BE780423A - Procede de fabrication de circuits integres au silicium - Google Patents

Procede de fabrication de circuits integres au silicium

Info

Publication number
BE780423A
BE780423A BE780423A BE780423A BE780423A BE 780423 A BE780423 A BE 780423A BE 780423 A BE780423 A BE 780423A BE 780423 A BE780423 A BE 780423A BE 780423 A BE780423 A BE 780423A
Authority
BE
Belgium
Prior art keywords
manufacturing
integrated circuits
silicon integrated
silicon
circuits
Prior art date
Application number
BE780423A
Other languages
English (en)
French (fr)
Inventor
Cadelec
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of BE780423A publication Critical patent/BE780423A/xx

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/18—Diffusion lifetime killers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
BE780423A 1971-03-09 1972-03-09 Procede de fabrication de circuits integres au silicium BE780423A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7108025A FR2128164B1 (enExample) 1971-03-09 1971-03-09

Publications (1)

Publication Number Publication Date
BE780423A true BE780423A (fr) 1972-07-03

Family

ID=9073164

Family Applications (1)

Application Number Title Priority Date Filing Date
BE780423A BE780423A (fr) 1971-03-09 1972-03-09 Procede de fabrication de circuits integres au silicium

Country Status (4)

Country Link
BE (1) BE780423A (enExample)
FR (1) FR2128164B1 (enExample)
GB (1) GB1380143A (enExample)
IT (1) IT952930B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262336A (en) * 1986-03-21 1993-11-16 Advanced Power Technology, Inc. IGBT process to produce platinum lifetime control
EP0675527B1 (en) * 1994-03-30 1999-11-10 Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno Manufacturing process for obtaining bipolar transistors with controlled storage time

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3590471A (en) * 1969-02-04 1971-07-06 Bell Telephone Labor Inc Fabrication of insulated gate field-effect transistors involving ion implantation

Also Published As

Publication number Publication date
GB1380143A (enExample) 1975-01-08
FR2128164B1 (enExample) 1973-11-30
IT952930B (it) 1973-07-30
FR2128164A1 (enExample) 1972-10-20

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