AU724477B2 - Thin film actuated mirror array having dielectric layers - Google Patents

Thin film actuated mirror array having dielectric layers Download PDF

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Publication number
AU724477B2
AU724477B2 AU52899/96A AU5289996A AU724477B2 AU 724477 B2 AU724477 B2 AU 724477B2 AU 52899/96 A AU52899/96 A AU 52899/96A AU 5289996 A AU5289996 A AU 5289996A AU 724477 B2 AU724477 B2 AU 724477B2
Authority
AU
Australia
Prior art keywords
thin film
layer
array
actuated mirrors
electrodisplacive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU52899/96A
Other languages
English (en)
Other versions
AU5289996A (en
Inventor
Yong Geun Lim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of AU5289996A publication Critical patent/AU5289996A/en
Application granted granted Critical
Publication of AU724477B2 publication Critical patent/AU724477B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective
AU52899/96A 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers Ceased AU724477B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR96/2315 1996-01-31
KR1019960002315A KR100229790B1 (ko) 1996-01-31 1996-01-31 유전층을 갖는 박막형광로 조절장치
PCT/KR1996/000048 WO1997028653A1 (en) 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers

Publications (2)

Publication Number Publication Date
AU5289996A AU5289996A (en) 1997-08-22
AU724477B2 true AU724477B2 (en) 2000-09-21

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
AU52899/96A Ceased AU724477B2 (en) 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers

Country Status (14)

Country Link
JP (1) JP4152437B2 (ja)
KR (1) KR100229790B1 (ja)
CN (1) CN1104815C (ja)
AR (1) AR001149A1 (ja)
AU (1) AU724477B2 (ja)
BR (1) BR9607803A (ja)
CA (1) CA2216557A1 (ja)
CZ (1) CZ304197A3 (ja)
HU (1) HUP9801148A3 (ja)
PE (1) PE47197A1 (ja)
PL (1) PL179839B1 (ja)
TW (1) TW348324B (ja)
UY (1) UY24186A1 (ja)
WO (1) WO1997028653A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (ja) * 2001-05-11 2010-11-17 ソニー株式会社 光変調素子とそれを用いた光学装置、および光変調素子の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995012287A1 (en) * 1993-10-29 1995-05-04 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and methods for its manufacture
WO1995013693A1 (en) * 1993-11-19 1995-05-26 Micrel, Inc. Diamond shaped gate mesh for cellular mos transistor array

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
PL176490B1 (pl) * 1993-11-09 1999-06-30 Daewoo Electronics Co Ltd Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995012287A1 (en) * 1993-10-29 1995-05-04 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and methods for its manufacture
WO1995013693A1 (en) * 1993-11-19 1995-05-26 Micrel, Inc. Diamond shaped gate mesh for cellular mos transistor array

Also Published As

Publication number Publication date
HUP9801148A3 (en) 2002-07-29
JPH11503538A (ja) 1999-03-26
PE47197A1 (es) 1998-02-06
WO1997028653A1 (en) 1997-08-07
PL322490A1 (en) 1998-02-02
MX9707476A (es) 1997-11-29
CZ304197A3 (cs) 1998-04-15
AR001149A1 (es) 1997-09-24
CN1104815C (zh) 2003-04-02
TW348324B (en) 1998-12-21
JP4152437B2 (ja) 2008-09-17
AU5289996A (en) 1997-08-22
CA2216557A1 (en) 1997-08-07
CN1179871A (zh) 1998-04-22
PL179839B1 (pl) 2000-11-30
HUP9801148A2 (hu) 1998-08-28
UY24186A1 (es) 1996-06-21
KR100229790B1 (ko) 1999-11-15
BR9607803A (pt) 1998-07-07
KR970060514A (ko) 1997-08-12

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Legal Events

Date Code Title Description
FGA Letters patent sealed or granted (standard patent)
MK14 Patent ceased section 143(a) (annual fees not paid) or expired