DE19983379T1 - Temperaturregelung elektronischer Bauelemente unter Verwendung von Leistungsfolgerückkopplung - Google Patents
Temperaturregelung elektronischer Bauelemente unter Verwendung von LeistungsfolgerückkopplungInfo
- Publication number
- DE19983379T1 DE19983379T1 DE19983379T DE19983379T DE19983379T1 DE 19983379 T1 DE19983379 T1 DE 19983379T1 DE 19983379 T DE19983379 T DE 19983379T DE 19983379 T DE19983379 T DE 19983379T DE 19983379 T1 DE19983379 T1 DE 19983379T1
- Authority
- DE
- Germany
- Prior art keywords
- temperature control
- electronic components
- power sequence
- sequence feedback
- feedback
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/24—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element having a resistance varying with temperature, e.g. a thermistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Control Of Temperature (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9272098P | 1998-07-14 | 1998-07-14 | |
US60/092,720 | 1998-07-14 | ||
PCT/US1999/015846 WO2000004582A1 (en) | 1998-07-14 | 1999-07-14 | Temperature control of electronic devices using power following feedback |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19983379T1 true DE19983379T1 (de) | 2001-09-13 |
DE19983379B4 DE19983379B4 (de) | 2011-08-18 |
Family
ID=22234752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19983379T Expired - Lifetime DE19983379B4 (de) | 1998-07-14 | 1999-07-14 | Temperaturregelung elektronischer Bauelemente unter Verwendung von Leistungsfolgerückkopplung |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4703850B2 (de) |
KR (1) | KR100755295B1 (de) |
AU (1) | AU4991799A (de) |
DE (1) | DE19983379B4 (de) |
WO (1) | WO2000004582A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10203790A1 (de) * | 2002-01-31 | 2003-06-26 | Siemens Ag | Aktive Stabilisierung des Temperaturniveaus in Halbleiterbauelementen |
US7271604B2 (en) | 2005-01-10 | 2007-09-18 | Erich Reitinger | Method and apparatus for testing semiconductor wafers by means of a temperature-regulated chuck device |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6794620B1 (en) * | 2001-11-07 | 2004-09-21 | Advanced Micro Devices, Inc. | Feedforward temperature control of device under test |
US6825681B2 (en) | 2002-07-19 | 2004-11-30 | Delta Design, Inc. | Thermal control of a DUT using a thermal control substrate |
US7313500B2 (en) | 2004-11-05 | 2007-12-25 | Schweitzer Engineering Labortories, Inc. | Method to increase the maximum allowable ambient temperature rating of an electronic device |
US9570643B2 (en) | 2013-10-28 | 2017-02-14 | General Electric Company | System and method for enhanced convection cooling of temperature-dependent power producing and power consuming electrical devices |
US10514416B2 (en) | 2017-09-29 | 2019-12-24 | Advantest Corporation | Electronic component handling apparatus and electronic component testing apparatus |
CN109932630B (zh) * | 2017-12-15 | 2021-08-03 | 朋程科技股份有限公司 | 过温度检测电路及其测试方法 |
JP7266481B2 (ja) * | 2019-07-19 | 2023-04-28 | 東京エレクトロン株式会社 | 温度制御装置、温度制御方法、および検査装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4330809A (en) * | 1979-12-31 | 1982-05-18 | Crown International, Inc. | Thermal protection circuit for the die of a transistor |
US4637020A (en) * | 1983-08-01 | 1987-01-13 | Fairchild Semiconductor Corporation | Method and apparatus for monitoring automated testing of electronic circuits |
US4686627A (en) * | 1984-12-24 | 1987-08-11 | Honeywell Inc. | Electrical test apparatus |
DE3683284D1 (de) * | 1985-09-23 | 1992-02-13 | Sharetree Systems Ltd | Ofen zum einbrennen integrierter schaltungen. |
DE3536098A1 (de) * | 1985-10-09 | 1987-04-09 | Siemens Ag | Einrichtung zum ueberwachen der temperatur eines elektrischen bauelements |
US4713612A (en) * | 1986-07-14 | 1987-12-15 | Hughes Aircraft Company | Method and apparatus for determination of junction-to-case thermal resistance for a hybrid circuit element |
US5324916A (en) * | 1991-11-01 | 1994-06-28 | Hewlett-Packard Company | System and method for dynamic power compensation |
US5287292A (en) * | 1992-10-16 | 1994-02-15 | Picopower Technology, Inc. | Heat regulator for integrated circuits |
JPH07263526A (ja) * | 1994-03-17 | 1995-10-13 | Hitachi Ltd | ウェハチャックおよび半導体素子の冷却方法 |
JP2986381B2 (ja) * | 1994-08-16 | 1999-12-06 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 電子チップ温度制御装置及び方法 |
JPH09264647A (ja) * | 1996-03-27 | 1997-10-07 | Nec Corp | 電子機器冷却回路 |
US6476627B1 (en) * | 1996-10-21 | 2002-11-05 | Delta Design, Inc. | Method and apparatus for temperature control of a device during testing |
-
1999
- 1999-07-14 AU AU49917/99A patent/AU4991799A/en not_active Abandoned
- 1999-07-14 DE DE19983379T patent/DE19983379B4/de not_active Expired - Lifetime
- 1999-07-14 JP JP2000560611A patent/JP4703850B2/ja not_active Expired - Lifetime
- 1999-07-14 WO PCT/US1999/015846 patent/WO2000004582A1/en active Application Filing
- 1999-07-14 KR KR1020017000633A patent/KR100755295B1/ko not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10203790A1 (de) * | 2002-01-31 | 2003-06-26 | Siemens Ag | Aktive Stabilisierung des Temperaturniveaus in Halbleiterbauelementen |
US7271604B2 (en) | 2005-01-10 | 2007-09-18 | Erich Reitinger | Method and apparatus for testing semiconductor wafers by means of a temperature-regulated chuck device |
Also Published As
Publication number | Publication date |
---|---|
DE19983379B4 (de) | 2011-08-18 |
WO2000004582A1 (en) | 2000-01-27 |
WO2000004582A8 (en) | 2000-05-18 |
AU4991799A (en) | 2000-02-07 |
JP2002520630A (ja) | 2002-07-09 |
KR100755295B1 (ko) | 2007-09-05 |
JP4703850B2 (ja) | 2011-06-15 |
WO2000004582A9 (en) | 2000-07-20 |
KR20010071917A (ko) | 2001-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8127 | New person/name/address of the applicant |
Owner name: DELTA DESIGN,INC., POWAY, CALIF., US |
|
8110 | Request for examination paragraph 44 | ||
R018 | Grant decision by examination section/examining division | ||
R020 | Patent grant now final |
Effective date: 20111119 |
|
R071 | Expiry of right |