BE775800A - Thin film resistances/contacts prodn - by electrodeposition and etching - Google Patents

Thin film resistances/contacts prodn - by electrodeposition and etching

Info

Publication number
BE775800A
BE775800A BE775800A BE775800A BE775800A BE 775800 A BE775800 A BE 775800A BE 775800 A BE775800 A BE 775800A BE 775800 A BE775800 A BE 775800A BE 775800 A BE775800 A BE 775800A
Authority
BE
Belgium
Prior art keywords
substrate
contacts
etching
prodn
electrodeposition
Prior art date
Application number
BE775800A
Other languages
Dutch (nl)
Original Assignee
Cobar Electronic Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cobar Electronic Nv filed Critical Cobar Electronic Nv
Priority to BE775800A priority Critical patent/BE775800A/en
Publication of BE775800A publication Critical patent/BE775800A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/14—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by chemical deposition
    • H01C17/16—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by chemical deposition using electric current

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

Resistance and contacts are formed on a substrate by electrodepositing the resistance layer on the substrate, and selectivity etching the resistance layer. Pref. the substrate is first roughened and sensitised by immersing in a HCl soln. of tin chloride. The sensitised substrate is activated, pref. with a HCl soln. of palladium chloride. The substrate is then washed and the resistance layer is electrodeposited. The resistance material is Ni, Cr, Ta, Ta nitride, Sn oxide etc. The layers are firmly bonded and cannot be easily removed.
BE775800A 1971-11-25 1971-11-25 Thin film resistances/contacts prodn - by electrodeposition and etching BE775800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BE775800A BE775800A (en) 1971-11-25 1971-11-25 Thin film resistances/contacts prodn - by electrodeposition and etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE775800A BE775800A (en) 1971-11-25 1971-11-25 Thin film resistances/contacts prodn - by electrodeposition and etching

Publications (1)

Publication Number Publication Date
BE775800A true BE775800A (en) 1972-03-16

Family

ID=3858918

Family Applications (1)

Application Number Title Priority Date Filing Date
BE775800A BE775800A (en) 1971-11-25 1971-11-25 Thin film resistances/contacts prodn - by electrodeposition and etching

Country Status (1)

Country Link
BE (1) BE775800A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0112245A3 (en) * 1982-12-15 1984-07-25 Sfernice Societe Francaise De L'electro-Resistance Process for producing an electric circuit adapted for igniting a pyrotechnical device, and circuit thus produced

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0112245A3 (en) * 1982-12-15 1984-07-25 Sfernice Societe Francaise De L'electro-Resistance Process for producing an electric circuit adapted for igniting a pyrotechnical device, and circuit thus produced

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