AU713214B2 - Fluid storage and delivery system comprising high work capacity physical sorbent - Google Patents
Fluid storage and delivery system comprising high work capacity physical sorbent Download PDFInfo
- Publication number
- AU713214B2 AU713214B2 AU34572/97A AU3457297A AU713214B2 AU 713214 B2 AU713214 B2 AU 713214B2 AU 34572/97 A AU34572/97 A AU 34572/97A AU 3457297 A AU3457297 A AU 3457297A AU 713214 B2 AU713214 B2 AU 713214B2
- Authority
- AU
- Australia
- Prior art keywords
- fluid
- sorbent
- dispensing
- storage
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000002594 sorbent Substances 0.000 title claims abstract description 483
- 238000003860 storage Methods 0.000 title claims abstract description 258
- 239000012530 fluid Substances 0.000 title claims description 288
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims abstract description 129
- WSWCOQWTEOXDQX-MQQKCMAXSA-M (E,E)-sorbate Chemical compound C\C=C\C=C\C([O-])=O WSWCOQWTEOXDQX-MQQKCMAXSA-M 0.000 claims abstract description 116
- 229940075554 sorbate Drugs 0.000 claims abstract description 116
- 239000000463 material Substances 0.000 claims abstract description 102
- 238000001179 sorption measurement Methods 0.000 claims abstract description 76
- 238000003795 desorption Methods 0.000 claims abstract description 63
- 238000002336 sorption--desorption measurement Methods 0.000 claims abstract description 36
- 239000007789 gas Substances 0.000 claims description 272
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 210
- 229910052799 carbon Inorganic materials 0.000 claims description 160
- 239000011148 porous material Substances 0.000 claims description 58
- 230000000694 effects Effects 0.000 claims description 48
- 238000011068 loading method Methods 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 43
- 239000007790 solid phase Substances 0.000 claims description 43
- 238000010438 heat treatment Methods 0.000 claims description 41
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 36
- 239000011324 bead Substances 0.000 claims description 32
- 230000008569 process Effects 0.000 claims description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 29
- 229910001868 water Inorganic materials 0.000 claims description 29
- 239000010457 zeolite Substances 0.000 claims description 29
- 229910052723 transition metal Inorganic materials 0.000 claims description 27
- 150000003624 transition metals Chemical class 0.000 claims description 27
- 150000001875 compounds Chemical class 0.000 claims description 24
- 238000004891 communication Methods 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 21
- -1 diborane Chemical compound 0.000 claims description 20
- 238000005468 ion implantation Methods 0.000 claims description 20
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 229910000077 silane Inorganic materials 0.000 claims description 19
- 238000000354 decomposition reaction Methods 0.000 claims description 18
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 18
- 239000003575 carbonaceous material Substances 0.000 claims description 17
- 239000003153 chemical reaction reagent Substances 0.000 claims description 17
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 claims description 16
- 150000002739 metals Chemical class 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 15
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical class Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 claims description 14
- 229920000642 polymer Polymers 0.000 claims description 13
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 12
- 150000004678 hydrides Chemical class 0.000 claims description 11
- 229910015900 BF3 Inorganic materials 0.000 claims description 10
- 239000000356 contaminant Substances 0.000 claims description 10
- 229910000078 germane Inorganic materials 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 10
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 8
- 239000000460 chlorine Substances 0.000 claims description 8
- 229910052801 chlorine Inorganic materials 0.000 claims description 8
- 150000004820 halides Chemical class 0.000 claims description 8
- LELOWRISYMNNSU-UHFFFAOYSA-N hydrogen cyanide Chemical compound N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 8
- 239000008188 pellet Substances 0.000 claims description 8
- 230000002829 reductive effect Effects 0.000 claims description 8
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 239000008187 granular material Substances 0.000 claims description 7
- 229910000042 hydrogen bromide Inorganic materials 0.000 claims description 7
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 7
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 claims description 7
- 229910000058 selane Inorganic materials 0.000 claims description 7
- 229910000059 tellane Inorganic materials 0.000 claims description 7
- VTLHPSMQDDEFRU-UHFFFAOYSA-N tellane Chemical compound [TeH2] VTLHPSMQDDEFRU-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910021529 ammonia Inorganic materials 0.000 claims description 6
- 229910000074 antimony hydride Inorganic materials 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 6
- 239000004744 fabric Substances 0.000 claims description 6
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 6
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims description 6
- 229910000043 hydrogen iodide Inorganic materials 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- OUULRIDHGPHMNQ-UHFFFAOYSA-N stibane Chemical compound [SbH3] OUULRIDHGPHMNQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000003826 tablet Substances 0.000 claims description 6
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 5
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 5
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 5
- 229910021426 porous silicon Inorganic materials 0.000 claims description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- YGYAWVDWMABLBF-UHFFFAOYSA-N Phosgene Chemical compound ClC(Cl)=O YGYAWVDWMABLBF-UHFFFAOYSA-N 0.000 claims description 4
- 150000001450 anions Chemical class 0.000 claims description 4
- 230000001404 mediated effect Effects 0.000 claims description 4
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 claims description 4
- 150000002902 organometallic compounds Chemical class 0.000 claims description 4
- 238000000197 pyrolysis Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 229910015844 BCl3 Inorganic materials 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 229910017843 NF3 Inorganic materials 0.000 claims description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 3
- 230000002411 adverse Effects 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 3
- HHFCFXJTAZTLAO-UHFFFAOYSA-N fluorogermanium Chemical compound [Ge]F HHFCFXJTAZTLAO-UHFFFAOYSA-N 0.000 claims description 3
- 150000002894 organic compounds Chemical class 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 3
- 239000011591 potassium Substances 0.000 claims description 3
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 3
- PORFVJURJXKREL-UHFFFAOYSA-N trimethylstibine Chemical compound C[Sb](C)C PORFVJURJXKREL-UHFFFAOYSA-N 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910052792 caesium Inorganic materials 0.000 claims description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- KWLSQQRRSAWBOQ-UHFFFAOYSA-N dipotassioarsanylpotassium Chemical compound [K][As]([K])[K] KWLSQQRRSAWBOQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052701 rubidium Inorganic materials 0.000 claims description 2
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 claims description 2
- 230000002000 scavenging effect Effects 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- 239000011734 sodium Substances 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000003921 oil Substances 0.000 claims 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- KJNGJIPPQOFCSK-UHFFFAOYSA-N [H][Sr][H] Chemical compound [H][Sr][H] KJNGJIPPQOFCSK-UHFFFAOYSA-N 0.000 claims 1
- 239000011575 calcium Substances 0.000 claims 1
- 229910052791 calcium Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052744 lithium Inorganic materials 0.000 claims 1
- 229910052749 magnesium Inorganic materials 0.000 claims 1
- 239000011777 magnesium Substances 0.000 claims 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 229910052706 scandium Inorganic materials 0.000 claims 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims 1
- 229910052711 selenium Inorganic materials 0.000 claims 1
- 239000011669 selenium Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052714 tellurium Inorganic materials 0.000 claims 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims 1
- 229910052716 thallium Inorganic materials 0.000 claims 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 26
- 229910021536 Zeolite Inorganic materials 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 20
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 19
- 241000894007 species Species 0.000 description 15
- 229910052757 nitrogen Inorganic materials 0.000 description 13
- 238000002955 isolation Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- 239000003463 adsorbent Substances 0.000 description 10
- 238000010926 purge Methods 0.000 description 10
- 238000011282 treatment Methods 0.000 description 10
- 239000000047 product Substances 0.000 description 9
