BE770550A - Agencement de diffusion de matieres de dopage dans des rondelles de matiere semiconductrice - Google Patents

Agencement de diffusion de matieres de dopage dans des rondelles de matiere semiconductrice

Info

Publication number
BE770550A
BE770550A BE770550A BE770550A BE770550A BE 770550 A BE770550 A BE 770550A BE 770550 A BE770550 A BE 770550A BE 770550 A BE770550 A BE 770550A BE 770550 A BE770550 A BE 770550A
Authority
BE
Belgium
Prior art keywords
washers
semiconductor material
doping
diffusion arrangement
diffusion
Prior art date
Application number
BE770550A
Other languages
English (en)
French (fr)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of BE770550A publication Critical patent/BE770550A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
BE770550A 1970-07-27 1971-07-27 Agencement de diffusion de matieres de dopage dans des rondelles de matiere semiconductrice BE770550A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702037173 DE2037173A1 (de) 1970-07-27 1970-07-27 Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial

Publications (1)

Publication Number Publication Date
BE770550A true BE770550A (fr) 1972-01-27

Family

ID=5778005

Family Applications (1)

Application Number Title Priority Date Filing Date
BE770550A BE770550A (fr) 1970-07-27 1971-07-27 Agencement de diffusion de matieres de dopage dans des rondelles de matiere semiconductrice

Country Status (9)

Country Link
JP (1) JPS4915102B1 (ja)
BE (1) BE770550A (ja)
CA (1) CA932481A (ja)
CH (1) CH561082A5 (ja)
DE (1) DE2037173A1 (ja)
FR (1) FR2103051A5 (ja)
GB (1) GB1312226A (ja)
NL (1) NL7107778A (ja)
SE (1) SE385785B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3951587A (en) * 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components
JPS57143428A (en) * 1981-02-27 1982-09-04 High Frequency Heattreat Co Ltd Induction heating and hardening method

Also Published As

Publication number Publication date
SE385785B (sv) 1976-07-26
FR2103051A5 (ja) 1972-04-07
NL7107778A (ja) 1972-01-31
DE2037173A1 (de) 1972-02-03
JPS4915102B1 (ja) 1974-04-12
GB1312226A (en) 1973-04-04
CA932481A (en) 1973-08-21
CH561082A5 (ja) 1975-04-30

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