BE858959A - Procede pour fabriquer des regions implantees dans un substrat - Google Patents
Procede pour fabriquer des regions implantees dans un substratInfo
- Publication number
- BE858959A BE858959A BE181126A BE181126A BE858959A BE 858959 A BE858959 A BE 858959A BE 181126 A BE181126 A BE 181126A BE 181126 A BE181126 A BE 181126A BE 858959 A BE858959 A BE 858959A
- Authority
- BE
- Belgium
- Prior art keywords
- substrate
- regions implanted
- manufacturing regions
- manufacturing
- implanted
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/061—Gettering-armorphous layers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762642599 DE2642599A1 (de) | 1976-09-22 | 1976-09-22 | Verfahren zur herstellung von implantierten gebieten in einem substrat |
Publications (1)
Publication Number | Publication Date |
---|---|
BE858959A true BE858959A (fr) | 1978-01-16 |
Family
ID=5988545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE181126A BE858959A (fr) | 1976-09-22 | 1977-09-22 | Procede pour fabriquer des regions implantees dans un substrat |
Country Status (8)
Country | Link |
---|---|
US (1) | US4137457A (fr) |
JP (1) | JPS5339857A (fr) |
BE (1) | BE858959A (fr) |
DE (1) | DE2642599A1 (fr) |
FR (1) | FR2365881A1 (fr) |
GB (1) | GB1544051A (fr) |
IT (1) | IT1086095B (fr) |
NL (1) | NL7710359A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4278475A (en) * | 1979-01-04 | 1981-07-14 | Westinghouse Electric Corp. | Forming of contoured irradiated regions in materials such as semiconductor bodies by nuclear radiation |
JPS60117644A (ja) * | 1983-11-30 | 1985-06-25 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2815401B2 (ja) * | 1989-06-02 | 1998-10-27 | 株式会社 シミズ | 浸漬はんだめつき浴 |
GB9225270D0 (en) * | 1992-12-03 | 1993-01-27 | Gec Ferranti Defence Syst | Depositing different materials on a substrate |
FR2775797B1 (fr) * | 1998-03-04 | 2000-03-31 | Commissariat Energie Atomique | Dispositif et procede de formation de motifs de lithographie utilisant un interferometre |
US20130114773A1 (en) * | 2011-11-08 | 2013-05-09 | Alexander R. Vaucher | Superconducting neutron source |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2741704A (en) * | 1953-06-22 | 1956-04-10 | High Voltage Engineering Corp | Irradiation method and apparatus |
US3434894A (en) * | 1965-10-06 | 1969-03-25 | Ion Physics Corp | Fabricating solid state devices by ion implantation |
US3445926A (en) * | 1967-02-28 | 1969-05-27 | Electro Optical Systems Inc | Production of semiconductor devices by use of ion beam implantation |
US3761721A (en) * | 1972-07-06 | 1973-09-25 | Trw Inc | Matter wave interferometric apparatus |
-
1976
- 1976-09-22 DE DE19762642599 patent/DE2642599A1/de not_active Withdrawn
-
1977
- 1977-08-17 US US05/825,248 patent/US4137457A/en not_active Expired - Lifetime
- 1977-09-06 FR FR7726942A patent/FR2365881A1/fr active Granted
- 1977-09-20 JP JP11314977A patent/JPS5339857A/ja active Pending
- 1977-09-21 IT IT27790/77A patent/IT1086095B/it active
- 1977-09-21 GB GB39311/77A patent/GB1544051A/en not_active Expired
- 1977-09-21 NL NL7710359A patent/NL7710359A/xx not_active Application Discontinuation
- 1977-09-22 BE BE181126A patent/BE858959A/fr unknown
Also Published As
Publication number | Publication date |
---|---|
GB1544051A (en) | 1979-04-11 |
DE2642599A1 (de) | 1978-03-23 |
NL7710359A (nl) | 1978-03-28 |
FR2365881B1 (fr) | 1980-04-25 |
FR2365881A1 (fr) | 1978-04-21 |
US4137457A (en) | 1979-01-30 |
IT1086095B (it) | 1985-05-28 |
JPS5339857A (en) | 1978-04-12 |
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