnung mit einem Gegenstand und einem Drehmomentsensor |
US20120165616A1 (en) * | 2010-12-27 | 2012-06-28 | Nir Geva | Portable monitoring unit and a method for monitoring a monitored person |
CN102288339A (zh) * | 2011-05-04 | 2011-12-21 | 北京理工大学 | 温度、振动自补偿的无源无线声表面波扭矩传感器 |
US9673777B2 (en) * | 2011-11-17 | 2017-06-06 | Transense Technologies Plc | Quartz substrate orientations for compact monolithic differential temperature sensor, and sensors using same |
GB2508186B (en) | 2012-11-22 | 2017-09-20 | Transense Tech Plc | SAW sensor arrangements |
JP5833612B2 (ja) * | 2013-01-21 | 2015-12-16 | 株式会社日本自動車部品総合研究所 | トルクセンサ及びその製造方法 |
DE102013209262A1 (de) | 2013-05-17 | 2014-11-20 | Robert Bosch Gmbh | Motorisch und mit Muskelkraft betreibbares Fahrzeug mit verbessertem Drehmomentsensor |
CN103728070A (zh) * | 2014-01-10 | 2014-04-16 | 中国船舶重工集团公司第七0四研究所 | 自动补偿温度和弯矩影响的扭矩测试系统 |
DE102014218699A1 (de) * | 2014-09-17 | 2016-03-17 | Continental Teves Ag & Co. Ohg | Batteriesensor basierend auf akustischen Oberflächenwellen |
JP6360428B2 (ja) * | 2014-11-17 | 2018-07-18 | 株式会社Soken | トルクセンサ |
US10005551B2 (en) | 2015-07-06 | 2018-06-26 | General Electric Company | Passive wireless sensors for rotary machines |
CN105716759A (zh) * | 2016-02-02 | 2016-06-29 | 上海交通大学 | 基于表面横波的转轴扭矩测量装置 |
US10450863B2 (en) | 2016-06-02 | 2019-10-22 | General Electric Company | Turbine engine shaft torque sensing |
CN106840056A (zh) * | 2016-12-28 | 2017-06-13 | 电子科技大学 | 一种双声表面波应变传感器及其设计方法 |
CN106895803A (zh) * | 2017-02-20 | 2017-06-27 | 电子科技大学 | 一种利用两个声表面波谐振器分离温度影响的装置及方法 |
CN107289883B (zh) * | 2017-07-25 | 2019-09-03 | 中国科学院声学研究所 | 一种差分式谐振器型的无线无源声表面波应变传感器 |
US11621694B2 (en) * | 2018-12-06 | 2023-04-04 | Texas Instruments Incorporated | Lamb wave resonator-based torque sensor |
FR3094484B1 (fr) * | 2019-03-29 | 2021-07-16 | Frecnsys | Dispositif résonateur |
DE102020104135B4 (de) * | 2020-02-18 | 2023-09-14 | Thyssenkrupp Ag | OFW-Drehmomentsensor für eine Lenkwelle einer elektromechanischen Hilfskraftlenkung eines Kraftfahrzeuges |
FR3114875B1 (fr) * | 2020-10-01 | 2023-01-20 | Frecnsys | Dispositif à résonateurs |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1449841A (en) * | 1973-04-09 | 1976-09-15 | Mullard Ltd | Oscillators |
US4323809A (en) * | 1979-12-19 | 1982-04-06 | The United States Of America As Represented By The Secretary Of The Air Force | Surface acoustic wave substrate having orthogonal temperature compensated propagation directions and device applications |
US4325038A (en) * | 1980-09-26 | 1982-04-13 | Bell Telephone Laboratories, Incorporated | SAW Resonator filters with improved temperature stability |
US4434383A (en) * | 1981-02-09 | 1984-02-28 | Motorola Inc. | Temperature stable surface acoustic wave device |
US4609843A (en) * | 1983-01-27 | 1986-09-02 | The United States Of America As Represented By The Secretary Of The Air Force | Temperature compensated berlinite for surface acoustic wave devices |
US4602182A (en) * | 1984-05-25 | 1986-07-22 | The United States Of America As Represented By The Secretary Of The Air Force | X33 cut quartz for temperature compensated SAW devices |
US4661738A (en) * | 1985-09-26 | 1987-04-28 | Crystal Technology, Inc. | Compensation techniques for temperature effects and non-uniform amplitude distributions in saw devices |
GB9004822D0 (en) * | 1990-03-03 | 1990-04-25 | Lonsdale Anthony | Method and apparatus for measuring torque |
US5895996A (en) * | 1994-09-29 | 1999-04-20 | Seiko Epson Corporation | Saw device |
GB2358927A (en) | 1999-11-01 | 2001-08-08 | Transense Technologies Plc | Torque measurement using single Surface Acoustic Wave (SAW) device |
-
2002
- 2002-10-16 AT AT02801409T patent/ATE295533T1/de not_active IP Right Cessation
- 2002-10-16 CN CNB028203755A patent/CN1267715C/zh not_active Expired - Lifetime
- 2002-10-16 WO PCT/GB2002/004669 patent/WO2003034013A1/en active IP Right Grant
- 2002-10-16 DE DE60204161T patent/DE60204161T2/de not_active Expired - Lifetime
- 2002-10-16 BR BR0212721-0A patent/BR0212721A/pt not_active Application Discontinuation
- 2002-10-16 US US10/492,724 patent/US7202589B2/en not_active Expired - Lifetime
- 2002-10-16 EP EP02801409A patent/EP1438555B1/en not_active Expired - Lifetime
- 2002-10-16 JP JP2003536702A patent/JP2005505775A/ja active Pending
- 2002-12-26 TW TW091137480A patent/TWI251077B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
ATE295533T1 (de) | 2005-05-15 |
TWI251077B (en) | 2006-03-11 |
TW200305009A (en) | 2003-10-16 |
WO2003034013A1 (en) | 2003-04-24 |
US20050001511A1 (en) | 2005-01-06 |
JP2005505775A (ja) | 2005-02-24 |
CN1571919A (zh) | 2005-01-26 |
DE60204161T2 (de) | 2005-11-17 |
EP1438555B1 (en) | 2005-05-11 |
DE60204161D1 (de) | 2005-06-16 |
EP1438555A1 (en) | 2004-07-21 |
CN1267715C (zh) | 2006-08-02 |
US7202589B2 (en) | 2007-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B11A | Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing | ||
B11Y | Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette] |