AU466665B2 - Photoresist film - Google Patents

Photoresist film

Info

Publication number
AU466665B2
AU466665B2 AU74460/74A AU7446074A AU466665B2 AU 466665 B2 AU466665 B2 AU 466665B2 AU 74460/74 A AU74460/74 A AU 74460/74A AU 7446074 A AU7446074 A AU 7446074A AU 466665 B2 AU466665 B2 AU 466665B2
Authority
AU
Australia
Prior art keywords
undercoat
topcoat
photosensitive resist
layer
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU74460/74A
Other languages
English (en)
Other versions
AU7446074A (en
Inventor
CARL W. CHRISTENSEN and MICHAEL J. ODDI MICHAEL GULLA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Application granted granted Critical
Publication of AU7446074A publication Critical patent/AU7446074A/en
Publication of AU466665B2 publication Critical patent/AU466665B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/094—Multilayer resist systems, e.g. planarising layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0577—Double layer of resist having the same pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0585—Second resist used as mask for selective stripping of first resist

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Materials For Photolithography (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AU74460/74A 1973-10-25 1974-10-17 Photoresist film Expired AU466665B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40964673A 1973-10-25 1973-10-25
USUS409646 1973-10-25

Publications (2)

Publication Number Publication Date
AU7446074A AU7446074A (en) 1975-11-06
AU466665B2 true AU466665B2 (en) 1975-11-06

Family

ID=23621393

Family Applications (1)

Application Number Title Priority Date Filing Date
AU74460/74A Expired AU466665B2 (en) 1973-10-25 1974-10-17 Photoresist film

Country Status (13)

Country Link
JP (1) JPS5529426B2 (enExample)
AU (1) AU466665B2 (enExample)
BE (1) BE821421A (enExample)
BR (1) BR7408768D0 (enExample)
CA (1) CA1051707A (enExample)
DE (1) DE2450380C2 (enExample)
ES (2) ES431310A1 (enExample)
FR (1) FR2249364B1 (enExample)
GB (2) GB1493834A (enExample)
IT (1) IT1025144B (enExample)
NL (1) NL7413916A (enExample)
SE (1) SE422631B (enExample)
ZA (1) ZA746683B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU594646B2 (en) * 1984-07-25 1990-03-15 Jipteck Pty Ltd Product and process for producing an image on a substrate
AU613463B2 (en) * 1988-03-28 1991-08-01 Kansai Paint Company, Limited Electrodeposition coating process of photoresist for printed circuit board

