DE3882241T2 - Feinteilekollektoranordnung für Vakuumpumpen. - Google Patents

Feinteilekollektoranordnung für Vakuumpumpen.

Info

Publication number
DE3882241T2
DE3882241T2 DE88101379T DE3882241T DE3882241T2 DE 3882241 T2 DE3882241 T2 DE 3882241T2 DE 88101379 T DE88101379 T DE 88101379T DE 3882241 T DE3882241 T DE 3882241T DE 3882241 T2 DE3882241 T2 DE 3882241T2
Authority
DE
Germany
Prior art keywords
vacuum pumps
fine part
collector arrangement
part collector
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88101379T
Other languages
English (en)
Other versions
DE3882241D1 (de
Inventor
Fumio Naruse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Application granted granted Critical
Publication of DE3882241D1 publication Critical patent/DE3882241D1/de
Publication of DE3882241T2 publication Critical patent/DE3882241T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16—Filtration; Moisture separation
DE88101379T 1987-02-02 1988-02-01 Feinteilekollektoranordnung für Vakuumpumpen. Expired - Fee Related DE3882241T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62020382A JPH0710322B2 (ja) 1987-02-02 1987-02-02 真空ポンプ用微粒子収集装置

Publications (2)

Publication Number Publication Date
DE3882241D1 DE3882241D1 (de) 1993-08-19
DE3882241T2 true DE3882241T2 (de) 1993-10-28

Family

ID=12025487

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88101379T Expired - Fee Related DE3882241T2 (de) 1987-02-02 1988-02-01 Feinteilekollektoranordnung für Vakuumpumpen.

Country Status (4)

Country Link
US (1) US4832715A (de)
EP (1) EP0277615B1 (de)
JP (1) JPH0710322B2 (de)
DE (1) DE3882241T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5072592A (en) * 1990-06-26 1991-12-17 Smc Corporation Gas cleaner
US6156107A (en) * 1996-11-13 2000-12-05 Tokyo Electron Limited Trap apparatus
JP3991375B2 (ja) * 1996-11-13 2007-10-17 東京エレクトロン株式会社 トラップ装置
GB2319191B (en) * 1996-11-15 2000-09-27 Boris Zachar Gorbunov A particulate matter concentrator
GB2339398B (en) * 1998-07-10 2002-05-01 Notetry Ltd Apparatus and method for concentrating gasborne particles in a portion of a gas stream
US6666905B2 (en) * 1998-10-16 2003-12-23 Midwest Research Institute Thermoelectric particle precipitator and method using same for collecting particles from fluid streams
WO2000023165A1 (en) * 1998-10-16 2000-04-27 Midwest Research Institute Thermoelectric particle precipitator and method using same for collecting particles from fluid streams
GB2350804A (en) * 1999-06-12 2000-12-13 Johnson Matthey Plc Removing particulate matter from gas by thermophoresis and combustion
DE19934932B4 (de) † 1999-07-26 2011-06-30 MAN Truck & Bus AG, 80995 Verfahren und Vorrichtung zur Abscheidung von Feinstpartikeln aus dem Abgas von Brennkraftmaschinen
US6328442B1 (en) 2000-01-31 2001-12-11 Hewlett-Packard Company Particulate filtering muffler
JP2008082285A (ja) * 2006-09-28 2008-04-10 Techno Takatsuki Co Ltd エアポンプの集塵機構
KR100806271B1 (ko) * 2007-07-24 2008-02-22 주식회사 엠아이 반도체 반응부산물 트랩장치
US10655219B1 (en) * 2009-04-14 2020-05-19 Goodrich Corporation Containment structure for creating composite structures
US10689753B1 (en) * 2009-04-21 2020-06-23 Goodrich Corporation System having a cooling element for densifying a substrate
US10295489B2 (en) 2016-09-12 2019-05-21 Ecolab Usa Inc. Deposit monitor
US10816285B2 (en) 2017-02-24 2020-10-27 Ecolab Usa Inc. Thermoelectric deposit monitor
US11953458B2 (en) 2019-03-14 2024-04-09 Ecolab Usa Inc. Systems and methods utilizing sensor surface functionalization
CN111644820B (zh) * 2020-06-18 2021-10-08 北京通嘉鼎元科技有限公司 定子主体的加工方法、泵体组件及其装配方法和真空泵

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT179403B (de) * 1948-12-10 1954-08-25 Alpenlaendischer Zentralver Zu Einrichtung zur Abscheidung von Staub aus Gasen, insbesondere Luft
US2833370A (en) * 1951-01-12 1958-05-06 Arkla Air Conditioning Corp Air cleaning and conditioning by thermal precipitation
US3411270A (en) * 1964-02-26 1968-11-19 Cornelius Co Method and means for dispensing coffee beverage
US4391617A (en) * 1978-09-15 1983-07-05 Way Peter F Process for the recovery of vaporized sublimates from gas streams
US4515629A (en) * 1981-02-12 1985-05-07 United Technologies Corporation Degassing metal powder
US4497641A (en) * 1983-11-18 1985-02-05 Colorado School Of Mines Apparatus and method for dust control by condensation enlargement
US4675031A (en) * 1985-08-19 1987-06-23 Sinnar Abbas M Phoretic enhanced-gravity particulate removal system

Also Published As

Publication number Publication date
US4832715A (en) 1989-05-23
EP0277615B1 (de) 1993-07-14
EP0277615A2 (de) 1988-08-10
DE3882241D1 (de) 1993-08-19
EP0277615A3 (en) 1989-08-30
JPH0710322B2 (ja) 1995-02-08
JPS63190614A (ja) 1988-08-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee