BE768158A - Procede permettant de determiner la resistance par carre ou unegrandeurliee a la resistance par carre, en particulier lors de la fabrication d'un dispositif semiconducteur, ainsi qu'un dispositif demesure pour l'application de ce procede - Google Patents
Procede permettant de determiner la resistance par carre ou unegrandeurliee a la resistance par carre, en particulier lors de la fabrication d'un dispositif semiconducteur, ainsi qu'un dispositif demesure pour l'application de ce procedeInfo
- Publication number
- BE768158A BE768158A BE768158A BE768158A BE768158A BE 768158 A BE768158 A BE 768158A BE 768158 A BE768158 A BE 768158A BE 768158 A BE768158 A BE 768158A BE 768158 A BE768158 A BE 768158A
- Authority
- BE
- Belgium
- Prior art keywords
- square
- square resistance
- determining
- manufacturing
- well
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2637—Circuits therefor for testing other individual devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7008274A NL7008274A (zh) | 1970-06-06 | 1970-06-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE768158A true BE768158A (fr) | 1971-12-06 |
Family
ID=19810258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE768158A BE768158A (fr) | 1970-06-06 | 1971-06-04 | Procede permettant de determiner la resistance par carre ou unegrandeurliee a la resistance par carre, en particulier lors de la fabrication d'un dispositif semiconducteur, ainsi qu'un dispositif demesure pour l'application de ce procede |
Country Status (8)
Country | Link |
---|---|
US (1) | US3735254A (zh) |
JP (1) | JPS5221351B1 (zh) |
AU (1) | AU2943171A (zh) |
BE (1) | BE768158A (zh) |
DE (1) | DE2125456C3 (zh) |
FR (1) | FR2094093B1 (zh) |
GB (1) | GB1354777A (zh) |
NL (1) | NL7008274A (zh) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4967568A (zh) * | 1972-11-02 | 1974-07-01 | ||
US4179652A (en) * | 1978-02-21 | 1979-12-18 | Teradyne, Inc. | Analyzing electrical circuit boards |
JPS54112396A (en) * | 1978-02-22 | 1979-09-03 | Ube Ind Ltd | Production of high purity anhydrous magnesium chloride |
US4178543A (en) * | 1978-02-23 | 1979-12-11 | Teradyne, Inc. | Analyzing electrical circuit boards |
DE2808902C3 (de) * | 1978-03-02 | 1980-12-18 | Mahle Gmbh, 7000 Stuttgart | Verfahren zur zerstörungsfreien Prüfung der Primär-Silizium-Verteilung an der Oberfläche von Werkstücken aus siliziumhaltigen Aluminiumlegierungen |
US4232262A (en) * | 1978-10-12 | 1980-11-04 | Emo George C | Connector contact terminal contamination probe |
US4218653A (en) * | 1978-10-12 | 1980-08-19 | Bell Telephone Laboratories, Incorporated | Connector contact contamination probe |
US4646009A (en) * | 1982-05-18 | 1987-02-24 | Ade Corporation | Contacts for conductivity-type sensors |
US4703252A (en) * | 1985-02-22 | 1987-10-27 | Prometrix Corporation | Apparatus and methods for resistivity testing |
US4876430A (en) * | 1988-07-25 | 1989-10-24 | General Electric Company | Preweld test method |
DE3828552C2 (de) * | 1988-08-23 | 1994-10-13 | Karl Deutsch Pruef Und Mesgera | Verfahren und Vorrichtung zur Rißtiefenmessung |
US4893086A (en) * | 1989-01-24 | 1990-01-09 | Shrewsbury Junior R | Bar-to-bar armature tester |
US5166627A (en) * | 1991-05-30 | 1992-11-24 | The United States Of America As Represented By The United States Department Of Energy | Method and apparatus for remote tube crevice detection by current and voltage probe resistance measurement |
DE4231392A1 (de) * | 1992-09-19 | 1994-03-24 | Daimler Benz Ag | Verfahren zur Bestimmung der elektronischen Eigenschaften von Halbleiterschichtstrukturen |
WO1994011745A1 (en) * | 1992-11-10 | 1994-05-26 | David Cheng | Method and apparatus for measuring film thickness |
US5691648A (en) * | 1992-11-10 | 1997-11-25 | Cheng; David | Method and apparatus for measuring sheet resistance and thickness of thin films and substrates |
US5495178A (en) * | 1992-11-10 | 1996-02-27 | Cheng; David | Method and apparatus for measuring film thickness |
JP3922728B2 (ja) * | 1993-02-01 | 2007-05-30 | 住友電気工業株式会社 | 金属被覆超電導線の製造方法および電解研磨装置 |
ATE519119T1 (de) * | 2002-01-07 | 2011-08-15 | Capres As | Elektrisches rückkopplungs-detektionssystem für mehrpunktsonden |
DE10258366A1 (de) * | 2002-12-12 | 2004-07-08 | Endress + Hauser Wetzer Gmbh + Co Kg | Verfahren und Vorrichtung zur Widerstandsmessung eines temperaturabhängigen Widerstandselements |
US7212016B2 (en) * | 2003-04-30 | 2007-05-01 | The Boeing Company | Apparatus and methods for measuring resistance of conductive layers |
US20050225345A1 (en) * | 2004-04-08 | 2005-10-13 | Solid State Measurements, Inc. | Method of testing semiconductor wafers with non-penetrating probes |
DE102004055181B3 (de) * | 2004-11-16 | 2006-05-11 | X-Fab Semiconductor Foundries Ag | Verfahren und Anordnung zur elektrischen Messung der Dicke von Halbleiterschichten |
US7372584B2 (en) * | 2005-04-11 | 2008-05-13 | Rudolph Technologies, Inc. | Dual photo-acoustic and resistivity measurement system |
EP1775594A1 (en) | 2005-10-17 | 2007-04-18 | Capres A/S | Eliminating in-line positional errors for four-point resistance measurement |
US7268571B1 (en) * | 2006-03-20 | 2007-09-11 | Texas Instruments Incorporated | Method for validating and monitoring automatic test equipment contactor |
EP2498081A1 (en) * | 2011-03-08 | 2012-09-12 | Capres A/S | Single-position hall effect measurements |
SG191251A1 (en) | 2010-12-21 | 2013-07-31 | Capres As | Single-position hall effect measurements |
EP2469271A1 (en) * | 2010-12-21 | 2012-06-27 | Capres A/S | Single-position Hall effect measurements |
US9030219B2 (en) | 2012-03-01 | 2015-05-12 | Kla-Tencor Corporation | Variable pressure four-point coated probe pin device and method |
TWI500903B (zh) * | 2014-03-12 | 2015-09-21 | Ind Tech Res Inst | 管壁厚度量測模組及應用其之管壁厚度量測方法 |
FR3028957B1 (fr) * | 2014-11-24 | 2017-09-29 | Commissariat Energie Atomique | Procede de mesure de la resistance d'une couche conductrice recouverte |
JP6504133B2 (ja) * | 2016-08-25 | 2019-04-24 | 信越半導体株式会社 | 抵抗率標準サンプルの製造方法及びエピタキシャルウェーハの抵抗率測定方法 |
RU173990U1 (ru) * | 2017-05-12 | 2017-09-25 | Акционерное общество "Научно-производственное предприятие "Пульсар" | Устройство с четырехзондовой головкой |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI12A (fi) * | 1847-09-30 | Tröskmaskin | ||
US3456186A (en) * | 1966-10-31 | 1969-07-15 | Collins Radio Co | Circuit for measuring sheet resistivity including an a.c. current source and average reading d.c. voltmeter switchably connected to pairs of a four probe array |
US3609537A (en) * | 1969-04-01 | 1971-09-28 | Ibm | Resistance standard |
US3611125A (en) * | 1969-06-04 | 1971-10-05 | Sylvania Electric Prod | Apparatus for measuring electrical resistance |
-
1970
- 1970-06-06 NL NL7008274A patent/NL7008274A/xx unknown
-
1971
- 1971-05-22 DE DE2125456A patent/DE2125456C3/de not_active Expired
- 1971-05-31 AU AU29431/71A patent/AU2943171A/en not_active Expired
- 1971-06-03 JP JP46038316A patent/JPS5221351B1/ja active Pending
- 1971-06-03 US US00149533A patent/US3735254A/en not_active Expired - Lifetime
- 1971-06-03 GB GB1874471*[A patent/GB1354777A/en not_active Expired
- 1971-06-04 BE BE768158A patent/BE768158A/xx unknown
- 1971-06-07 FR FR7120413A patent/FR2094093B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
AU2943171A (en) | 1972-12-07 |
NL7008274A (zh) | 1971-12-08 |
DE2125456A1 (de) | 1971-12-16 |
FR2094093B1 (zh) | 1976-03-19 |
US3735254A (en) | 1973-05-22 |
FR2094093A1 (zh) | 1972-02-04 |
DE2125456C3 (de) | 1980-11-13 |
JPS5221351B1 (zh) | 1977-06-09 |
DE2125456B2 (de) | 1980-03-27 |
JPS467366A (zh) | 1971-12-21 |
GB1354777A (en) | 1974-06-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
BE768158A (fr) | Procede permettant de determiner la resistance par carre ou unegrandeurliee a la resistance par carre, en particulier lors de la fabrication d'un dispositif semiconducteur, ainsi qu'un dispositif demesure pour l'application de ce procede | |
BE769731A (fr) | Procede permettant la fabrication d'un dispositif semiconducteur, et dispositif semiconducteur ainsi obtenu | |
BE774600A (fr) | Procede pour la polymerisation selective d'alpha-olefines | |
BE752897A (fr) | Procede permettant la fabrication d'un dispositif semiconducteur, et dispositif semiconducteur ainsi obtenu | |
BE747045A (fr) | Dispositif doseur, en particulier pour des installations de traitement d'eau | |
BE769732A (fr) | Procede permettant la fabrication d'un dispositif semiconducteur, et dispositif semiconducteur ainsi obtenu | |
BE775615A (fr) | Procede permettant la fabrication d'un dispositif semiconducteur et dispositif semiconducteur ainsi fabrique | |
BE750150A (fr) | Procede pour l'obtention de polyurethanes | |
BE752728A (fr) | Procede de fabrication d'acier | |
BE756176A (fr) | Procede et appareil pour determiner le profil d'objets, d'objets en verre en particulier | |
BE759548R (fr) | Procede et dispositif pour la fabrication continue de | |
IT959352B (it) | Metodo per la produzione di conglo merato asfaltico miscelato in im pianti di asfaltatura | |
BE760504A (fr) | Procede pour la preparation de chlore | |
BE758645A (fr) | Procede permettant la fabrication d'anodes rotatives pour tubesa rayonsx | |
FR1428362A (fr) | Procédé et dispositif pour fabriquer des corps de remplissage de tours ou des colonnes utilisées dans des traitements chimiques ou physiques, ainsi que les colonnes ainsi obtenues | |
BE744684A (fr) | Dispositif pour la fabrication de lingots | |
BE755029A (fr) | Procede pour la preparation du 1,3-diacetoxy-2-methylene- propane | |
BE755851A (fr) | Dispositif pour le decriquage des surfaces de blocs bruts, billettes, brames ou pieces similaires | |
CH557354A (fr) | Procede de preparation d'une indolo-(1,2-c)-quinazoline. | |
BE754023A (fr) | Procede pour la fabrication de polyamines | |
BE749026A (fr) | Procede pour la preparation de 5,6-dihydro-2h-thiopyrane -3-carboxaldehyde | |
BR7104730D0 (pt) | Aperfeicoamento em processo de producao de polimero ou copolimero de acrilonitrila | |
BE759102A (fr) | Procede de fabrication d'halogenures de bore | |
IT1048882B (it) | Procedimento per migliorare le proprieta dei turaccioli e la loro resistenza contro la formazione di funghi | |
FR2073210A5 (fr) | Procede et dispositif pour determiner la temperature lors de mesures de viscosites |