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4191572A (en) 1975-06-03 1980-03-04 E. I. Du Pont De Nemours And Company Process for image reproduction using multilayer photosensitive element with solvent-soluble layer
DE2660951C2 (de) * 1975-06-03 1986-08-07 E.I. Du Pont De Nemours And Co., Wilmington, Del. Lichtempfindliches Mehrschichtmaterial
US4316951A (en) 1975-06-03 1982-02-23 E. I. Du Pont De Nemours And Company Multilayer photosensitive element with solvent-soluble layer
US4356251A (en) 1975-06-03 1982-10-26 E. I. Du Pont De Nemours And Company Multilayer photosensitive element with solvent-soluble layer
US4311784A (en) 1978-05-09 1982-01-19 E. I. Du Pont De Nemours And Company Multilayer photosensitive solvent-processable litho element
JPS55501072A (enExample) * 1978-12-25 1980-12-04
US4357416A (en) 1980-04-21 1982-11-02 E. I. Du Pont De Nemours And Company Process for preparation of multilayer photosensitive solvent-processable litho element
DE3036710A1 (de) * 1980-09-29 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Verfahren zur erzeugung von photolackstrukuren
EP0091651B1 (en) * 1982-04-12 1988-08-03 Nippon Telegraph And Telephone Corporation Method for forming micropattern
US4756988A (en) * 1982-09-29 1988-07-12 Minnesota Mining And Manufacturing Company Multilayer dry-film negative-acting photoresist
US4672020A (en) * 1982-09-29 1987-06-09 Minnesota Mining And Manufacturing Company Multilayer dry-film positive-acting o-quinone diazide photoresist with integral laminable layer, photoresist layer, and strippable carrier layer
JPH0612452B2 (ja) * 1982-09-30 1994-02-16 ブリュ−ワ−・サイエンス・インコ−ポレイテッド 集積回路素子の製造方法
US4504566A (en) * 1982-11-01 1985-03-12 E. I. Du Pont De Nemours And Company Single exposure positive contact multilayer photosolubilizable litho element with two quinone diazide layers
DE3379983D1 (en) * 1982-11-01 1989-07-06 Du Pont Single exposure positive contact litho film
US4687720A (en) * 1984-12-21 1987-08-18 Hughes Aircraft Company Side lobe suppression in holograms using pre-exposure
US4815800A (en) * 1984-12-21 1989-03-28 Hughes Aircraft Company Flare reduction in holograms
US4571374A (en) * 1984-12-27 1986-02-18 Minnesota Mining And Manufacturing Company Multilayer dry-film positive-acting laminable photoresist with two photoresist layers wherein one layer includes thermal adhesive
US4854674A (en) * 1985-02-27 1989-08-08 Hughes Aircraft Company Process for improving holographic efficiency
US4799746A (en) * 1985-02-27 1989-01-24 Hughes Aircraft Company Efficient holograms and method for making same
JPH07113773B2 (ja) * 1986-07-04 1995-12-06 株式会社日立製作所 パタ−ン形成方法
JP2602511B2 (ja) * 1987-10-30 1997-04-23 株式会社日立製作所 パターン形成方法
EP0433720A3 (en) * 1989-12-22 1992-08-26 Siemens Aktiengesellschaft Method of applying a solder stop coating on printed circuit boards
JP2004140313A (ja) * 2002-08-22 2004-05-13 Jsr Corp 二層積層膜を用いた電極パッド上へのバンプ形成方法
CN112980410B (zh) * 2021-02-25 2022-09-13 山东滨州昱诚化工科技有限公司 一种油田暂堵剂及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE711043C (de) * 1935-08-09 1941-09-25 Bekk & Kaulen Chem Fab G M B H Verfahren zum Herstellen von Flachdruckformen durch Projektion gerasterter Bilder
GB907718A (en) * 1957-11-01 1962-10-10 Lithoplate Inc Hydrophilic base plates for diazo presensitized lithographic printing plates
US3549373A (en) * 1966-03-19 1970-12-22 Ricoh Kk Negative-to-positive reversible copy sheet
US3474719A (en) * 1966-04-15 1969-10-28 Gaf Corp Offset printing plates
US3469982A (en) * 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU594646B2 (en) * 1984-07-25 1990-03-15 Jipteck Pty Ltd Product and process for producing an image on a substrate
AU613463B2 (en) * 1988-03-28 1991-08-01 Kansai Paint Company, Limited Electrodeposition coating process of photoresist for printed circuit board

Also Published As

Publication number Publication date
ES448212A1 (es) 1977-12-01
IT1025144B (it) 1978-08-10
DE2450380A1 (de) 1975-05-07
GB1493833A (en) 1977-11-30
JPS5529426B2 (enExample) 1980-08-04
BR7408768D0 (pt) 1975-08-05
SE7412818L (enExample) 1975-04-28
GB1493834A (en) 1977-11-30
AU7446074A (en) 1975-11-06
SE422631B (sv) 1982-03-15
DE2450380C2 (de) 1984-10-11
ZA746683B (en) 1975-11-26
FR2249364A1 (enExample) 1975-05-23
FR2249364B1 (enExample) 1982-04-23
JPS5072704A (enExample) 1975-06-16
BE821421A (fr) 1975-04-24
NL7413916A (nl) 1975-04-29
CA1051707A (en) 1979-04-03
ES431310A1 (es) 1977-04-16

Similar Documents

Publication Publication Date Title
AU475754B2 (en) Photosensitive compositions
AU7446074A (en) Photoresist film
AU475418B2 (en) Film circuit assemblies
CA1028187A (en) Color photographic materials
CA1033257A (en) Detergent film
CA1024802A (en) Direct-positive photographic material
CA1015111A (en) Blow-head for tubular film
CA1017560A (en) Dryer for photographic film
CA1029880A (en) Thermoplastic film
CA1027795A (en) Light-sensitive photographic material
CA1033228A (en) Developing device
AU484684B2 (en) Photographic element
AU489887B2 (en) Photographic materials
AU484899B2 (en) Developing device
AU484431B2 (en) Photographic film processor
AU488492B2 (en) Photographic film assemblage
AU484419B2 (en) Photographic apparatus
AU488154B2 (en) Photographic apparatus
AU485610B2 (en) Masking films
AU486765B2 (en) Light-sensitive composition
AU493223B2 (en) Photopolymerisable composition
AU484452B2 (en) Film laminates
AU484918B2 (en) Color photographic materials
AU466024B2 (en) Thienodiazepine compounds
CA1017313A (en) Film magazine