AU3530000A - Apparatus and method for determining the active dopant profile in a semiconductor wafer - Google Patents

Apparatus and method for determining the active dopant profile in a semiconductor wafer

Info

Publication number
AU3530000A
AU3530000A AU35300/00A AU3530000A AU3530000A AU 3530000 A AU3530000 A AU 3530000A AU 35300/00 A AU35300/00 A AU 35300/00A AU 3530000 A AU3530000 A AU 3530000A AU 3530000 A AU3530000 A AU 3530000A
Authority
AU
Australia
Prior art keywords
determining
semiconductor wafer
dopant profile
active dopant
active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU35300/00A
Other languages
English (en)
Inventor
Peter G. Borden
Regina G. Nijmeijer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boxer Cross Inc
Original Assignee
Boxer Cross Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boxer Cross Inc filed Critical Boxer Cross Inc
Publication of AU3530000A publication Critical patent/AU3530000A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AU35300/00A 1999-03-22 2000-03-20 Apparatus and method for determining the active dopant profile in a semiconductor wafer Abandoned AU3530000A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/274,821 US6323951B1 (en) 1999-03-22 1999-03-22 Apparatus and method for determining the active dopant profile in a semiconductor wafer
US09274821 1999-03-22
PCT/US2000/007357 WO2000057159A1 (en) 1999-03-22 2000-03-20 Apparatus and method for determining the active dopant profile in a semiconductor wafer

Publications (1)

Publication Number Publication Date
AU3530000A true AU3530000A (en) 2000-10-09

Family

ID=23049742

Family Applications (1)

Application Number Title Priority Date Filing Date
AU35300/00A Abandoned AU3530000A (en) 1999-03-22 2000-03-20 Apparatus and method for determining the active dopant profile in a semiconductor wafer

Country Status (5)

Country Link
US (5) US6323951B1 (https=)
EP (1) EP1192444A1 (https=)
JP (1) JP2002540396A (https=)
AU (1) AU3530000A (https=)
WO (1) WO2000057159A1 (https=)

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US8115932B2 (en) * 2009-05-28 2012-02-14 Corning Incorporated Methods and apparatus for measuring ion implant dose
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Also Published As

Publication number Publication date
US6483594B2 (en) 2002-11-19
US20040239945A1 (en) 2004-12-02
US6426644B1 (en) 2002-07-30
EP1192444A1 (en) 2002-04-03
US6323951B1 (en) 2001-11-27
WO2000057159A1 (en) 2000-09-28
US20030043382A1 (en) 2003-03-06
US6885458B2 (en) 2005-04-26
US20020027660A1 (en) 2002-03-07
US20020085211A1 (en) 2002-07-04
JP2002540396A (ja) 2002-11-26

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase