BE764314A - Appareil et procede de croissance cristalline verticale en phase liquide - Google Patents
Appareil et procede de croissance cristalline verticale en phase liquideInfo
- Publication number
- BE764314A BE764314A BE764314A BE764314A BE764314A BE 764314 A BE764314 A BE 764314A BE 764314 A BE764314 A BE 764314A BE 764314 A BE764314 A BE 764314A BE 764314 A BE764314 A BE 764314A
- Authority
- BE
- Belgium
- Prior art keywords
- liquid phase
- crystalline growth
- vertical crystalline
- vertical
- growth
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/061—Tipping system, e.g. by rotation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/08—Heating of the reaction chamber or the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/10—Controlling or regulating
- C30B19/106—Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1992970A | 1970-03-16 | 1970-03-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE764314A true BE764314A (fr) | 1971-09-16 |
Family
ID=21795814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE764314A BE764314A (fr) | 1970-03-16 | 1971-03-16 | Appareil et procede de croissance cristalline verticale en phase liquide |
Country Status (8)
Country | Link |
---|---|
US (1) | US3648654A (fr) |
JP (1) | JPS528796B1 (fr) |
BE (1) | BE764314A (fr) |
DE (1) | DE2111946C3 (fr) |
FR (1) | FR2084643A5 (fr) |
GB (1) | GB1315298A (fr) |
NL (1) | NL144496B (fr) |
SE (1) | SE377054B (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3036317A1 (de) * | 1980-09-26 | 1982-05-19 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren und vorrichtung zur fluessigphasenepitaxie |
JPS58148426A (ja) * | 1982-03-01 | 1983-09-03 | Semiconductor Res Found | 成長装置 |
JP2001160540A (ja) * | 1999-09-22 | 2001-06-12 | Canon Inc | 半導体装置の製造方法、液相成長法及び液相成長装置、太陽電池 |
JP4827107B2 (ja) * | 2006-03-24 | 2011-11-30 | 日本碍子株式会社 | 窒化物単結晶の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1422545A (en) * | 1920-06-01 | 1922-07-11 | Ernest L Dayton | Coating apparatus |
US3206322A (en) * | 1960-10-31 | 1965-09-14 | Morgan John Robert | Vacuum deposition means and methods for manufacture of electronic components |
BE624740A (fr) * | 1961-11-15 | |||
DE1287047B (de) * | 1965-02-18 | 1969-01-16 | Siemens Ag | Verfahren und Vorrichtung zum Abscheiden einer einkristallinen Halbleiterschicht |
US3491720A (en) * | 1965-07-29 | 1970-01-27 | Monsanto Co | Epitaxial deposition reactor |
US3382843A (en) * | 1965-10-23 | 1968-05-14 | Optical Coating Laboratory Inc | Vacuum coating apparatus utilizing rotating sources |
US3524426A (en) * | 1968-02-29 | 1970-08-18 | Libbey Owens Ford Glass Co | Apparatus for coating by thermal evaporation |
US3551219A (en) * | 1968-05-09 | 1970-12-29 | Bell Telephone Labor Inc | Epitaxial growth technique |
US3560276A (en) * | 1968-12-23 | 1971-02-02 | Bell Telephone Labor Inc | Technique for fabrication of multilayered semiconductor structure |
US3565702A (en) * | 1969-02-14 | 1971-02-23 | Rca Corp | Depositing successive epitaxial semiconductive layers from the liquid phase |
-
1970
- 1970-03-16 US US19929A patent/US3648654A/en not_active Expired - Lifetime
-
1971
- 1971-03-05 SE SE7102846A patent/SE377054B/xx unknown
- 1971-03-12 DE DE2111946A patent/DE2111946C3/de not_active Expired
- 1971-03-15 NL NL717103418A patent/NL144496B/xx not_active IP Right Cessation
- 1971-03-15 FR FR7109005A patent/FR2084643A5/fr not_active Expired
- 1971-03-16 BE BE764314A patent/BE764314A/fr not_active IP Right Cessation
- 1971-03-16 JP JP46014124A patent/JPS528796B1/ja active Pending
- 1971-04-19 GB GB2403371*A patent/GB1315298A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
SE377054B (fr) | 1975-06-23 |
DE2111946C3 (de) | 1974-03-07 |
NL144496B (nl) | 1975-01-15 |
DE2111946A1 (de) | 1971-09-30 |
US3648654A (en) | 1972-03-14 |
NL7103418A (fr) | 1971-09-20 |
JPS528796B1 (fr) | 1977-03-11 |
DE2111946B2 (de) | 1973-08-02 |
FR2084643A5 (fr) | 1971-12-17 |
GB1315298A (en) | 1973-05-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RE | Patent lapsed |
Owner name: WESTERN ELECTRIC CY INC. Effective date: 19840316 |