- 239000002808 molecular sieve Substances 0.000 description 8
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000011049 filling Methods 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 6
- 150000002823 nitrates Chemical class 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- 206010002091 Anaesthesia Diseases 0.000 description 4
- 230000037005 anaesthesia Effects 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000011143 downstream manufacturing Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000011065 in-situ storage Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 125000002524 organometallic group Chemical group 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 238000001949 anaesthesia Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 238000012512 characterization method Methods 0.000 description 3
- 239000003610 charcoal Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 3
- 238000007872 degassing Methods 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 238000005429 filling process Methods 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000005984 hydrogenation reaction Methods 0.000 description 3
- 239000007943 implant Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000029058 respiratory gaseous exchange Effects 0.000 description 3
- ZQXCQTAELHSNAT-UHFFFAOYSA-N 1-chloro-3-nitro-5-(trifluoromethyl)benzene Chemical compound [O-][N+](=O)C1=CC(Cl)=CC(C(F)(F)F)=C1 ZQXCQTAELHSNAT-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- 235000013162 Cocos nucifera Nutrition 0.000 description 2
- 244000060011 Cocos nucifera Species 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- 239000013032 Hydrocarbon resin Substances 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000003245 coal Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010411 cooking Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 231100001261 hazardous Toxicity 0.000 description 2
- 229920006270 hydrocarbon resin Polymers 0.000 description 2
- RSHAOIXHUHAZPM-UHFFFAOYSA-N magnesium hydride Chemical compound [MgH2] RSHAOIXHUHAZPM-UHFFFAOYSA-N 0.000 description 2
- 229910012375 magnesium hydride Inorganic materials 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 229920002239 polyacrylonitrile Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000002516 radical scavenger Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- WWYNJERNGUHSAO-XUDSTZEESA-N (+)-Norgestrel Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](CC)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 WWYNJERNGUHSAO-XUDSTZEESA-N 0.000 description 1
- SHFZGLTZIWCZCE-UHFFFAOYSA-N C(C=CC=CC)(=O)O.[AsH3] Chemical compound C(C=CC=CC)(=O)O.[AsH3] SHFZGLTZIWCZCE-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 101100441092 Danio rerio crlf3 gene Proteins 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 241000935974 Paralichthys dentatus Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 241000607479 Yersinia pestis Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 239000002156 adsorbate Substances 0.000 description 1
- ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 description 1
- HJJOHHHEKFECQI-UHFFFAOYSA-N aluminum;phosphite Chemical compound [Al+3].[O-]P([O-])[O-] HJJOHHHEKFECQI-UHFFFAOYSA-N 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910021386 carbon form Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 150000001975 deuterium Chemical class 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- MYRTYDVEIRVNKP-UHFFFAOYSA-N divinylbenzene Substances C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011067 equilibration Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000003958 fumigation Methods 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 238000010413 gardening Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 150000002496 iodine Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000001535 kindling effect Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000012354 overpressurization Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000002459 porosimetry Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000012056 semi-solid material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 230000007928 solubilization Effects 0.000 description 1
- 238000005063 solubilization Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002560 therapeutic procedure Methods 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
- F17C7/02—Discharging liquefied gases
- F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C11/00—Use of gas-solvents or gas-sorbents in vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/30—Physical properties of adsorbents
- B01D2253/302—Dimensions
- B01D2253/304—Linear dimensions, e.g. particle shape, diameter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0388—Arrangement of valves, regulators, filters
- F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- External Artificial Organs (AREA)
- Separation Of Gases By Adsorption (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/650,634 US5704965A (en) | 1994-10-13 | 1996-05-20 | Fluid storage and delivery system utilizing carbon sorbent medium |
| US08/650633 | 1996-05-20 | ||
| US08/650634 | 1996-05-20 | ||
| US08/650,633 US5704967A (en) | 1995-10-13 | 1996-05-20 | Fluid storage and delivery system comprising high work capacity physical sorbent |
| PCT/IB1997/000943 WO1997044118A1 (en) | 1996-05-20 | 1997-05-20 | Fluid storage and delivery system comprising high work capacity physical sorbent |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU3457297A AU3457297A (en) | 1997-12-09 |
| AU713214B2 true AU713214B2 (en) | 1999-11-25 |
Family
ID=27095914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU34572/97A Ceased AU713214B2 (en) | 1996-05-20 | 1997-05-20 | Fluid storage and delivery system comprising high work capacity physical sorbent |
Country Status (9)
| Country | Link |
|---|---|
| EP (1) | EP0854749B1 (enExample) |
| JP (2) | JPH11511233A (enExample) |
| CN (1) | CN1128652C (enExample) |
| AT (1) | ATE230294T1 (enExample) |
| AU (1) | AU713214B2 (enExample) |
| CA (1) | CA2225221C (enExample) |
| DE (1) | DE69718137T2 (enExample) |
| TW (1) | TW434038B (enExample) |
| WO (1) | WO1997044118A1 (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6132492A (en) * | 1994-10-13 | 2000-10-17 | Advanced Technology Materials, Inc. | Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same |
| US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| JP3592636B2 (ja) * | 1998-02-17 | 2004-11-24 | カネボウ株式会社 | 気体化合物吸着貯蔵用活性炭 |
| US6101816A (en) * | 1998-04-28 | 2000-08-15 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system |
| US6277342B1 (en) * | 1999-08-23 | 2001-08-21 | Air Products And Chemicals, Inc. | Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers |
| US6716271B1 (en) * | 2002-10-29 | 2004-04-06 | Advanced Technology Materials, Inc. | Apparatus and method for inhibiting decomposition of germane |
| US6991671B2 (en) | 2002-12-09 | 2006-01-31 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
| US6743278B1 (en) * | 2002-12-10 | 2004-06-01 | Advanced Technology Materials, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
| US7494530B2 (en) | 2002-12-10 | 2009-02-24 | Advanced Technology Materials, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
| US8002880B2 (en) | 2002-12-10 | 2011-08-23 | Advanced Technology Materials, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
| US7648682B2 (en) | 2004-07-08 | 2010-01-19 | Air Products And Chemicals, Inc. | Wick systems for complexed gas technology |
| DE102006020847A1 (de) * | 2006-05-04 | 2007-11-08 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Reinigung eines Gasspeichers |
| US8852303B2 (en) * | 2009-12-21 | 2014-10-07 | Southern Company Services, Inc. | High pressure feeder and method of operating to feed granular or fine materials |
| US8858819B2 (en) | 2010-02-15 | 2014-10-14 | Air Products And Chemicals, Inc. | Method for chemical mechanical planarization of a tungsten-containing substrate |
| WO2011163342A2 (en) * | 2010-06-25 | 2011-12-29 | Advanced Technology Materials, Inc. | Recovery of xe and other high value compounds |
| US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
| WO2012106218A2 (en) | 2011-01-31 | 2012-08-09 | Advanced Technology Materials, Inc. | Carbon pyrolyzate adsorbent having utility for co2 capture and methods of making and using the same |
| US9126139B2 (en) | 2012-05-29 | 2015-09-08 | Entegris, Inc. | Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent |
| US9186650B2 (en) | 2013-04-05 | 2015-11-17 | Entegris, Inc. | Adsorbent having utility for CO2 capture from gas mixtures |
| MY209466A (en) * | 2013-08-05 | 2025-07-10 | Numat Tech Inc | Metal organic frameworks for electronic gas storage |
| CN104267133B (zh) * | 2014-09-02 | 2016-09-14 | 中国工程物理研究院材料研究所 | 一种测定气固表面吸附等温线的方法 |
| KR102075322B1 (ko) | 2014-10-27 | 2020-02-07 | 엔테그리스, 아이엔씨. | 이온 주입 방법 및 장치 |
| CN107107028B (zh) * | 2014-12-04 | 2021-06-25 | 纽麦特科技公司 | 用于减少和提纯电子气体以及从烃流中除去汞的多孔聚合物 |
| RU173726U1 (ru) * | 2016-12-21 | 2017-09-07 | федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) | Устройство для хранения и подачи природного газа потребителю |
| EP3431859A1 (de) * | 2017-07-21 | 2019-01-23 | Covestro Deutschland AG | Verfahren zur leckage-sicheren speicherung von verflüssigtem chlor |
| US11745161B2 (en) * | 2017-11-03 | 2023-09-05 | Basf Corporation | Arsine adsorbents |
| EP3710126A4 (en) * | 2017-11-17 | 2021-08-11 | Rasirc, Inc. | PROCESS, SYSTEM AND DEVICE FOR STORAGE AND DISTRIBUTION OF TREATMENT GAS FROM A SUBSTRATE |
| US10837603B2 (en) * | 2018-03-06 | 2020-11-17 | Entegris, Inc. | Gas supply vessel |
| SG11202102146TA (en) * | 2018-09-13 | 2021-04-29 | Entegris Inc | Adsorbent-based, mechanically-regulated gas storage and delivery vessel |
| CN109827864B (zh) * | 2019-03-06 | 2021-04-13 | 苏州市环境科学研究所 | 土壤中单一污染源voc热脱附动力学试验方法 |
| KR102660643B1 (ko) * | 2019-05-24 | 2024-04-26 | 엔테그리스, 아이엔씨. | 유기금속 증기를 흡착하기 위한 방법 및 시스템 |
| US11577217B2 (en) * | 2019-12-12 | 2023-02-14 | Praxair Technology, Inc. | Dopant fluid storage and dispensing systems utilizing high performance, structurally modified particulate carbon adsorbents |
| CN112591711B (zh) * | 2020-12-16 | 2022-05-20 | 浙江天采云集科技股份有限公司 | 一种HF/HCl混合气体高纯度高收率的FTrPSA分离与净化提取方法 |
| CN112744788B (zh) * | 2020-12-16 | 2022-09-23 | 四川天采科技有限责任公司 | 一种氟硅酸法生产无水HF精制的FTrPSA深度脱水除杂的分离与净化方法 |
| CN117940202A (zh) * | 2021-09-15 | 2024-04-26 | 北京康肯环保设备有限公司 | 环氧乙烷气的除去方法和使用其的环氧乙烷气除去系统 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4761395A (en) * | 1987-03-24 | 1988-08-02 | Advanced Technology Materials, Inc. | Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom |
| US4749384A (en) * | 1987-04-24 | 1988-06-07 | Union Carbide Corporation | Method and apparatus for quick filling gas cylinders |
| US4738693A (en) * | 1987-04-27 | 1988-04-19 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| US4723967A (en) * | 1987-04-27 | 1988-02-09 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| US4744221A (en) * | 1987-06-29 | 1988-05-17 | Olin Corporation | Zeolite based arsine storage and delivery system |
| DE3843313A1 (de) * | 1988-12-22 | 1990-06-28 | Wacker Chemitronic | Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen |
| US5385689A (en) * | 1993-06-29 | 1995-01-31 | Novapure Corporation | Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom |
| US5518528A (en) * | 1994-10-13 | 1996-05-21 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds |
-
1997
- 1997-05-20 CA CA002225221A patent/CA2225221C/en not_active Expired - Lifetime
- 1997-05-20 AT AT97930712T patent/ATE230294T1/de not_active IP Right Cessation
- 1997-05-20 WO PCT/IB1997/000943 patent/WO1997044118A1/en not_active Ceased
- 1997-05-20 EP EP97930712A patent/EP0854749B1/en not_active Expired - Lifetime
- 1997-05-20 DE DE69718137T patent/DE69718137T2/de not_active Expired - Lifetime
- 1997-05-20 JP JP9540701A patent/JPH11511233A/ja not_active Withdrawn
- 1997-05-20 CN CN97190176A patent/CN1128652C/zh not_active Expired - Lifetime
- 1997-05-20 AU AU34572/97A patent/AU713214B2/en not_active Ceased
- 1997-10-15 TW TW086115282A patent/TW434038B/zh not_active IP Right Cessation
-
2008
- 2008-01-09 JP JP2008002588A patent/JP2008196689A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| CA2225221A1 (en) | 1997-11-27 |
| DE69718137D1 (de) | 2003-02-06 |
| EP0854749A1 (en) | 1998-07-29 |
| TW434038B (en) | 2001-05-16 |
| JP2008196689A (ja) | 2008-08-28 |
| DE69718137T2 (de) | 2003-10-09 |
| AU3457297A (en) | 1997-12-09 |
| CN1181716A (zh) | 1998-05-13 |
| CN1128652C (zh) | 2003-11-26 |
| CA2225221C (en) | 2009-01-06 |
| JPH11511233A (ja) | 1999-09-28 |
| EP0854749B1 (en) | 2003-01-02 |
| EP0854749A4 (enExample) | 1998-07-29 |
| ATE230294T1 (de) | 2003-01-15 |
| WO1997044118A1 (en) | 1997-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU713214B2 (en) | Fluid storage and delivery system comprising high work capacity physical sorbent | |
| US5704967A (en) | Fluid storage and delivery system comprising high work capacity physical sorbent | |
| US5704965A (en) | Fluid storage and delivery system utilizing carbon sorbent medium | |
| US6592653B2 (en) | Fluid storage and delivery system utilizing low heels carbon sorbent medium | |
| US5707424A (en) | Process system with integrated gas storage and delivery unit | |
| US6540819B2 (en) | Gas cabinet assembly comprising sorbent-based gas storage and delivery system | |
| JP2003532034A (ja) | 収着剤ベースのガス貯蔵及び供給システムを備えるガスキャビネットアセンブリ | |
| WO1999056057A9 (en) | Fluid storage and dispensing system | |
| WO2000012196A1 (en) | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment | |
| JP5700570B2 (ja) | 吸着性流体の貯蔵ならびに計量分配用の吸着・脱着装置及び流体試薬の供給方法 | |
| JP2009008265A5 (enExample) | ||
| MXPA97010528A (en) | System of storage and distribution of fluids that comprises physical sorbent with high capacity detrab |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK14 | Patent ceased section 143(a) (annual fees not paid) or expired |