AU582581B2 - Silicon nozzle structures and method of manufacture - Google Patents

Silicon nozzle structures and method of manufacture

Info

Publication number
AU582581B2
AU582581B2 AU48190/85A AU4819085A AU582581B2 AU 582581 B2 AU582581 B2 AU 582581B2 AU 48190/85 A AU48190/85 A AU 48190/85A AU 4819085 A AU4819085 A AU 4819085A AU 582581 B2 AU582581 B2 AU 582581B2
Authority
AU
Australia
Prior art keywords
manufacture
nozzle structures
silicon nozzle
silicon
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU48190/85A
Other languages
English (en)
Other versions
AU4819085A (en
Inventor
Herbert A. Waggener
Joseph C. Zuercher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Teletype Corp
Original Assignee
AT&T Teletype Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24651804&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=AU582581(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by AT&T Teletype Corp filed Critical AT&T Teletype Corp
Publication of AU4819085A publication Critical patent/AU4819085A/en
Application granted granted Critical
Publication of AU582581B2 publication Critical patent/AU582581B2/en
Anticipated expiration legal-status Critical
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Weting (AREA)
  • Nozzles (AREA)
  • Special Spraying Apparatus (AREA)
AU48190/85A 1984-10-15 1985-10-02 Silicon nozzle structures and method of manufacture Expired AU582581B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66100584A 1984-10-15 1984-10-15
US661005 1984-10-15

Publications (2)

Publication Number Publication Date
AU4819085A AU4819085A (en) 1986-04-24
AU582581B2 true AU582581B2 (en) 1989-04-06

Family

ID=24651804

Family Applications (1)

Application Number Title Priority Date Filing Date
AU48190/85A Expired AU582581B2 (en) 1984-10-15 1985-10-02 Silicon nozzle structures and method of manufacture

Country Status (7)

Country Link
EP (1) EP0178596B2 (de)
JP (1) JPS6198558A (de)
KR (1) KR930009109B1 (de)
AU (1) AU582581B2 (de)
CA (1) CA1237020A (de)
DE (1) DE3581355D1 (de)
ES (2) ES8707144A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4791436A (en) * 1987-11-17 1988-12-13 Hewlett-Packard Company Nozzle plate geometry for ink jet pens and method of manufacture
DE4222140C2 (de) * 1992-07-06 1994-06-16 Heinzl Joachim Aerostatisches Miniaturlager
US6120131A (en) * 1995-08-28 2000-09-19 Lexmark International, Inc. Method of forming an inkjet printhead nozzle structure
US6183064B1 (en) 1995-08-28 2001-02-06 Lexmark International, Inc. Method for singulating and attaching nozzle plates to printheads
EP0985534A4 (de) * 1997-05-14 2001-03-28 Seiko Epson Corp Verfahren zur bildung einer spritzdüse und verfahren zur herstellung eines tintenstrahlkopfes
EP0921004A3 (de) * 1997-12-05 2000-04-26 Canon Kabushiki Kaisha Flüssigkeitsausstosskopf , Aufzeichnungsgerät und Flüssigkeitsausstosskopfenherstellungsverfahren
US6491380B2 (en) * 1997-12-05 2002-12-10 Canon Kabushiki Kaisha Liquid discharging head with common ink chamber positioned over a movable member
JP2000198199A (ja) 1997-12-05 2000-07-18 Canon Inc 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法
US6463656B1 (en) 2000-06-29 2002-10-15 Eastman Kodak Company Laminate and gasket manfold for ink jet delivery systems and similar devices
KR100944884B1 (ko) * 2007-11-01 2010-03-03 주식회사 알파켐 비충격 프린팅을 위한 노즐 및 이를 사용한 인쇄방법
JP5407162B2 (ja) * 2008-04-01 2014-02-05 コニカミノルタ株式会社 インクジェットヘッド、インクジェットヘッドを備えた塗布装置及びインクジェットヘッドの駆動方法
KR101291689B1 (ko) * 2010-08-17 2013-08-01 엔젯 주식회사 정전기력을 이용하는 액적분사장치용 노즐

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3574013A (en) * 1969-01-06 1971-04-06 Buckbee Mears Co Aperture mask for color tv picture tubes and method for making same
US3657599A (en) * 1970-03-18 1972-04-18 Casio Computer Co Ltd Ink accelerating unit for use in ink jet printer
US3949410A (en) * 1975-01-23 1976-04-06 International Business Machines Corporation Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3958255A (en) * 1974-12-31 1976-05-18 International Business Machines Corporation Ink jet nozzle structure
US3921916A (en) * 1974-12-31 1975-11-25 Ibm Nozzles formed in monocrystalline silicon
US4157935A (en) * 1977-12-23 1979-06-12 International Business Machines Corporation Method for producing nozzle arrays for ink jet printers
JPS5753366A (en) * 1980-09-17 1982-03-30 Ricoh Co Ltd Nozzle plate for liquid jet apparatus
JPS57116656A (en) * 1981-01-14 1982-07-20 Sharp Corp Manufacture of orifice for ink jet printer
JPS57182449A (en) * 1981-05-07 1982-11-10 Fuji Xerox Co Ltd Forming method of ink jet multinozzle

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3574013A (en) * 1969-01-06 1971-04-06 Buckbee Mears Co Aperture mask for color tv picture tubes and method for making same
US3657599A (en) * 1970-03-18 1972-04-18 Casio Computer Co Ltd Ink accelerating unit for use in ink jet printer
US3949410A (en) * 1975-01-23 1976-04-06 International Business Machines Corporation Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith

Also Published As

Publication number Publication date
ES547845A0 (es) 1987-08-16
ES8707144A1 (es) 1987-08-16
EP0178596B2 (de) 1994-06-01
ES296483Y (es) 1988-04-16
EP0178596A3 (en) 1987-09-16
ES296483U (es) 1987-10-16
KR930009109B1 (ko) 1993-09-23
KR860003109A (ko) 1986-05-19
EP0178596A2 (de) 1986-04-23
DE3581355D1 (de) 1991-02-21
AU4819085A (en) 1986-04-24
EP0178596B1 (de) 1991-01-16
CA1237020A (en) 1988-05-24
JPS6198558A (ja) 1986-05-16

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