BE840072A - Procede pour la fabrication d'un condensateur a couche mince en tantale - Google Patents
Procede pour la fabrication d'un condensateur a couche mince en tantaleInfo
- Publication number
- BE840072A BE840072A BE165591A BE165591A BE840072A BE 840072 A BE840072 A BE 840072A BE 165591 A BE165591 A BE 165591A BE 165591 A BE165591 A BE 165591A BE 840072 A BE840072 A BE 840072A
- Authority
- BE
- Belgium
- Prior art keywords
- manufacturing
- thin film
- film capacitor
- tantalum thin
- tantalum
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 229910052715 tantalum Inorganic materials 0.000 title 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
- H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2513858A DE2513858C3 (de) | 1975-03-27 | 1975-03-27 | Verfahren zur Herstellung eines Tantal-Dünnschichtkondensators |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE840072A true BE840072A (fr) | 1976-09-27 |
Family
ID=5942662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE165591A BE840072A (fr) | 1975-03-27 | 1976-03-26 | Procede pour la fabrication d'un condensateur a couche mince en tantale |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US4058445A (fr) |
| JP (1) | JPS51121172A (fr) |
| AT (1) | AT363569B (fr) |
| BE (1) | BE840072A (fr) |
| CH (1) | CH604353A5 (fr) |
| DE (1) | DE2513858C3 (fr) |
| DK (1) | DK132676A (fr) |
| FR (1) | FR2305839A1 (fr) |
| GB (1) | GB1544506A (fr) |
| IT (1) | IT1058510B (fr) |
| NL (1) | NL7603137A (fr) |
| SE (1) | SE412662B (fr) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5654207A (en) * | 1903-02-03 | 1997-08-05 | Sharp Kabushiki Kaisha | Method of making two-terminal nonlinear device and liquid crystal apparatus including the same |
| US4410867A (en) * | 1978-12-28 | 1983-10-18 | Western Electric Company, Inc. | Alpha tantalum thin film circuit device |
| US4251326A (en) * | 1978-12-28 | 1981-02-17 | Western Electric Company, Inc. | Fabricating an RC network utilizing alpha tantalum |
| EP0024863B1 (fr) * | 1979-08-31 | 1983-05-25 | Fujitsu Limited | Capacité à couches minces de tantale et procédé pour sa fabrication |
| US4488340A (en) * | 1981-02-27 | 1984-12-18 | Illinois Tool Works Inc. | Apparatus for making capacitive structures |
| US5221449A (en) * | 1990-10-26 | 1993-06-22 | International Business Machines Corporation | Method of making Alpha-Ta thin films |
| JPH0819516B2 (ja) * | 1990-10-26 | 1996-02-28 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 薄膜状のアルファＴａを形成するための方法および構造 |
| US5316893A (en) * | 1991-01-03 | 1994-05-31 | Lueder Ernst | Method of producing electronic switching element |
| US5414588A (en) * | 1993-09-20 | 1995-05-09 | The Regents Of The University Of California | High performance capacitors using nano-structure multilayer materials fabrication |
| US6447838B1 (en) * | 1993-12-10 | 2002-09-10 | Symetrix Corporation | Integrated circuit capacitors with barrier layer and process for making the same |
| JP3929513B2 (ja) * | 1995-07-07 | 2007-06-13 | ローム株式会社 | 誘電体キャパシタおよびその製造方法 |
| US5872696A (en) * | 1997-04-09 | 1999-02-16 | Fujitsu Limited | Sputtered and anodized capacitors capable of withstanding exposure to high temperatures |
| US6395148B1 (en) | 1998-11-06 | 2002-05-28 | Lexmark International, Inc. | Method for producing desired tantalum phase |
| US7335552B2 (en) * | 2002-05-15 | 2008-02-26 | Raytheon Company | Electrode for thin film capacitor devices |
| US8407871B2 (en) | 2009-07-06 | 2013-04-02 | Delphi Technologies, Inc. | Method of manufacturing a shapeable short-resistant capacitor |
| US8665059B2 (en) | 2011-11-18 | 2014-03-04 | Avx Corporation | High frequency resistor |
| CN104988358A (zh) * | 2015-07-22 | 2015-10-21 | 宁波工程学院 | 一种薄膜电阻材料及其制备方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3275915A (en) * | 1966-09-27 | Beta tantalum thin-film capacitors | ||
| US3274025A (en) * | 1963-12-13 | 1966-09-20 | Corning Glass Works | Method of forming an electrical capacitor |
| IL26086A (en) * | 1965-08-17 | 1970-07-19 | Western Electric Co | Thin-film capacitors using beta tantalum oxide and method for their production |
| US3544434A (en) * | 1968-10-29 | 1970-12-01 | Ronald R Giller | Thick film capactors for miniaturized circuitry |
| US3607679A (en) * | 1969-05-05 | 1971-09-21 | Bell Telephone Labor Inc | Method for the fabrication of discrete rc structure |
| US3664931A (en) * | 1970-07-27 | 1972-05-23 | Dieter Gerstenberg | Method for fabrication of thin film capacitor |
| US3718565A (en) * | 1970-11-27 | 1973-02-27 | Bell Telephone Labor Inc | Technique for the fabrication of discrete rc structure |
| BE791139A (fr) * | 1972-01-14 | 1973-03-01 | Western Electric Co | Procede pour le depot de beta-tantale dope par l'azote |
-
1975
- 1975-03-27 DE DE2513858A patent/DE2513858C3/de not_active Expired
-
1976
- 1976-01-27 CH CH96276A patent/CH604353A5/xx not_active IP Right Cessation
- 1976-01-28 AT AT0059676A patent/AT363569B/de not_active IP Right Cessation
- 1976-02-27 SE SE7602900A patent/SE412662B/xx unknown
- 1976-03-16 GB GB10432/76A patent/GB1544506A/en not_active Expired
- 1976-03-24 IT IT21518/76A patent/IT1058510B/it active
- 1976-03-24 FR FR7608508A patent/FR2305839A1/fr active Granted
- 1976-03-25 DK DK132676A patent/DK132676A/da unknown
- 1976-03-25 NL NL7603137A patent/NL7603137A/xx not_active Application Discontinuation
- 1976-03-26 BE BE165591A patent/BE840072A/fr not_active IP Right Cessation
- 1976-03-26 US US05/670,827 patent/US4058445A/en not_active Expired - Lifetime
- 1976-03-26 JP JP51034113A patent/JPS51121172A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| AT363569B (de) | 1981-08-10 |
| IT1058510B (it) | 1982-05-10 |
| DE2513858B2 (de) | 1980-09-25 |
| NL7603137A (nl) | 1976-09-29 |
| JPS51121172A (en) | 1976-10-22 |
| SE7602900L (sv) | 1976-09-28 |
| US4058445A (en) | 1977-11-15 |
| DE2513858A1 (de) | 1976-09-30 |
| ATA59676A (de) | 1981-01-15 |
| SE412662B (sv) | 1980-03-10 |
| GB1544506A (en) | 1979-04-19 |
| FR2305839B1 (fr) | 1981-02-13 |
| CH604353A5 (fr) | 1978-09-15 |
| DK132676A (da) | 1976-09-28 |
| FR2305839A1 (fr) | 1976-10-22 |
| DE2513858C3 (de) | 1981-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RE | Patent lapsed |
Owner name: SIEMENS A.G. Effective date: 19840326 |