AU4991799A - Temperature control of electronic devices using power following feedback - Google Patents

Temperature control of electronic devices using power following feedback

Info

Publication number
AU4991799A
AU4991799A AU49917/99A AU4991799A AU4991799A AU 4991799 A AU4991799 A AU 4991799A AU 49917/99 A AU49917/99 A AU 49917/99A AU 4991799 A AU4991799 A AU 4991799A AU 4991799 A AU4991799 A AU 4991799A
Authority
AU
Australia
Prior art keywords
temperature control
electronic devices
power following
following feedback
feedback
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU49917/99A
Other languages
English (en)
Inventor
Thomas P. Jones
Mark F. Malinoski
Jonathan E. Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger Technologies Inc
Original Assignee
Schlumberger Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Technologies Inc filed Critical Schlumberger Technologies Inc
Publication of AU4991799A publication Critical patent/AU4991799A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • G05D23/24—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element having a resistance varying with temperature, e.g. a thermistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Control Of Temperature (AREA)
AU49917/99A 1998-07-14 1999-07-14 Temperature control of electronic devices using power following feedback Abandoned AU4991799A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9272098P 1998-07-14 1998-07-14
US60092720 1998-07-14
PCT/US1999/015846 WO2000004582A1 (en) 1998-07-14 1999-07-14 Temperature control of electronic devices using power following feedback

Publications (1)

Publication Number Publication Date
AU4991799A true AU4991799A (en) 2000-02-07

Family

ID=22234752

Family Applications (1)

Application Number Title Priority Date Filing Date
AU49917/99A Abandoned AU4991799A (en) 1998-07-14 1999-07-14 Temperature control of electronic devices using power following feedback

Country Status (5)

Country Link
JP (1) JP4703850B2 (enExample)
KR (1) KR100755295B1 (enExample)
AU (1) AU4991799A (enExample)
DE (1) DE19983379B4 (enExample)
WO (1) WO2000004582A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794620B1 (en) * 2001-11-07 2004-09-21 Advanced Micro Devices, Inc. Feedforward temperature control of device under test
DE10203790A1 (de) * 2002-01-31 2003-06-26 Siemens Ag Aktive Stabilisierung des Temperaturniveaus in Halbleiterbauelementen
US6825681B2 (en) 2002-07-19 2004-11-30 Delta Design, Inc. Thermal control of a DUT using a thermal control substrate
US7313500B2 (en) 2004-11-05 2007-12-25 Schweitzer Engineering Labortories, Inc. Method to increase the maximum allowable ambient temperature rating of an electronic device
DE102005001163B3 (de) 2005-01-10 2006-05-18 Erich Reitinger Verfahren und Vorrichtung zum Testen von Halbleiterwafern mittels einer temperierbaren Aufspanneinrichtung
US9570643B2 (en) 2013-10-28 2017-02-14 General Electric Company System and method for enhanced convection cooling of temperature-dependent power producing and power consuming electrical devices
KR102269440B1 (ko) 2016-06-15 2021-06-25 와틀로 일렉트릭 매뉴팩츄어링 컴파니 열시스템용 전력 변환기
US10514416B2 (en) 2017-09-29 2019-12-24 Advantest Corporation Electronic component handling apparatus and electronic component testing apparatus
CN109932630B (zh) * 2017-12-15 2021-08-03 朋程科技股份有限公司 过温度检测电路及其测试方法
JP7266481B2 (ja) * 2019-07-19 2023-04-28 東京エレクトロン株式会社 温度制御装置、温度制御方法、および検査装置
JP7534047B2 (ja) * 2020-12-07 2024-08-14 東京エレクトロン株式会社 検査装置の制御方法及び検査装置
WO2025191634A1 (ja) * 2024-03-11 2025-09-18 株式会社日立ハイテク プラズマ処理装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4330809A (en) * 1979-12-31 1982-05-18 Crown International, Inc. Thermal protection circuit for the die of a transistor
US4637020A (en) * 1983-08-01 1987-01-13 Fairchild Semiconductor Corporation Method and apparatus for monitoring automated testing of electronic circuits
US4686627A (en) * 1984-12-24 1987-08-11 Honeywell Inc. Electrical test apparatus
WO1987001813A1 (en) * 1985-09-23 1987-03-26 Sharetree Limited An oven for the burn-in of integrated circuits
DE3536098A1 (de) * 1985-10-09 1987-04-09 Siemens Ag Einrichtung zum ueberwachen der temperatur eines elektrischen bauelements
US4713612A (en) * 1986-07-14 1987-12-15 Hughes Aircraft Company Method and apparatus for determination of junction-to-case thermal resistance for a hybrid circuit element
US5324916A (en) * 1991-11-01 1994-06-28 Hewlett-Packard Company System and method for dynamic power compensation
US5287292A (en) * 1992-10-16 1994-02-15 Picopower Technology, Inc. Heat regulator for integrated circuits
JPH07263526A (ja) * 1994-03-17 1995-10-13 Hitachi Ltd ウェハチャックおよび半導体素子の冷却方法
JP2986381B2 (ja) * 1994-08-16 1999-12-06 インターナショナル・ビジネス・マシーンズ・コーポレイション 電子チップ温度制御装置及び方法
JPH09264647A (ja) * 1996-03-27 1997-10-07 Nec Corp 電子機器冷却回路
US6476627B1 (en) * 1996-10-21 2002-11-05 Delta Design, Inc. Method and apparatus for temperature control of a device during testing

Also Published As

Publication number Publication date
KR100755295B1 (ko) 2007-09-05
WO2000004582A9 (en) 2000-07-20
DE19983379B4 (de) 2011-08-18
JP4703850B2 (ja) 2011-06-15
WO2000004582A8 (en) 2000-05-18
JP2002520630A (ja) 2002-07-09
DE19983379T1 (de) 2001-09-13
KR20010071917A (ko) 2001-07-31
WO2000004582A1 (en) 2000-01-27

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase