BE902115A - Transducteur de pression capacitif linearise. - Google Patents

Transducteur de pression capacitif linearise.

Info

Publication number
BE902115A
BE902115A BE0/214788A BE214788A BE902115A BE 902115 A BE902115 A BE 902115A BE 0/214788 A BE0/214788 A BE 0/214788A BE 214788 A BE214788 A BE 214788A BE 902115 A BE902115 A BE 902115A
Authority
BE
Belgium
Prior art keywords
linearized
resting
pressure transducer
detection
capacitive pressure
Prior art date
Application number
BE0/214788A
Other languages
English (en)
Inventor
S J Carusillo
Original Assignee
Johnson Service Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Johnson Service Co filed Critical Johnson Service Co
Publication of BE902115A publication Critical patent/BE902115A/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Ce transducteur (10) comprend un organe de base (21) reposant sur un subtrat isolant (11), un organe de détection (25) reposant sur un second isolant (13) et un organe de référence (27) reposant également sur le second substrat qui est, de plus, parallèle au premier et en est espacé. Les organes de détection et de référence, isolés entre eux, forment avec l'organe de base deux condensateurs dont les capacités dépendant de la pression sont telles que la linéarité des signaux de sortie du circuit transducteur est assurée. Les organes de détection et de référence comportent chacun une pluralité de segments intercalés entre eux.
BE0/214788A 1984-04-10 1985-04-04 Transducteur de pression capacitif linearise. BE902115A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/598,727 US4542436A (en) 1984-04-10 1984-04-10 Linearized capacitive pressure transducer

Publications (1)

Publication Number Publication Date
BE902115A true BE902115A (fr) 1985-10-04

Family

ID=24396673

Family Applications (1)

Application Number Title Priority Date Filing Date
BE0/214788A BE902115A (fr) 1984-04-10 1985-04-04 Transducteur de pression capacitif linearise.

Country Status (10)

Country Link
US (1) US4542436A (fr)
JP (1) JPS6140529A (fr)
AU (1) AU3967485A (fr)
BE (1) BE902115A (fr)
CA (1) CA1227354A (fr)
DE (1) DE3511367A1 (fr)
FR (1) FR2562663A1 (fr)
GB (1) GB2157444A (fr)
NL (1) NL8500815A (fr)
ZA (1) ZA852233B (fr)

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US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7680460B2 (en) * 2005-01-03 2010-03-16 Rosemount Inc. Wireless process field device diagnostics
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US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
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US7944008B2 (en) * 2007-04-23 2011-05-17 Sierra Scientific Instruments, Llc Suspended membrane pressure sensing array
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
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JP5554328B2 (ja) 2008-06-17 2014-07-23 ローズマウント インコーポレイテッド 本質安全の低電圧クランプ回路を備えるフィールド装置用ｒｆアダプタ
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US9674976B2 (en) 2009-06-16 2017-06-06 Rosemount Inc. Wireless process communication adapter with improved encapsulation
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US10761524B2 (en) 2010-08-12 2020-09-01 Rosemount Inc. Wireless adapter with process diagnostics
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JP2020041880A (ja) * 2018-09-10 2020-03-19 アズビル株式会社 圧力センサ
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Also Published As

Publication number Publication date
US4542436A (en) 1985-09-17
JPS6140529A (ja) 1986-02-26
AU3967485A (en) 1985-10-17
CA1227354A (fr) 1987-09-29
FR2562663A1 (fr) 1985-10-11
DE3511367A1 (de) 1985-10-24
NL8500815A (nl) 1985-11-01
GB8508859D0 (en) 1985-05-09
GB2157444A (en) 1985-10-23
ZA852233B (en) 1986-05-28

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